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RIM Spare Parts

AMAT 0200-35576

PUMPING LID ISOLATOR

Part details

Part number0200-35576
DescriptionPUMPING LID ISOLATOR
OEM / brandAMAT
CategoryRIM Spare Parts
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Nearby part numbers

0200-35296GAS NOZZLE INNER0200-35320FOCUS RING0200-35323-CCAPTURE RING0200-35324SINGLE RING0200-35326FOCUS RING DPS0200-35335CAPTURE RING DPS0200-35579CHAMBER INSERT0200-35580BUSING PIN0200-35595OBS LINER LID0200-35611LID.LINER SCERW0200-35623INSERT RING SILICON MXP0200-356697SI TOP RING

Confirm specifications against the OEM datasheet, physical sample or approved drawing. Contact Lubanix with the tool platform, quantity and requested delivery date.