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RIM Spare Parts

LAM 716-011563-063

WAFER CLAMP 6INCH

Part details

Part number716-011563-063
DescriptionWAFER CLAMP 6INCH
OEM / brandLAM
CategoryRIM Spare Parts
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Nearby part numbers

716-003543-001HOT EDGE RING (315ESC)716-003543-123 REV.FRING, HOT EDGE, SI, DUAL SLOPE 300MM716-003543-135 REV.ERING, HOT EDGE, SI, DUAL SLOPE 300MM716-005773-005FOCUS RING716-006721-001INSULATOR RING716-011057-002RING FILLER UPPER716-011563-151UNIVERSAL CLAMP RING716-011563-161WAFER CLAMP 6 INCH716-011565-002BOILT CLAMP RETAINING716-011570-001ORIFICE(PUMP)716-011638-006FOCUS RING716-011651-006WAFER CLAMP EDGE RING

Confirm specifications against the OEM datasheet, physical sample or approved drawing. Contact Lubanix with the tool platform, quantity and requested delivery date.