Electrostatic chucks (ESC) and related heater assemblies
ESC and heater-related spare parts for semiconductor tools. Search by OEM part number for AMAT, TEL and other platforms, or send interface details for a fit review.
Related search terms
electrostatic chuck · semiconductor ESC · wafer chuck · ESC replacement
Part numbers
0010-24057Degas Heater · AMAT0010-24456MCA ESC · AMAT0010-2743212" A101 Heater · AMAT0010-27983MCA ESC · AMAT0010-28715TxZ MCA SST Heater, 300mm · AMAT0010-30851ASSY , 300mm TAN AL · AMAT0010-4112112" Ceramic ESC · AMAT0010-53618300mm heater · AMAT0010-53901300mm heater · AMAT0010-59787300mm heater · AMAT0010-59788300mm heater · AMAT0010-59798300mm heater · AMAT0010-64702MCA ESC · AMAT0010-65541300mm heater · AMAT0010-81422300mm heater · AMAT0041-75950ESC 300MM · AMAT2L10-150079-13TEL RK2 ESC · TEL2L10-151982-11TEL RK4 ESC · TEL2L10-152588-11TEL NV3 ESC · TEL2L10-152773-11TEL MK3 ESC · TEL2L10-160988-11TEL RK5 ESC · TEL839-019090-620ESC, TUNABLE HB-DFB KIYO FXE-BAND TYPE · LAM839-019090-632ESC · LAM839-102001-136Flex HX ESC · LAM839-800327-304ESC · LAM839-800327-315ESC · LAM839-800327-432LAM 432 ESC, FLEX45, DX · LAM839-800327-438LAM 438 ESC, FLEX 45 · LAM
28 parts currently match this page.
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Brand and model names are used only to describe compatibility and search context. Confirm final specifications against OEM documentation, a physical sample or an approved drawing.