Semiconductor Heater & 300mm Heater
We supply 200 mm and 300 mm semiconductor heater assemblies and related replacement parts. Search by part number, equipment platform or process requirement.
Products and supply scope
The catalog covers silicon electrodes, Focus / Edge / Shield Rings, ceramic and alumina parts, quartz, metal chamber hardware, ESCs, heaters and imported OEM parts. Search 20,171 part numbers by number, description, OEM or equipment.
Typical applications
Heaters are used for stable wafer-temperature control in CVD, PVD, etch and other vacuum processes.
Request a quote or confirm a replacement
Send the OEM part number, equipment brand and model, a part photo or drawing, quantity and requested delivery date. We will review fit, material, interface and availability; any domestic alternative or refurbished condition will be identified before quotation.
Related search terms
semiconductor heater · 300 mm heater · wafer heater · CVD heater replacement
Featured part numbers
28 parts currently match this page.
Search the full catalogSubmit an inquiry
Brand and model names are used only to describe compatibility and search context. Confirm final specifications against OEM documentation, a physical sample or an approved drawing.