RIM Spare Parts

AMAT 0200-00317

LINER BOTTOM

Part details

Part number	0200-00317
Description	LINER BOTTOM
OEM / brand	AMAT
Category	RIM Spare Parts

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Nearby part numbers

0200-00255COVER 0200-00261CHAMBER INSERT 0200-00264RING FOCUS 145MM JMF 0200-00276PIN WAFER GUIDE 0200-00277PLATE GUIDE 0200-00296SLEEVE JUNCTION 0200-00321DPS FOCUS RING 0200-00353PIN SPACER 0200-00354RING PURGE 0200-00402ISOLATOR TOP 0200-00403ISOLATOR MIDDLE 0200-00404ISOLATOR BOTTOM

Confirm specifications against the OEM datasheet, physical sample or approved drawing. Contact Lubanix with the tool platform, quantity and requested delivery date.