AMAT 0200-00321
DPS FOCUS RING
Part details
| Part number | 0200-00321 |
|---|---|
| Description | DPS FOCUS RING |
| OEM / brand | AMAT |
| Category | RIM Spare Parts |
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Nearby part numbers
0200-00261CHAMBER INSERT0200-00264RING FOCUS 145MM JMF0200-00276PIN WAFER GUIDE0200-00277PLATE GUIDE0200-00296SLEEVE JUNCTION0200-00307RING CAPTURE C-ESC0200-00353PIN SPACER0200-00354RING PURGE0200-00402ISOLATOR TOP0200-00403ISOLATOR MIDDLE0200-00404ISOLATOR BOTTOM0200-00410Uni-Insert Gas Distribution 88 holes QuartzConfirm specifications against the OEM datasheet, physical sample or approved drawing. Contact Lubanix with the tool platform, quantity and requested delivery date.