RIM Spare Parts

AMAT 0200-00410

Uni-Insert Gas Distribution 88 holes Quartz

Part details

Part number	0200-00410
Description	Uni-Insert Gas Distribution 88 holes Quartz
OEM / brand	AMAT
Category	RIM Spare Parts

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Nearby part numbers

0200-00316LINER MIDDLE 0200-00317LINER BOTTOM 0200-00321DPS FOCUS RING 0200-00353PIN SPACER 0200-00354RING PURGE 0200-00402ISOLATOR TOP 0200-00417RING INSERT SILICON FLAT 150MM 0200-00454BUSING LIFT PIN 0200-00481BOTTOM LID 0200-00576PIN WEIGHT 0200-00621SHADOW RING CERAMIC 0200-00622OUTER RING

Same brand

0200-00435RING

Confirm specifications against the OEM datasheet, physical sample or approved drawing. Contact Lubanix with the tool platform, quantity and requested delivery date.