AMAT 0200-00481
BOTTOM LID
Part details
| Part number | 0200-00481 |
|---|---|
| Description | BOTTOM LID |
| OEM / brand | AMAT |
| Category | RIM Spare Parts |
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Nearby part numbers
0200-00353PIN SPACER0200-00354RING PURGE0200-00402ISOLATOR TOP0200-00403ISOLATOR MIDDLE0200-00404ISOLATOR BOTTOM0200-00410Uni-Insert Gas Distribution 88 holes Quartz0200-00576PIN WEIGHT0200-00621SHADOW RING CERAMIC0200-00622OUTER RING0200-00624PURGE RING0200-00639SI INSERT RING 200MM NOTCH0200-00639 REV002INSERT RING SILICON 200MM NOTCHConfirm specifications against the OEM datasheet, physical sample or approved drawing. Contact Lubanix with the tool platform, quantity and requested delivery date.