RIM Spare Parts

AMAT 0200-10144

ISOLATOR

Part details

Part number	0200-10144
Description	ISOLATOR
OEM / brand	AMAT
Category	RIM Spare Parts

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Nearby part numbers

0200-09997OUTER SHADOW RING 0200-10027SSGD INNER 0200-10036RING MIDDLE 0200-10040RING OUTER 0200-10074LIFT FINGER 0200-10087SSGD OUTER 0200-10157JUNCTION LINER 0200-10158SLEEVE JUNCTION 0200-10160CERAMIC LINER 0200-10163PUMPING LID ISOLATOR 0200-10164PUMPING INSERT 0200-10169EDGE RING

Confirm specifications against the OEM datasheet, physical sample or approved drawing. Contact Lubanix with the tool platform, quantity and requested delivery date.