RIM Spare Parts

AMAT 0200-10163

PUMPING LID ISOLATOR

Part details

Part number	0200-10163
Description	PUMPING LID ISOLATOR
OEM / brand	AMAT
Category	RIM Spare Parts

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Nearby part numbers

0200-10074LIFT FINGER 0200-10087SSGD OUTER 0200-10111LIFT PIN 0200-10143CHAMBER INSERT 0200-10144ISOLATOR 0200-10157JUNCTION LINER 0200-10164PUMPING INSERT 0200-10169EDGE RING 0200-10191SHIELD 0200-10194SHIELD TAPERED 0200-10208INNER RING 0200-10209OUTER RING

Confirm specifications against the OEM datasheet, physical sample or approved drawing. Contact Lubanix with the tool platform, quantity and requested delivery date.