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RIM Spare Parts

AMAT 0200-10208

INNER RING

Part details

Part number0200-10208
DescriptionINNER RING
OEM / brandAMAT
CategoryRIM Spare Parts
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Nearby part numbers

0200-10157JUNCTION LINER0200-10158SLEEVE JUNCTION0200-10160CERAMIC LINER0200-10163PUMPING LID ISOLATOR0200-10164PUMPING INSERT0200-10169EDGE RING0200-10209OUTER RING0200-10246Uni-Insert Gas Distribution 88 holes Quartz0200-10263WASHER INSULATING0200-10284LIFT PIN0200-10377RING SINGLE0200-10446Si INSERT RING 200MM NOTCH

Confirm specifications against the OEM datasheet, physical sample or approved drawing. Contact Lubanix with the tool platform, quantity and requested delivery date.