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RIM Spare Parts

AMAT 0200-10246

Uni-Insert Gas Distribution 88 holes Quartz

Part details

Part number0200-10246
DescriptionUni-Insert Gas Distribution 88 holes Quartz
OEM / brandAMAT
CategoryRIM Spare Parts
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Nearby part numbers

0200-10160CERAMIC LINER0200-10163PUMPING LID ISOLATOR0200-10164PUMPING INSERT0200-10169EDGE RING0200-10191SHIELD0200-10194SHIELD TAPERED0200-10263WASHER INSULATING0200-10284LIFT PIN0200-10377RING SINGLE0200-10446Si INSERT RING 200MM NOTCH0200-10526PUMPING RING0200-10650CERAMIC PUMPING CHANNEL

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