RIM Spare Parts

AMAT 0200-10191

SHIELD

Part details

Part number	0200-10191
Description	SHIELD
OEM / brand	AMAT
Category	RIM Spare Parts

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Nearby part numbers

0200-10143CHAMBER INSERT 0200-10144ISOLATOR 0200-10157JUNCTION LINER 0200-10158SLEEVE JUNCTION 0200-10160CERAMIC LINER 0200-10163PUMPING LID ISOLATOR 0200-10194SHIELD TAPERED 0200-10208INNER RING 0200-10209OUTER RING 0200-10246Uni-Insert Gas Distribution 88 holes Quartz 0200-10263WASHER INSULATING 0200-10284LIFT PIN

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