AMAT 0200-10194
SHIELD TAPERED
Part details
| Part number | 0200-10194 |
|---|---|
| Description | SHIELD TAPERED |
| OEM / brand | AMAT |
| Category | RIM Spare Parts |
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Nearby part numbers
0200-10144ISOLATOR0200-10157JUNCTION LINER0200-10158SLEEVE JUNCTION0200-10160CERAMIC LINER0200-10163PUMPING LID ISOLATOR0200-10164PUMPING INSERT0200-10208INNER RING0200-10209OUTER RING0200-10246Uni-Insert Gas Distribution 88 holes Quartz0200-10263WASHER INSULATING0200-10284LIFT PIN0200-10377RING SINGLEConfirm specifications against the OEM datasheet, physical sample or approved drawing. Contact Lubanix with the tool platform, quantity and requested delivery date.