AMAT 0200-10526
PUMPING RING
Part details
| Part number | 0200-10526 |
|---|---|
| Description | PUMPING RING |
| OEM / brand | AMAT |
| Category | RIM Spare Parts |
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Nearby part numbers
0200-10194SHIELD TAPERED0200-10208INNER RING0200-10209OUTER RING0200-10246Uni-Insert Gas Distribution 88 holes Quartz0200-10263WASHER INSULATING0200-10284LIFT PIN0200-10650CERAMIC PUMPING CHANNEL0200-12817 REV004INSERT RING, EMAX 3.4T0200-14210INSERT RING_SINGLE CRYSTAL SI 1.5MM0200-17989LID WIDE,23.5DIA,C30200-18053LIFT GUIDE PIN LIFT0200-18077COVERConfirm specifications against the OEM datasheet, physical sample or approved drawing. Contact Lubanix with the tool platform, quantity and requested delivery date.