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Si Electrodes & Rings

AMAT 0200-21111-004

SIC INSERT RING,GAP 30MIL,90MIL THK,VAR GEOM

Part details

Part number0200-21111-004
DescriptionSIC INSERT RING,GAP 30MIL,90MIL THK,VAR GEOM
OEM / brandAMAT
Equipment / toolSYM3X
MaterialCVD SIC
CategorySi Electrodes & Rings

Equipment / tool: SYM3X. Material: CVD SIC.

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Confirm specifications against the OEM datasheet, physical sample or approved drawing. Contact Lubanix with the tool platform, quantity and requested delivery date.