Silicon electrodes for semiconductor etch chambers

Silicon upper electrodes and related monocrystalline silicon parts wear on the chamber's schedule, not the production plan. When RF hours climb, particle counts drift, or a planned PM needs a matched electrode, the usual scramble is the same: confirm the OEM part number, protect process windows, and avoid long single-source waits.

Lubanix lists silicon electrodes and related silicon chamber parts in a searchable catalog covering LAM Research, Applied Materials (AMAT) and Tokyo Electron (TEL) etch tools on common 8-inch and 12-inch platforms. We support OEM-listed parts and domestic OEM-alternative options for qualification — fit, material and interface are reviewed against your P/N or drawing before any quotation.

Why fabs and equipment teams look here

• Planned electrode swaps driven by RF hours, arcing marks or particle events
• Second-source evaluation when OEM lead time or cost becomes the bottleneck
• Drawing-based silicon parts for chamber upgrades or legacy tools

We do not publish live stock counts or guaranteed lead times on this page. Availability and condition (new OEM, refurbished, or domestic alternative) are confirmed case by case after you send the part number.

What to send for a quote

1. OEM part number (and revision if known)
2. Equipment brand / model / chamber family
3. Wafer size and process notes that matter to fit
4. Photo, drawing or approved datasheet if the marking is unclear
5. Quantity and target need-by date (for planning only — not a promise on this page)

If a domestic alternative or refurbished route is appropriate, we will say so explicitly before quoting. Test pieces for equipment-maker qualification can be discussed when you need a controlled sample path.

Related parts on Lubanix

• Focus / Edge / Shield Rings
• Ceramic & alumina parts
• Quartz chamber parts
• ESC & heaters

Contact

Send a P/N to sales@lubanix.com or see the contact section on the homepage.