Silicon electrodes for semiconductor etch chambers — page 2
Page 2 of 3 in the Lubanix Silicon Electrode & Monocrystalline Silicon Parts catalog, part numbers 2L10-255881-21 to 716-069688-169. Request a quote from
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silicon electrode · monocrystalline silicon parts · silicon ring · etch chamber components
Part numbers
2L10-255881-21RING, SI DC2 · TEL2L10-255931-11ELECTRODE, OUTER ST11.7 DC2 · TEL2L10-256569-11RING,FOCUS T3.1 NOMF FRTC · TEL2L10-256905-11RING, FOCUS T3.2 TOO · TEL2L10-257258-22RING, FOCUS T2.25 NOMF FR28 · TEL2L10-258483-21RING, MONO-SI FLAT TOP-GND 450.5 · TEL2L10-258516-21RING, FOCUS T.24 NS FR28 SM · TEL2L10-258735-21RING · TEL2L10-258746-21RING, FOCUS T2.45 SMF FR28 · TEL2L10-258753-21RING, FOCUS T2.3 SMF FR28 · TEL2L10-258753-21RING, FOCUS T2.2 SMF FR28 · TEL2L10-502879-21RING, FOCUS T2.45 SMF FR28 S · TEL3D05-250025-11RING,SHIELD UPPER,STRAIGHT · TEL3D05-300142-13INSULATOR,ESC ENCLOSURE(COC).. · TEL3D10-200330-12FOCUS RING 300MM(301TYPE) · TEL3D10-200997-11FOCUS RING PM · TEL3D10-201448-11SCCM FOCUS RING · TEL3D10-201448-13FOCUS RING,360-302-C · TEL3D10-201448-21RING · TEL3D10-201448-21OCUS RING 360-302-C · TEL3D10-202372-11TE 용 PROTECTION RING · TEL3D10-202375-22TE 용 OUTER CELL · TEL3D10-250012-11TE 용 INNER CEL · TEL3D10-250158-11FOCUS RING(303TYPE) · TEL3D10-250182-11SI GROUND RING · TEL3D10-250195-11TE 용 FOCUS RING · TEL3D10-250197-11FOCUS RING_TAPER L TYPE · TEL3D10-250281-11JIB 용 FOCUS RING · TEL3D10-250316-11(SI-SHIN)CEL INNER(SH-OX1.75) · TEL3D10-250317-11(SI SHIN)CEL OUTER SH-OX RP470-0.2 · TEL3D10-25037-11(SI SHIN)CEL OUTER SH-OX RP470-0.2 · TEL3D10-250576-21RING FOCUS 8/MIN/CL · TEL3D10-250639-21SUPER DRM FOUS RING SINGLE · TEL3D10-302020-11SHOWERHEAD SIL SCCM 300MM · TEL3D10-302020-11CEL BODY ASSY, SCCM-OX · TEL3D10-350067-11RING, PROTECTION (TE-RP470) · TEL3D10-350401-11FOCUS RING 302-303TP T8.6 LV · TEL460手绘R&DAMEC615-00427-006.PA1AMEC615-00675-000RING, ION SHIELD, FLOW EQUALIZING,AL 606 · AMEC620-0007-000AMEC625-00010-007SHOWER HEAD, SI · AMEC625-00010-007电极 · AMEC625-00010-008电极 · AMEC625-00010-010shower head · AMEC625-00010-011电极 · AMEC625-00010-024SHOWER HEAD, 407 HOLES; HD-RIE · AMEC625-00010-026SHOWER HEAD, 407 HOLES · AMEC625-00010-026AMEC625-00010-047SHOWER HEAD, D330.3, SI · AMEC625-00010-091SHOWER HEAD SLOT COUNTERBORE · AMEC625-00010-094SHOWER HEAD, STEP, 9.2MM THK · AMEC625-00010-097SHOWER HEAD SLOT COUNTERBORE； D330.3 · AMEC625-00010-104SHOWER HEAD, STEP, THK 11.2MM · AMEC625-00010-111电极 · AMEC625-00010-458电极 · AMEC625-00010-550电极 · AMEC625-00010-551电极 · AMEC625-00010-900AMEC625-00010-901AMEC625-00010-903AMEC625-00010-906-P02SH,WAVY,407X0.6 HOLES,CON,HP,Si,A12 · AMEC625-00024-002FOCUS RING SILICON, LOW R ETCH · AMEC625-00024-002RING, HOT EDGE SILICON, LOW R ETCH · AMEC625-00024-009RING, FOCUS, TALL, SI · AMEC625-00024-009FOCUS RING · AMEC625-00024-0867.5T CFR, no GRV SILICON, 1.8MM REF, DZHP · AMEC625-00024-089FOCUS RING · AMEC625-00024-098FOCUS RING · AMEC625-00024-0998.4T CFR, GRV, RBP, F60, 2.7mm REF, DZHP, SILICON · AMEC625-00024-111WIDE GAP FOCUS RING, F60 · AMEC625-00024-136FOCUS RING, F60, D1, GAP 0.45, THK 5.7 · AMEC625-00024-136FOCUS RING, F90, GAP1.08, THK5.4, ID CUT · AMEC625-00024-138FOCUS RING, F60, GAP 0.18, THK 5.7 · AMEC625-00024-138FOCUS RING F60, GAP0.18, THK 5.7 · AMEC625-00024-138FOCUS RING · AMEC625-00024-186FOCUS RING, F60, D1, GAP0.45, THK5.7 · AMEC625-00024-186AMEC625-00024-210FOCUS RING · AMEC625-00024-3098.4T CFR, GRV, RBP, F60, 2.7mm REF, EDGE TUNING · AMEC625-00024-312-DRAFT02FOCUS RING,14 · AMEC625-00024-312-DRAFT02FOCUS RING · AMEC625-00024-312-DRAFT03FOCUS RING,14 · AMEC625-00024-312-DRAFT03FOCUS RING · AMEC625-00024-312-DRAFT04FOCUS RING · AMEC625-00024-317-DRAFT01FOCUS RING,15 · AMEC625-00024-317-DRAFT02FOCUS RING,14 · AMEC625-00024-333下电极 · AMEC625-00024-373AMEC625-00024-3997.3T CFR, GRV, RBP, F60, 1.6mm REF, DZHP,SILICON · AMEC625-00024-438AMEC625-00024-571FOCUS RING · AMEC625-00117-001AMEC625-00117-110COVER RING ,THICKER; FUSED QUARTZ,GE124 · AMEC625-00147-000RING, ISOLATION, QTZ · AMEC625-00147-074RING · AMEC625-00148-000SLEEVE,BELLOWS FLANGE;VESPEL · AMEC625-00184-015RING · AMEC625-00184-023RING, UPPER GROUND, SIC 1.8MM · AMEC625-00184-026UPPER GROUND RING, SIDE FIX · AMEC625-00184-027UPPER GROUND RING, HD-RIE · AMEC625-00184-089AMEC625-00184-258AMEC625-00184-258RING · AMEC625-00184-260RING · AMEC625-00184-261AMEC625-00184-261RING · AMEC625-00184-262RING · AMEC625-00184-327UPPER GROUND RING, HD-RIE · AMEC625-00184-458UPPER GROUND RING,OD430*T19.3MM,SI,A15 · AMEC625-00184-458-EUPPER GROUND RING,OD430*T19.3MM,POLY-SI,A15 · AMEC625-00184-459-BUGR,CIP,OD430,T21.3MM,SI,A15 · AMEC625-00184-459-CUGR,CIP,OD430,T21.3MM,POLY-SI,A15 · AMEC625-00242-001SHOWER HEAD, SILICON · AMEC625-00242-001AMEC625-00242-002SHOWER HEAD, 11.2MM, AD-RIE · AMEC625-00267-010BUCKLER,SHINSERT · AMEC625-0092-000AMEC625-00927-031RING · AMEC625-00927-032RING · AMEC625-00927-033RING · AMEC625-02309-000SILICON SAMPLE,COUNTERBORE · AMEC625-02309-001SILICON SAMPLE, THREAD_ASSY
SILICON SAMPLE, THREAD
ASSEMBLY PART · AMEC625-02309-002SILICON SAMPLE, COUNTERBORE2 · AMEC625-03415-000托盘 · AMEC625-03415-010托盘 · AMEC625-61483-000喷嘴 · AMEC625-61483-093喷嘴 · AMEC625-61483-095喷嘴 · AMEC625-61483-097喷嘴 · AMEC625-61483-101喷嘴 · AMEC625-61483-103喷嘴 · AMEC625-61483-105喷嘴 · AMEC625-61483-107喷嘴 · AMEC713-027299-002SLV,ADPTR,SLIP-ON,SELFCNTR,V PEEK · LAM713-034964-001WSHR,.417IDX1.00ODX.025THK,300MM · LAM713-034964-002WSHR,.417IDX1.00ODX.025THK,301MM · LAM713-034965-001PAD,R,CONF,.010THK.300MM · LAM713-040539-001PED,LNDNG.CONF R,PEEK,F60FLEX,200MM · LAM713-069935-003GSKT,GUARD,OUTER ELCTD · LAM713-072792-003GSKT,GUARD,OUTER ELCTD · LAM713-080721-001GSKT,GAS FEED,DUAL ZONE · LAM713-088966-001GSKT,OUTER,GAS FEED,DUAL ZONE · LAM715-011531-0116" ELECTRODE · LAM715-038611-002SKT,PLASMA SNSR · LAM715-075954-003WSHR,HEX,RING,CLAMP,300MM · LAM715-801916-008Middle chamber · LAM715-801916-808PLT,GAS DIST,300MM,W/GRV HTR · LAM716-003543-13512" HOT EDGE RING · LAM716-008608-001LSR window(WDO,SAPPHIRE,25MM X.087) · LAM716-008718-001NOZ,GAS INJ,8-HOLE QTZ,2300 METAL · LAM716-012639-024NOZ,INJ,8X .055-45DEG RDL-1CTR · LAM716-013344-006RING,COVER,OUTER,GND · LAM716-013402-003COV,H/E RING,QTZ · LAM716-013402-053Quartz hot edge ring cover · LAM716-013402-213COV,H/E RING ,QTZ · LAM716-014843-300RING,WAP,QTZ,GENERIC,17.07 ID, 300MM · LAM716-014843-350RING,WAP,QTZGENERIC 171N,OFC · LAM716-014843-353RING,WAP,QTZGENERIC 171N,OFC · LAM716-017112-330RING,WAP,17.07X10THK,300MM · LAM716-017112-522RING,WAP,17.07X,1.4THK,30 · LAM716-017112-526RING,WAP,1 7.07X1 4THK ,300MM · LAM716-018468-196RING,COVER,OUTER,GND,ADJ · LAM716-023013-004SI HOT EDGE RING · LAM716-026652-902RING,EDGE,BOT,QTZ,200-300MM · LAM716-028454-012盖板 · LAM716-030135-001LAM716-031257-521RING,EDGE,TOP,QTZ,EBP,200MM · LAM716-031257-531RING,EDGE,TOP,QTZ,EBP,300MM · LAM716-037793-213RING,BASE,ESCW/INIG TER · LAM716-037793-304Quartz base ring · LAM716-038612-003PIN,PICK UP,DC BIAS,SI CARB · LAM716-038887-001HOT EDGE RING · LAM716-040737-407Quartz coupling O-ring · LAM716-040737-407RING,CPLG,QTZ,W/BIAS PU,W/FLAT,300M · LAM716-040738-127RING，HE,W/FL,SI,SGL XTAL,17.5,ID,300MM · LAM716-040738-42RING，HE,WFL,SI,SGL XTAL · LAM716-040738-427RING，HE,W/FL,SI,SGL XTAL,17.5,ID,300MM · LAM716-040738-42712' LAM HOT EDGE RING · LAM716-040738-913HOT EDGE RING · LAM716-044668-001RING · LAM716-044668-435R,HE,4XX ESC,W O FLAT,300MM,SS · LAM716-044668-435FLEX DL HOT EDGE RING · LAM716-064782-103ASSY,ELCTD,INR,SI,NBSIE · LAM716-064782-602ASSY,ELCTD,INR,SI,NBSIE A-2 · LAM716-067739-105RING,QTZ,COVER BKG PL,UPR ELCTD · LAM716-068688-156FLEX GX - ONE PIECE ELECTRODE · LAM716-069668-076ELCTD,INR,SI,POLISHED,300MM · LAM716-069688-005ELCTD, INR, SI, 300MM · LAM716-069688-005电极 · LAM716-069688-005ELCTD,INR,SI,300MM · LAM716-069688-022ELCTD,INR,SI,300MM · LAM716-069688-024FLEX HX INNER ELECTRODE · LAM716-069688-062ELCTD,INR,SI,POLISHED,300MM · LAM716-069688-076ELCTD,INR,SI,POLISHED,300MM · LAM716-069688-082ELCTD,INR,SI,POLISHED,300MM · LAM716-069688-156ELCTD,INR,SI,POLISHED,300MM · LAM716-069688-156ELCTD,HP,SILICON,12IN · LAM716-069688-156电极 · LAM716-069688-169ELCTD,INR,SI,POLISHED,300MM （1/2) · LAM
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