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Si Electrodes & Rings

LAM 716-013402-003

COV,H/E RING,QTZ

Part details

Part number716-013402-003
DescriptionCOV,H/E RING,QTZ
OEM / brandLAM
CategorySi Electrodes & Rings
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Nearby part numbers

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Same brand

716-011570-001ORIFICE(PUMP)716-011638-006FOCUS RING716-011651-006WAFER CLAMP EDGE RING

Confirm specifications against the OEM datasheet, physical sample or approved drawing. Contact Lubanix with the tool platform, quantity and requested delivery date.