Silicon electrodes for semiconductor etch chambers — page 3
Page 3 of 3 in the Lubanix Silicon Electrode & Monocrystalline Silicon Parts catalog, part numbers 716-069688-178 to 硅喷气嘴草图. Request a quote from Lubanix.
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silicon electrode · monocrystalline silicon parts · silicon ring · etch chamber components
Part numbers
716-069688-178ELCTD,INR,SI,301MM · LAM716-069688-22电极 · LAM716-069688-378ELCTD, INR, SI, POLISHED, 300MM · LAM716-069688-660ELCTD,INR,SI,300MM · LAM716-069688-789ELCTD, INR, SI, 300MM · LAM716-069688-822电极 · LAM716-069688-822ELCTD,INR,SI,300MM · LAM716-072576-418Ring He,4XX,ESC,W/FLAT · LAM716-073392-002PLUG,UPPR ELCTD,CER · LAM716-073979-004ELCTD,SI,300MM,INN/OUT · LAM716-073979-032SI ELECTRODE · LAM716-073979-035ELCTD,MONO TALON PLUS,CZ,FLAT · LAM716-073979-036ELCTD,MONO TALON PLUS,CZ,10 STEP · LAM716-073979-136ELCTD,CZ,300MM,INN/OUT ,10 STEP · LAM716-077916-001ELCTD,OUTER,18 STEP,300MM · LAM716-08166-885RING,HOT EDGEITER,STRT, 120THK,300MM · LAM716-081661-803FLEX Fs HER_5.43 · LAM716-081661-803VRing，Hot Edge，TER,557 ESC · LAM716-081661-867FLEX FSE SI HOT EDGE RING · LAM716-081661-885RING,HOT EDGEITER,STRT, 120THK,300MM · LAM716-081665-252B_RING,C-SECTION,TAPER,POLY SI · LAM716-081665-811C-SHROUD RING · LAM716-081665-842RING,C-SECTION,.08 SLOT.POLY SI · LAM716-081665-842RING,C-SECTION,.10 SLOT,POLY SI · LAM716-081665-842C SHROULD · LAM716-081665-846RING,C-SECTION,10SLOT,MAX OPEN · LAM716-081665-861C-SHROUD/ACC · LAM716-081665-861M_C-SECTION,.08 SLOT,POLY SI · LAM716-081665-921RING,C-SECTION,.08 SLOT.POLY SI · LAM716-081665-921C-RING · LAM716-082039-001ELCTD.OUTER.18 STEP.300MM · LAM716-082039-001ELCTD,OUTER,.18 STEP,300MM · LAM716-082039-003ELCTD, OUTER,. 10 STEP, 300MM · LAM716-082039-210ELCTD,OUTER,.13 STER,POLISHED,300MM · LAM716-082039-211ELCT,OUTER,.16 STEP,300MM · LAM716-082039-215FLEX_GX-E OUTER ELECTRODE · LAM716-082039-215ELCTD,OUTER,FLAT,POLISHE · LAM716-082039-215OUTER EDGE Si RING · LAM716-082039-233ELECTD,OUTER,.25 STEP,REC,POL,300MM · LAM716-082039-237ELCTD, OUTER, FLAT, POLISHED, 300MM · LAM716-082039-245FLEX HX OUTER ELECTRODE · LAM716-082039-257外卡环 · LAM716-082039-891ELCTD,OUTER,300MM · LAM716-082039-891ELECTD,OUTER,300MM · LAM716-082039-891OUTER RING · LAM716-082039-892ELECTD,OUTER,300MM · LAM716-082039-892ELCTD,OUTER,300MM. · LAM716-087943-801COV,QTZ,INR,5XX,CER,HCK,AG,12.95D · LAM716-087943-8462-PIECE RING_R2_SI · LAM716-087943-8462-PIECE COVER RING_R4 · LAM716-087943-865COV,QTZ,O5X,TES,TALL 14.5D · LAM716-087943-913COVER RING-SI · LAM716-087943-913Cover Ring -Poly · LAM716-087945-071RING,EDGE,5XX,CER,296MM,NP 45D · LAM716-087945-475RING,EDGE,SI,CER,2PC · LAM716-087945-849GXE SI COOL EDGE RING 6.86T · LAM716-087945-853RING,EDGE,5XX,CER,296MM,13.6D · LAM716-087945-863RING,EDGE,5XX,CER,296MM,13.6D · LAM716-087945-964RING,EDGE,5XX,CER,296MM,13.6D · LAM716-088516-001RING,CONTROL ,COND,QTZ,NO SLOT ,THIN · LAM716-088516-807Pressure Control Ring for Flex EX+&FX · LAM716-088536-902Outer quartz edge ring · LAM716-089595-020电极 · LAM716-089595-027电极 · LAM716-089595-029CATHODE · LAM716-089596-020CATHODE · LAM716-089596-027ELCTD,MONO,HP,16 STEP,300MM · LAM716-140139-0018" RING · LAM716-140139-2118"HOT EDGE RING · LAM716-149488-177RING,EDGE,5XX,CER,296MM,NP 45D,13.6D · LAM716-230571-268RING, EDGE, 4-40, 297MM, 15D, 13.76D · LAM716-230577-361RING, EDGE, 4-40, 297MM, 14.5D, · LAM716-230577-364H EDGE,Si,RING · LAM716-236357-529MIDDLE EDGE RING · LAM716-276851-205RING,EDGE · LAM716-443086-001RING · LAM716-443086-3018" RING · LAM716-443086-301RING · LAM716-443086-301R,H EDGE,Si,SGL XTAL,H WALL,8" · LAM716-443086-401R,H EDGE,Si,SGL XTAL,H WALL,8" · LAM716-443086-4018" RING · LAM716-443086-401R,H EDGE,Si,SGL XTAL,H WALL,8 · LAM716-460785-015电极 · LAM716-460916-001FOCUS RING · LAM716-460916-002FOCUS RING · LAM716-7943-8462-PIECE COVER RING_R4 · LAM716-801306-004WDO,QRTZ,GAS INJ,FIRE POL · LAM716-801568-002WIN, QTZ · LAM770-00011-000Diffuser NW25 FV-25LT · AMEC8/6-carrierLAM839-011906-0018" ELECTRODE · LAM839-011906-002电极 · LAM839-011907-0018" ELECTRODE · LAM839-011907-1008" ELECTRODE · LAM839-011907-1118" LAM EXELAN ELECTRODE · LAM839-015480-003SI CATHODE 일체형 · LAM839-020965-006FLEX45 LOW GAP
SiC 일체형 OUTER RING（결합도） · LAM839-021113-002SI INNER ELECTRODE · LAM839-064782-602ASSY, ELCTD INR SI NBSIE A-2 · LAM839-064782-602电极 · LAM839-070842-004ASSY,STUD,SOCKET · LAM839-443215-1018" ELECTRODE · LAM839-443215-504ELECTRODE-HTP ELECTRODE · LAM857-027108-001KIT,CHOKE RING · LAM857-073710-002KIT,SHIM,CLAMP · LAM893-011906-001电极 · LAMT-095510-001 -18" RING · LAM保温桶石英盖板-HO-001盖板 · NAURA盖板-001NAURA硅喷气嘴草图injector U · NAURA
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