Focus Rings, Edge Rings and Shield Rings for etch chambers
Edge rings take continuous plasma exposure. When edge uniformity drifts, polymer builds up, or a ring approaches end of life, fabs need a dimensionally matched replacement — not a generic "similar" part.
Lubanix supplies Focus Rings, Edge Rings and Shield Rings in silicon, silicon carbide, quartz and ceramic for mainstream etch platforms, including parts used on LAM Research, Applied Materials and Tokyo Electron tools. Search by OEM part number, or send a drawing for a replacement review.
Where these parts show up
- Wafer-edge field control and bevel protection during etch
- Shield / insert rings that protect chamber hardware around the wafer
- PM kits where electrode and ring life are planned together
Material choice (Si / SiC / quartz / ceramic) depends on the OEM design and process chemistry. We match to the part number and drawing rather than guessing a material swap on the webpage.
Quote checklist
OEM P/N + revision · tool / chamber · wafer size · photo or drawing · quantity · need-by date for planning.
Condition and supply route (OEM new, refurbished, or domestic alternative) are confirmed only after review — this page does not list stock or lead time.
Related
Contact
Email sales@lubanix.com with the ring P/N, or search the Focus / Edge Ring listings on this page.
Related search terms
Focus Ring · Edge Ring · Shield Ring · etch ring · semiconductor chamber parts
Featured part numbers
510 parts currently match this page.
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Brand and model names are used only to describe compatibility and search context. Confirm final specifications against OEM documentation, a physical sample or an approved drawing.