Focus Rings, Edge Rings and Shield Rings for etch chambers
Focus Rings, Edge Rings and Shield Rings in silicon, SiC, quartz and ceramic. Look up OEM part numbers for LAM, AMAT and TEL etch chambers, or request a replacement review.
Related search terms
Focus Ring · Edge Ring · Shield Ring · etch ring · semiconductor chamber parts
Part numbers
0022-27725SLIDING RING, VARIABLE GEOMETRY, SYM3 · AMAT0200-00417INSERT RING SILICON,150MM FLAT · AMAT0200-00435RING · AMAT0200-01239RING · AMAT0200-01509RING · AMAT0200-01511RING · AMAT0200-02385RING · AMAT0200-03576(S)TOP RING · AMAT0200-03576TOP COLLAR 300MM 5.4MM PRODUCER ETCH · AMAT0200-03736SIC COLLAR RING · AMAT0200-03736COLLAR 300MM PRODUCER ETCH · AMAT0200-07526RING INSULATOR STEPPED PRODUCER ETCH · AMAT0200-07526(quartz)AMAT0200-07761PIN ANTENNA POLI SI 300MM PCII · AMAT0200-17137-003SiC INSERT,SMOD,2.8 STEP · AMAT0200-19893COLLAR 300MM 5.4MM PRODUCER ETCH · AMAT0200-21110 Rev.005SIC SUPPORT RING,GAP 30MIL,VAR GEOM · AMAT0200-21111-004SIC INSERT RING,GAP 30MIL,90MIL THK,VAR GEOM · AMAT10135-002253托盘 · NAURA10135-003297硅电极_IDE · NAURA10135-003920四柱硅舟-HO · NAURA10135-004590HOT EDGE RING 1.5-45°_IDE · NAURA10135-0045918" Ring · NAURA10135-004729FOCUS RING_P · NAURA10135-004918FOCUS RING_2_P · NAURA10135-004936硅电极210_IDE · NAURA10135-005270HOT EDGE RING减薄_IDE · NAURA10135-005381上电极等离子体聚焦环(优化2)_IDE · NAURA10140-000960上石英盖板 · NAURA10140-001007盖板 · NAURA10140-001931托盘 · NAURA10145-200008-001上电极聚焦环A_IDE · NAURA10145-200008-002上电极聚焦环A_IDE · NAURA10145-200010-00122-上加热probe8硅环-fa · NAURA10145-200011-001HOT EDGE RING减薄（6寸）_IDE · NAURA10145-200012-001HOT EDGE RING（6寸）_IDE · NAURA10145-200018-00112in WAFER托盘_4INCH_1.53MM_WH · NAURA10145-200021-001SI垫块（多晶硅舟垫块）
小保温片底部高度垫块 · NAURA10145-200022-001HOT EDGE RING减薄（6寸）1_IDE · NAURA10145-200023-001硅电极380（低导）T_L · NAURA10145-200024-001硅电极380（中导）T_L · NAURA10145-200025-001聚焦环（低导）T_L · NAURA10145-200026-001聚焦环（中导）T_L · NAURA10145-200028-001上电极聚焦环10A_IDE · NAURA10145-200029-001上电极聚焦环A2_IDE · NAURA10145-200030-001硅电极210A2_IDE · NAURA10145-200031-001Hot edge ringA+ _IDE · NAURA10145-200031-002Hot edge ringA1+_IDE · NAURA10145-200032-001Hot edge ringB+ _IDE · NAURA10145-200033-00112in WAFER托盘_6INCH_1.5MM_WLPR · NAURA10145-200036-00112in WAFER托盘 _3-4INCH_1.4MM_WH · NAURA10145-200037-00112in WAFER托盘_3INCH_1.4MM_WH · NAURA10145-200038-00112in WAFER托盘_2-6INCH_1.4MM_WH · NAURA10145-200040-001Hot edge ring减薄（6寸）A_IDE · NAURA10145-200042-001Hot edge ringA_IDE · NAURA10145-200046-00112in WAFER托盘_8INCH_1.4MM · NAURA10145-200049-001硅电极加厚210_IDE · NAURA10145-200050-001上电极聚焦环减薄A_IDE · NAURA10145-200051-001硅电极210(中导电率)_IDE · NAURA10145-200052-001硅电极加厚210（中导电率）_IDE · NAURA10145-200053-001硅电极210(高导电率)_IDE · NAURA10145-200054-001Hot edge ring v3_IDE · NAURA10145-200055-001硅环_GND_Bottom_Si_L · NAURA10145-200056-001Focus Ring_Bottom_Si_L · NAURA10145-200057-001上电极showerhead_H6_L · NAURA10145-200058-001保温桶CAP-H02-001 · NAURA10145-200060-001GND硅环_DC_T_L · NAURA10145-200062-001上电极硅聚焦环V3_IDE · NAURA10145-200063-001硅电极-230_V3_IDE_Release · NAURA10145-200064-00112in WAFER托盘_3-4INCH_2MM_WH_Releas · NAURA10145-200065-00112in WAFER托盘_3INCH_2MM_WH_Release · NAURA10145-200066-00112in WAFER托盘_2-6INCH_2MM_WH_Release · NAURA10145-200067-001四柱硅舟-HOX-001_Release · NAURA10145-200068-001四柱硅舟2-HOX-001_Release · NAURA10145-200069-001Hot edge ringV加_IDE · NAURA10145-200070-001Hot edge ringA-IDE · NAURA10145-200071-001上电极Showerhead（DY）_H6_L_Release · NAURA10145-200073-001Hot edge ring V加2_IDE · NAURA10145-200074-001硅保温片-200mm_Release · NAURA10145-200076-0016寸小平边Hot edge ring 25-ST_Release · NAURA10145-200077-0016寸小平边Hot edge ring 25 1-ST · NAURA10145-200084-001Hot edge ring203_IDE · NAURA10145-200085-001硅电极定位销V3+_IDE · NAURA10145-200095-00112in WAFER托盘_6INCH_1.4MM_TSVR1 · NAURA10145-200096-00112in WAFER托盘_8INCH_1.4MM_TSVR1 · NAURA10145-200099-001Focus Ring.Bottom.L2 · NAURA10145-200101-001Hot edge ring2-V3+_IDE · NAURA10145-200102-001外电极_Z · NAURA10145-200104-001内衬_Z_Release · NAURA10145-200105-001内电极（4孔）_Z · NAURA10145-200106-001硅电极-240_2-V3+_IDE · NAURA10145-200108-001上电极UGR环（硅）2-V3+_IDE · NAURA10145-200109-001Hot edge ring（6寸）2-V3+_IDE · NAURA10145-200110-001Hot edge ring（6寸大）2-V3+_IDE · NAURA10145-200112-001Hot edge ring（6寸小）3-V3+_IDE · NAURA10145-200113-001Hot edge ring（6寸大）3-V3+_IDE · NAURA10145-200114-001Hot edge ring（8寸）3-V3+_IDE · NAURA10145-200117-001Hot edge ring V2-1_IDE · NAURA10145-200118-001Hot edge ring V2-2_IDE · NAURA10145-200119-001Hot edge ring V2-3_IDE · NAURA10145-200122-001Hot edge ring V2-4_IDE · NAURA10145-200123-001Hot edge ring V2-5_IDE · NAURA10145-200124001Hot edge ring V2-6_IDE · NAURA10145-200129-0012in+WAFER托盘_6INCH_2_TSVR1_Release · NAURA10145-200130-001内电极（TC）_Z_Release · NAURA10145-200131-001内衬T_Z · NAURA10145-200132-001Focus Ring.Bottom.V1.L2 · NAURA10145-200137-001聚焦环_Z · NAURA10145-200139-001Hot edge ring（6寸大-小）2-V3+_IDE · NAURA1805-220098-118" shield ring · TEL1805-220098-11RING,SHIELD,T7L5:(85IEM-220)(FIRE 340) · TEL1805-220124-118" ring · TEL1805-220124-11RING,OUTER FOCUS RING(8) · TEL1805-220203-11shield ring · TEL1805-221439-24电极 · LAM1805-221470-25电极 · LAM1805-221471-24电极 · LAM1805-221471-25电极 · LAM1805-420042-118" ring · TEL1810-121923-11CE+G72:J73L (0808-4999-0070) SILICON (CEL 320-T5) · TEL1810-121988-11ELECTRODE,UPPER (LD-777) 0808-4069-0030, SILICON · TEL1810-121988-11ELECTRODE UPPER (LD-777),ES · TEL1810-221439-24ELECTRODE SI · TEL1810-221439-24该版图纸分低阻、中阻 · TEL1810-221470-24CRYSTAL CATHODE (8") · TEL1810-221470-25ELECTRODE:CRYSTAL(8K-200) · TEL1810-221470-25ELECRODE..CRYSTAL,(8K-180) ,ES · TEL1810-221470-25CRYSTAL CATHODE (8") · TEL1810-221471-24CRYSTAL CATHODE (8") · TEL1810-221471-24TEL1810-221471-25ELECRODE:CRYSTAL(8K-180) · TEL1810-223063-99Holder upper E（Type 3） · TEL1810-224390-11电极 · LAM1810-224740-31Top grand ring · TEL1810-224789-11上电极 · TEL1810-224789-11(S)ELECTRODE, UPPER(MM-75) · TEL1810-224852-12ELECTRODE, UPPER PLATE MM · TEL1810-323880-13INNER FOCUS RING(OLD) 8" · TEL1810-323880-14KNINNER FOCUS RING 8" · TEL1810-323881-14RING:FOCUS INNER 8"NOTCH · TEL1810-323881-14RING:FOCUS INNER 8"NOTCH C · TEL1810-328661-12KNINNER FOCUS RING · TEL1810-328662-12INNER FOCUS RING · TEL1810-32915-11KNRING,. FOCUS INNER O.F COOLING(D243) · TEL1810-329156-11INNER FOCUS RING 8" · TEL1810-329157-11KNRING..FOCUS INNER O.F COOLING(D243) · TEL1810-329157-11KNFOCUS RING,UP(TYPE L-205) · TEL1810-350062-11FOCUS RING, UP(TYPE L-205) · TEL1880-026696-11电极 · LAM1880-026696-11ELECTRODE · TEL1880-027152-12电极 · LAM1D05-300053-14TEL1D05-300180-11TEL1D05-304010-12TEL1D10-204338-13TEL1D10-302209-14FOCUS RING 8" · TEL1D10-302209-15FOCUS RING 8" · TEL1D10-309946-12FOCUS RING
RING,F-8SO-SI-260-3.4A(DRM2),ES · TEL1D10-310020-11SI FOCUS RING 8" · TEL1D10-311970-11RING · TEL1N10-301991-156”FOCUS RING · TEL2D10-258483-21RING,MONO-SI FLAT TOP-GND 450.5 · TEL2L05-250034-11RING,SHIELD TOP-H(PH-TU) V2 · TEL2L05-250058-11RING,INSULATOR IR FLAT Q V2E · TEL2L05-250059-11RING,INSULATOR OR FLAT Q V2E · TEL2L05-350037-11COVER RING,360.9 Q V2 · TEL2L05-350038-11RING,QZ GND 5.0-T16.5 Q V2 · TEL2L05-350351-11RING, INSULATOR COVNVEX FRTC · TEL2L10-250317-11RING · TEL2L10-250520-11CEL,CL380-364-0.5(PH) V2 · TEL2L10-250520-11(364)CEL,CL380-364-0.5(PH)V2 · TEL2L10-250701-11RING(L), SI GND STEP V2 · TEL2L10-25106-21FOCUS RING(LAB),360-R&D,4.6T · TEL2L10-251061-21FOCUS RING(LAB), 360-R&D, 4.6T · TEL2L10-251162-11RING(L), SI GND STEP V2E · TEL2L10-251342-11CEL INNER ST(NEST) V2 · TEL2L10-251685-21RING, (L) SI GND STEP BSP V2 · TEL2L10-251978-11RING,FOCUS AD360-297.1 ATCC V2 · TEL2L10-252017-11RING, FOCUS 360-T12.1 ATCC · TEL2L10-252838-11RING, FOCUS LAB 320-T5 WIDE AN · TEL2L10-252987-21ELECTRODE, INNER 0.5-0.8PH V2 · TEL2L10-253630-11ELECTRODE, SS 0.5-08 H606 V2 · TEL2L10-253631-11ELECTRODE, FLAT 0.5-0.8 H606 V2 · TEL2L10-253833-11RING(L), SI GND VIX-54 · TEL2L10-254167-11RING(SI.6), FOCUS360-T3.4 MP · TEL2L10-254212-21RING, MONO-SI FLAT TOP-GND · TEL2L10-254262-11RING, MONO-SI FLAT TOP-GND · TEL2L10-254262-21RING, MONO-SI FLAT TOP-GND · TEL2L10-254608-11ELECTRODE, FLAT T14 H932 · TEL2L10-254608-21ELECTRODE, FLAT T14 H932 · TEL2L10-254685-11RING · TEL2L10-255149-11RING, FOCUS T3.35 NOMF FRTC · TEL2L10-255346-11RING, F-SI-T3.4-2.9 · TEL2L10-255379-11ELECTRODE, INNER DC2 · TEL2L10-255379-11电极 · TEL2L10-255413-11RING,FOCUS 360-T3.4 MP-AN · TEL2L10-255879-11EL+G21:I21ECTRODE, INNER DC2 · TEL2L10-255879-21ELECTRODE, INNER DC2 · TEL2L10-255880-21ELECTRODE, OUTER DC2 · TEL2L10-255881-11SI-GND SI MULTI · TEL
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