LubanixSEMICONDUCTOR SPARE PARTS
Home › Si Electrodes & Rings › 10145-200130-001
Si Electrodes & Rings

NAURA 10145-200130-001

内电极（TC）_Z_Release

Part details

Part number10145-200130-001
Description内电极（TC）_Z_Release
OEM / brandNAURA
Material硅
CategorySi Electrodes & Rings

Material: 硅.

Request a quote

sales@lubanix.com

Search other parts

Nearby part numbers

10145-200114-001Hot edge ring（8寸）3-V3+_IDE10145-200117-001Hot edge ring V2-1_IDE10145-200118-001Hot edge ring V2-2_IDE10145-200119-001Hot edge ring V2-3_IDE10145-200122-001Hot edge ring V2-4_IDE10145-200123-001Hot edge ring V2-5_IDE10145-200131-001内衬T_Z10145-200132-001Focus Ring.Bottom.V1.L210145-200137-001聚焦环_Z10145-200139-001Hot edge ring（6寸大-小）2-V3+_IDE1805-220098-118" shield ring1805-220124-118" ring

Confirm specifications against the OEM datasheet, physical sample or approved drawing. Contact Lubanix with the tool platform, quantity and requested delivery date.