Ceramic and high-purity alumina parts for process chambers

Ceramic insulators, nozzles, tubes, guides and stands isolate high voltage, route process gas and survive plasma-adjacent zones. When insulation resistance drops, micro-arcing appears, or a nozzle orifice wears, the replacement has to match dielectric and mechanical design — not just "look like alumina."

Lubanix catalogs semiconductor ceramic components including high-purity alumina and aluminum-nitride parts, plus drawing-based custom items. Search by OEM part number for chamber hardware used on tools from makers such as LAM Research, Applied Materials and Tokyo Electron when listed, or send a drawing for review.

Typical use cases

• Cathode / bias isolators and standoffs
• Gas nozzles and ceramic rings in etch or deposition chambers
• High-temperature guides and heater-related ceramic hardware

How to inquire

OEM P/N · equipment · photo/drawing · material callout if known (e.g. Al2O3 / AlN) · quantity · planning date.

Availability and condition are confirmed after review. We do not post inventory or certificate claims on this page.

Related

• ESC & heaters
• Etch chamber parts
• Quartz parts
• Focus Rings

Contact

Send the ceramic P/N to sales@lubanix.com or use the part list on this page to find related numbers.