Ceramic and high-purity alumina parts for process chambers
Alumina and AlN ceramic insulators, nozzles, tubes and guides for semiconductor chambers. Search by OEM part number or request a drawing-based review.
Related search terms
semiconductor ceramic parts · high-purity alumina · aluminum nitride · ceramic nozzle · insulator
Part numbers
00-682203-00陶瓷绝缘指00-682216-00/RING CERAMIC CLIP氧化铝环0001-6138驱动轮左端盖A0001-6139驱动轮右端盖A0010-28101磁叉0010-46718gas plug0020-00663INSULATOR CATHODE HEX0020-01640RING0020-02588TOP RING CERAMIC 300MM , IA0020-20114真空泵配件 ISOLATOR DC BLAS0020-20123HEATER ISOLATOR CERAMIC0020-20126陶瓷柱
STAND-OFF,CERAMIC DC BIAS0020-20126STANO-OFF0020-21664密封环0020-21664密封环0020-22975Ceramic ring0020-26254陶瓷环0020-70473HOLDER LIFT PIN 300MM ULTIMAX0020-82890 001064554103陶瓷手臂0020-90020INSULATOR,TYPE SM70020-97557陶瓷柱0021-22485陶瓷手臂0040-01445绝缘柱0040-01784-001ISOLATOR RF CERAMIC BLOCK DxZ FLUORINE GENRATOR0040-21178BELLJAR0040-55456（改）BELLJAR0040-87712producer lift pin0040-88800ISOLATOR, VAL SCREEN0041-30235ISOLATOR, VAL SCREEN0041-56870LIFT PIN0042-48683electtical clamp assy0068627-000SP1 vacuum robot puck01-4780CERMIC PIN WAFER GUIDE01-4938INSERT,CERAMIC,RF TUBE01-4938放气帽0190-13298FEEDTHRU VECTRA-IMP, REV 4.5 300MM0190-64465END-EFFECTOR ASSY,KETRON PEEK CA30 6XFI02-042566-01DOME02-259925-00ASSY,BELLJAR,HI PWR,C3,SPD02-302676-00Speed Dome02-307391-00ASSY,BELL JAR,G10, C2SPD-S (Speed dome new type)02-332440-00HOLDER ASSY CARRIER RING 300MM02-336407-00陶瓷dome0200-00137氧化铝异形件focus ring0200-00137RING,FOCUS 195MM SEMI NTCH N0200-00137 REV05DPS Metal Focus Ring0200-00137 REV05(改）DPS Metal Focus Ring0200-00175ISOLATOR BLOK DXZ 200MM0200-00234ISOLATOR BKM1 ENHANCED TXZ0200-00242DEPOSITION RING WITH ANTI-ROTATION Cu BESC0200-00247RING CAPTURE 195MM SNNF CERAMIC DPS0200-00250RING,CAPTURE C-ESC,SNNF,200MM0200-00250RING,CAPTURE C-ESC,SNNF,200MM0200-00261CHAMBER INSERT 200mm TxZ CIP0200-00278ceramic ring0200-00281PLATE EDGE COVER，PRODUCER DLK-CVD0200-00296SLEEVE JUNCTION SIN，DXZ0200-00299陶瓷锁扣0200-00316ISO PUMPING RING MIDDLE 200MM0200-00317ISO PUMPING RING BOTTOM 200MM0200-00332陶瓷环0200-00353-SSPACER PIN WXZ+HEATER0200-00354RING,PURGE0200-00374-002ESC INSLATOR0200-00402ISO PUMPING RING TOP 200MM0200-00411/0200-10446/0200-36696ring 200mm oxide0200-004530200-00454Lift pin pusher0200-00466HOUSING0200-00468陶瓷异形件0200-00482ISOLATOR CERAMIC 300MM PRODUCER0200-00501ISOLATOR BLOK DXZ 200MM0200-00503INSULATOR INNER，BELLOWS 8101HEATER0200-00511COLLAR ESC 300MM,MIN.CONTACT HDPCVD0200-00531CHAMBER INSERT 300MM0200-00576-002PIN WEIGHT 300MM HDPCVD0200-00621-006(1)RING SHADOW 200MM WXZ PLUS NCSR 1.5MM EE0200-00622-001RING OUTER 200MM WxZ+ NCSR0200-00624陶瓷环0200-00668LINER CERAMIC BOTTOM。SACVD 300MM PRODUCER0200-00690氧化铝环0200-00710ISOLATOR CERAMIC WXZ EC0200-00771 REV 007RING SHADOW NCSR 1.5MM EE 300MM CWXZ0200-00772 REV 005RING OUTER NCSR 300MM CWxZ0200-00834216.9*96.6*3.15 手臂0200-00834陶瓷手臂0200-00933Screw cover0200-00968-001ISOLATOR FSG-TEOS PRODUCER 200MM0200-00969PUMPING LINER FSG-TEOS PRODUCER 200MM0200-00991CERAMIC BLADE 300MM0200-01006 REV 006氧化铝DOME0200-01009NOZZLE 4HOLE,60DEG.,BAFFLEULTIMA 1 HDP-CVD0200-01080陶瓷沉积环0200-01155陶瓷环0200-01196陶瓷件0200-01197陶瓷件0200-01299BRACKER,FLAT COIL
300MM E2 ICE MATCH0200-01300CLAMP,FLAT COIL,300MM E2 ICE MATCU0200-01326INSULATOR 300MM SOURCE ADAPTOR,CERAMIC0200-01347DOME TOP FEED 300MM HDPCVD ULTINA PLUS0200-01393LINER,COMMON,BD BLOK,LOWK,200MM PRODUCER0200-01427陶瓷环0200-01509INSERT RING NM,200MM,NOTCH()0200-01532HOOP,CERAMIC,WAFER LIFT,WXZ 300MM0200-01568BLADE 200MM WXZ AMJ CERAMIC0200-01766 Rev.001MANIFOLD CERAMIC RPS PRODUCER SE0200-01798陶瓷T型杆0200-01798PIN TXZ HEATER SINGLE TAPER,CERAMIC0200-01844INJECTOR，GAS 12 HOLES,0200200-01845INJECTOR，GAS 12 HOLES,0200200-01904Pin Pedestal Alignment Ceramic 300MM PC0200-01967INJECTOR，GAS 300MM EMAX B0200-01991RING,FINGER LIFT 300MM PRODUCER0200-02042-004PIN COVER SIP II 200MM0200-02115INSERT DOUBLE RF CONN 300MM SIP ENCOVER TA(N)0200-02116氧化铝异形件0200-02117氧化铝异形件0200-02121INSULATOR FEEDTHRU 300MM SIP ENCORE TA(N)0200-02139PIN CAPTIVE SCREW COVER0200-02145CUP,COIL SUPPORT 300MM SIP ENCORE0200-02220氧化铝块/片0200-02395-003LINER CERAMIC TOP PRODUCER SE0200-02396-001LINER, CERAMIC Middle, PRODUCER SE0200-02397LINER CERAMIC BOTTOM PRODUCER SE0200-02398PIN，LIFT CERAMIC，300MM TXZ SST HEATER0200-02407PUMPING RING CERAMIC C-CHANNEL,SIDE 1 300MM PRODUCER SE0200-02408PUMPING RING CERAMIC C-CHANNEL,SIDE 2 300MM PRODUCER SE0200-02414TOP LINER0200-02421陶瓷环0200-02469manifold,ceramic,rpsII，producer se0200-02575LIFT PIN，FIXED LIFT PIN，200MM/300MM PRODUCER0200-02575 Rev 001LIFT PIN，FIXED LIFT PIN，200MM/300MM PRODUCER0200-02576LIFT RING.FIXED LIFT PIN. 200MM PRODUCE0200-02677DEPOSITION RING AL W/ ESC, 300mm0200-02790DEPOSITION RING 300MM AL W/ESC0200-02836RING 8 INCH PEDESTAL B101 HEATER SLOPED CERAMIC0200-02916DEPOSITION RING 300MM BESC CERAMIC WITH BEAD BLAST0200-02935Ceramic lid assembly0200-02972-001LINER,CERAMIC TOP,LOW K PRODUCER SE0200-02973-001LINER,CERAMIC MIDDLE,LOW K PRODUCER SE0200-02974-002LINER,CERAMIC BOTTOM,LOW K PRODUCER SE0200-02985DEP RING，300MM SIP TA CLEANCOAT，BARE0200-03200Cover ring0200-03269陶瓷T型杆0200-03314-004LIFT PIN 170 FIXED FLOATING 300MM PRODUCER SE0200-03317Capture ring0200-03337DEPOSITION RING 300MM ESC0200-03388Single ring0200-03403PUMPING RING CERAMIC ENLARGED HOLE Low K 300MM PRODUCER0200-03406 REV004C-CHANNEL SIDE 1 PRODUCER SE APF0200-03407 REV004C-CHANNEL SIDE 2 PRODUCER SE APF0200-03414 REV 003LINER CERAMIC BOTTOM PRODUCER SE APF0200-03453ISOLATOR,ENHANCED,
PUMPING LID,200MM TXZ0200-03555L12吋EMAX 腔体内环0200-03559L12吋EMAX 腔体上环0200-03584PIN WAFER LIFE,300MM0200-03598Blank Lid0200-03599Gas nozzle(Cr)0200-03698 Rev 001PIN HTR EDGE RING TAN0200-03710SHIELD L-SUPPORT PUMPING INSERT GECO0200-03712PLATE EDGE COVER，DXZ GECO0200-03718SHIELD PUMPING INSERT SIN,DXZ GECO0200-03719LINER CERAMIC,SiN DXZ,GECO0200-03749LIFT PIN GUIDE BOTTOM NH ALUMINA0200-03901LIFT PIN .149 DIA TRIANGULAR0200-03936LINERJUNCTIONSIN，DXZ0200-03954ceramic liner0200-03954 REV06陶瓷环0200-04017CU dep ring0200-04101Lift Pin0200-04235ISOLATOR，CERAMIC 300MM PROUCER0200-04293LIFT PIN,DSA0200-04406Ring0200-04470陶瓷环0200-04654-04PUMPING LINER, TOP, SIH4,PRODUCER SE0200-04701SINGLE RING CERAMIC .O9 HT 25 RECESS DP0200-04814Gas Nozzle0200-04877 REV04SINGLE RING CERAMIC .50 HEIGHT 300MM HTD ESC0200-05041TTN CHAMBER ONLY-VACUUM SIDE0200-05140LIFT PIN LUMMINA CLAMPED CH-AB 300MM END0200-05216 (0400-99736)COVER RING ULTIMA 300MM0200-05307CAP CERAMIC 0.44 IN WAVE WASHE0200-05464 REV02MANIFOLD BLOCK PRODUCER SE0200-05590陶瓷大碗0200-05664ESC COVER0200-05795绝缘子0200-05876DALI SR LIFT PIN0200-05912lift pin0200-05916NOZZLE, ALN, 1.76L X .014DIA, 103% FLOW0200-06073-05RING DEPOSITION CU COIL EXTENDED TRENCH DESC 300MM0200-06110pin (UV)0200-06112BLADE 300MM0200-06131LIFT PIN ,CH0200-06396Nozzle Insert AG1000 Solid 1.3L 300MM DP0200-06405 REV04ceramic lid0200-06422陶瓷管0200-06508-03HSR SHIELD TOP CERAMIC 300MM TXZ0200-06509-03HSR CHAMBER INSERT CVD 3OOMM TXZ0200-06510-05HSR CHAMBER INSERT CVD 300MM TXZ0200-06702-01 625-02611-033-P01陶瓷针 Ceramic Lift Lock Pin,PM
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