Ceramic and high-purity alumina parts for process chambers — page 6
Page 6 of 8 in the Lubanix Semiconductor Ceramic & High-Purity Alumina Parts catalog, part numbers 625-01491-000 to E12002070. Request a quote from
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semiconductor ceramic parts · high-purity alumina · aluminum nitride · ceramic nozzle · insulator
Part numbers
625-01491-000绝缘结构件625-01643-002Clamp ring screw（7.5-Al2O3）625-01643-002Clamp ring screw（7-Al2O3）625-01764-000-P02隔离陶瓷件625-01767-011AL203 M4 SCREW,SLIT DOOR SHUTTER,BO8625-02203-000TM RB PADDLE625-02250-000绝缘/真空密封件625-02260-080Pendant,AL203,AIN Heater,Heavy CIP 1625-02260-090Pendant,AL203,AIN Heater,Light CIP 1625-02611-036-P01Ceramic Lift PIN10,PM625-02611-039-P01Ceramic Lift PIN Low 01,SACVD625-02611-042-P01Ceramic Lift PIN High 01,SACVD625-03185-000-P01陶瓷异形件（小风扇）625-03217-000-P01陶瓷异形件625-03677-020-P01Ceramic Lift PIN 05,Weight625-03677-021-P01Ceramic Lift PIN 10,Weight625-03812-000Dome 300mm Phase I Hesper625-04853-000Vacuum Robot Paddle625-06490-000陶瓷支板625-08791-000Bottom Ceramic Ring625-08825-060Pumping Ring,5mm625-10300-100Ceramic Cover,400℃,0.4625-12115-010Lift Pin625-12628-060Lift Pin Ceramic Heater,PECVD625-12628-180Lift PIN,Ceramic Heater,CIP 1625-12809-020Half of Ceramic Ring625-30155-000Ceramic Ring, Showerhead625-30238-000Bush AIumina A625-30238-010-P02Bush Alumina B625-61483-000Side nozzle 100% STI 300mm Phase I Hesper625-61483-093Side nozzle 93% STI 300mm Phase I Hesper625-61483-095Side nozzle 95% STI 300mm Phase I Hesper625-61483-097Side nozzle 97% STI 300mm Phase I Hesper625-61483-099-P01Side nozzle 99% STI 300mm Phase I Hesper625-61483-101Side nozzle 101% STI 300mm Phase I Hesper625-61483-103Side nozzle 103% STI 300mm Phase I Hesper625-61483-105Side nozzle 105% STI 300mm Phase I Hesper625-61483-107Side nozzle 107% STI 300mm Phase I Hesper681051H1 Robot hand 6"6856-2806C陶瓷手臂70055-00925RING707622DSI BELL JAR71111.306plate71111.306-01plate713-028487-001圆环713-801203-002PIN716-003481-815 REV E陶瓷窗/window716-003686-188 DABBREVIATED(30 CHAR.MAX) INSR,FOC R,SHLD,300MM ESC716-011543-001 D陶瓷环716-012639-125 REV G气体注入器/Gas injector716-018614-081 REV BFocus Ring716-018614-081 REV B（改）Focus Ring716-018614-081（改）Focus Ring（改）716-020904-016陶瓷盆716-020905-001陶瓷环716-020906-161陶瓷环716-020906-161wafer clamp716-022493-905 A（改内径294）RING SHADOW BTM 300MM 2mmC716-022493-905 A（改内径295）RING SHADOW BTM 300MM 2mmC716-022495-063 REV CRINGCENTERING,2300BSR716-026652-832 REV E底部聚焦环/BOT focus ring716-027904-006edge ring716-028028-004 B陶瓷环716-028123-002 B陶瓷环716-028668-261 D陶瓷环716-028668-266 REV.D陶瓷环716-031257-532 REV B顶部边缘环/Top edge ring716-052609-001陶瓷件716-057993-003INJ DUAL FACSEAL IEP HNYCMB CER716-057993-335GAS INJECTOR716-065573-004RING PEZ LWR Y203716-066539-003RING PEZ UPR BEVEL Y203 COATED716-066539-006RING,PEZ,UPR,BEVEL,Y203,COATED716-072581-055RING,CLAMP,CER,THK,NRDLK716-073392-002-CPLUG,UPPR ELCTO,CER716-104870-823Lower Chamber TCP Gas Distribution window716-118778-101Ring716-140118-001RING,FOC,ESC,8"716-182601-001 REV DRing716-198439-004Focus ring arcing716-198439-401陶瓷圈716-207643-401陶瓷圈716-207643-401陶瓷圈（改）716-207643-401陶瓷圈（改）716-224281-030RING INSUL ESC SHM H STR716-229840-479Ring,.15R GAP,R ID,.162THK,.02SPC716-238517-001RING716-238517-001（改）MOER Ring716-248323-700FTG,TEE,CERAMIC,
SHWRHD,RF ISO,VXT716-303287-001RING,EXCL,2.25 O/H,300MM716-305807-504陶瓷套716-317222-001RING,EXCL,1.75 O/H,300MM716-330045-281RING EDGE NON LANDED 8' NOTCHED 9600PTX716-330121-001WDO，RF SHPD CER，FXD GAPN716-330504-081RING,FOCUS,8",ESC,GUARD,RING716-330504-081（改）RING,FOCUS,8",ESC,GUARD,RING716-330892-007SOL,GDP no coating716-330892-507氧化铝陶瓷件716-330915-001PTX陶瓷环716-331051716-331089-001PTX陶瓷片716-339133-001END EFFECTOR，HYBRID，VAC RBT，MACH 1716-800952-001 ABASE,FOCUS RING,SHIELDED,300mm716310150 WAFER SHIELD CVR - PIN ESC GAAS719-003481-858MCO CERAMIC MCO YTTRIA THIN PILM719-003481-861TCP WINDOW720442200 WAFER SHIELD COVER PL7527223A3spare robot hand(unload)77-110-0142801-00陶瓷件799-123034-001VCE,VAC,WITH PINS/SR8240-100580020102陶瓷件（长）80020103陶瓷件（中）80020104陶瓷件（短）803.13.01.007 VO2绝缘环-TGV81118177-0陶瓷加热片82-0052(NL523W03-016)CERAMIC STANDOFFS841031183BASE8506090587推力盘8625-00002-000TM VAC ROBOT EE,HHU8625-00027-000PM CERAMIC RING, CORAL8625-00028-000PM EDGE CERAMIC RING, CORAL8T10003陶瓷刀8T10004陶瓷垫片A8T10005陶瓷垫片B8T10006陶瓷垫片C91-UG100-35-G60-2SEAT91-UG100-50-G60-2SEAT91-UG100-65-G60-2SEAT91-UG100-70-G60-2SEAT916-11002-00陶瓷热电偶保护916-11002-00CERAMIC,THERMAL,PROTECT93060183陶瓷环9PE50RINGA00001545CREAMIC SLEEVE,BEVELED,ICP-1A02-000-603摩擦式blade带mappingA03-006-173摩擦式EE减薄后 (无mapping)A10-0193陶瓷手臂（左）A10-0194陶瓷手臂（右）AD4391-03-09右侧上手指AD4391-03-10左侧上手指AD4391-03-10-B左侧上手指B款ALD300A-05-02-20传感器陶瓷套管AM04-01-010-E01绝缘陶瓷柱AM04-01-011-E01绝缘陶瓷垫AM04-01-019-E01隔离陶瓷件AM04-02-023-E02热电偶保护套AM08-01-014-E01绝缘陶瓷柱-2AM08-01-017-E01绝缘陶瓷柱-1AM08-03-015-E02隔离陶瓷件AM08-03-016-E02隔离陶瓷件Archer Test End Effector-006Q41-PE测试手指Archer-Test End Effector-007R42-PE测试手指ASM20221202机械手臂ASMCS20221107001长条陶瓷吸盘ASMCS20221107002手持式陶瓷吸盘ASMCS20221107003异形陶瓷吸盘ASMCS20221114001手臂AY679100显微镜长手臂AY679200显微镜短手臂C02010153粗动绝缘片C02010154粗动绝缘片C02010155粗动绝缘片C02010156粗动绝缘片CDEM 9260A手指CERA-OD03-1P5-L73-CBN氧化铝棒CF420480H122V-ZI陶瓷环CJ14082601绝缘体、盖帽CJ16.2.11-31工件台基座陶瓷环CJ16.2.13-6顶针陶瓷垫板CJ16.2.7-5陶瓷绝缘套CJ16.2.7-6加热电极防护罩1CJ16.2.7-7加热电极防护罩2CJ16.5.2-12陶瓷柱CJ16.5.2-7绝缘环CM0000211062陶瓷F型右吸盘CQ-10857陶瓷环CTA6332804BOTTOM LINERCW800陶瓷杆D130708异形件D131668绝缘环D131670主轴陶瓷绝缘套管D210011-01-02-06-02-01-01-G手指主体D210011-01-02-06-02-01-01-G-B（改）手指主体DE1072231EPFG VACUUM WIRINGDE1072236EPFG VACUUM WIRINGDE343-01-3600-003SIDE INSULATOR(2-A)DE343-02-3600-003SIDE INSULATOR(2-B)DRY-H1-PM-3100-001CERAMIC PLATE ADRY-H1-PM-3100-002CERAMIC PLATE Bdry-h1-pm-3100-004SIDE INSULATOR (1)dry-h1-pm-3100-005SIDE INSULATOR (2)DRY-H1-PM-3100-006CERAMIC CAPDT302385CERAMICDT319648200MM PLATEN TOP SHIELD CDT319734150MM PLATEN TOP SHIELD C 47.5 FLATE-EC20230505-050D基板300*5.2E-EC20230505-997-085A基板300*8.5E07012671X Guide 陶瓷棒E12002060Bushing,small,glazed,male(EFG)E12002070Bushing,small,glazed,female(EFG)
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