Ceramic and high-purity alumina parts for process chambers — page 4
Page 4 of 8 in the Lubanix Semiconductor Ceramic & High-Purity Alumina Parts catalog, part numbers 10150-001864A to 16327S-49011. Request a quote from
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semiconductor ceramic parts · high-purity alumina · aluminum nitride · ceramic nozzle · insulator
Part numbers
10150-001864A下电极聚焦环（5）_198mm10150-001865ALIFT PIN V4(C)_CLC10150-001925AOES观察窗陶瓷筒_M10150-002062 AHTB ESC波纹管绝缘件 ECK10150-002063A陶瓷锥形整流筒-300_HP10150-002087AFocus Ring10150-002219ABase Ring-G10150-003047BBase Ring10150-003051A遮蔽环-PV10150-003055B陶瓷喷嘴10150-003062BDep Ring10150-003388Wafer+Tweezer-200mm10150-003388AWafer Tweezer-200mm10150-003628 A下电极聚焦环(6寸)_陶瓷（全圆159）10150-003628 A下电极聚焦环(6寸)_陶瓷(全圆159）10150-003631A单区喷嘴（110°）-改10150-003874压环_TEE_ZJG Clamp Ring10150-003957 A陶瓷聚焦顶环(2MM)_DEM10150-003958 A陶瓷聚焦顶环(2MM)_1DEM10150-003959 A陶瓷聚焦顶环(8MM)_DEM10150-003962 A陶瓷聚焦顶环定位销1_DEM10150-004011A压环ZT_TEE Clamp Ring10150-200034-001 A销钉-Allqz10150-200037-001陶瓷叉指（窄）_PEA10150-200071-001聚焦环_G+_（335）10150-200074-001陶瓷压环-8c-G+_33510150-200075-001卡盘保护环（335）10150-200080-001 A盘头台阶陶瓷销-Allqz10150-200082-001卡盘内嵌陶瓷环_33510150-200087-001 A线圈隔离件4mm_PV10150-200091-001 A线圈隔离件5mm_PV10150-200092-001 A线圈隔离件6mm_PV10150-200095-001 A上电极进气陶瓷管（6.4）-TTN10150-200096-001 A陶瓷压环4寸_MC10150-200098-001陶瓷压环-8c-G+_335_sy10150-200101-001 A盖板_355_SY_TC10150-200107-001陶瓷压环（154-1）-SC10150-200135-001陶瓷压环（4-圆）-SC-110150-200138-001 A陶瓷聚焦环_94-SC10150-200173-001 A载片头_PEA10150-200181-001 A聚焦环-（1.25）-PV10150-200182-001 A聚焦环-（2.25）-PV10150-200183-001 A陶瓷环（上H1+1.25）-PE10150-200184-001 A陶瓷环（上L1+8）-PE10150-200185-001 A陶瓷环（上H1+2.5）-PE10150-200186-001 A陶瓷环（下）-PE10150-200188-001 A陶瓷环（上L1+16）-PE10150-200189-001 A陶瓷环（块状）-PE10150-200195-001 A载片头镜像_PEA10150-200208-001 A支撑环_2_FO_Insulating Plate10150-200213-001 A升针_2_FO_Pin10150-200214-001 A25mm陶瓷下电极支撑环_DEM Insulating Plate10150-200224-001 A边缘保护环_6寸_ES10150-200234-001 A陶瓷压环（152-全圆）-SC10150-200249-001 A屏蔽环SY5-PV10150-200251-001 A屏蔽环SY3-PV10150-200256-001 A内门陶瓷_2_FO10150-200258-001 A绝缘环_2_FO_Insulating Plate10150-200262-001 A陶瓷聚焦环_ICP_（带定位)10150-200273-001陶瓷螺钉（新）M4*2210150-200274-001下电极聚焦环(6寸平边转全圆)-SC10150-200283-001下电极聚焦环(156)_陶瓷（全圆）10150-200284-001聚焦环（全圆159）10150-200293-0016寸压环（ESC 150mm wafer大平边）-GS10150-200294-001 A4寸压环（ESC 100mm wafer平边）-GS10150-200302-001 A12寸陶瓷压环（带支脚） N110150-200303-001 A聚焦环01（3mm)10150-200303-002聚焦环01（3mm) N210150-200304-001 A陶瓷聚焦环HER DEM10150-200305-001 A边缘保护环_6寸_ES 改210150-200308-001下电极聚焦环(TC 4寸 96MM 去胶壳)-SC10150-200333-001 A边缘保护环_6寸_ESN10150-200413-001 A陶瓷压环-8C GD10150-200431-001 A盘头台阶陶瓷销-AlD10150-200435-001陶瓷聚焦顶环（7mm） DEM10150-200448-001下电极聚焦环(6寸)_陶瓷-GC10150-200514-001线圈隔离件10mm PV10150-200567-001 A内衬垫圈10150-200634-001下电极聚焦环(6寸)_陶瓷-CIP-210150-200964-0016寸小平边Hot edge ring 25 TC-ST10150-200968-001 A陶瓷window-PVS10150-201001-001 A陶瓷支柱(ZC)_PEAP10150-201024-001 A12寸聚焦顶环-2Mcip10150-201091-001陶瓷聚焦环-ICP-4寸高阻（带定位）-GDP10150-201092-001陶瓷聚焦环-6寸高阻大平边（带定位）-GDP10150-201094-001中心进气易拆板（陶瓷）-GDP10150-201105-001陶瓷聚焦环-6寸高阻小平边（带定位）-GDP10150-201712-001遮蔽环_BP+10150-201780-001 A支脚聚焦顶环-BP+10150-201781-00112寸支脚聚焦顶环_BP+10150-201784-001 A下电极陶瓷聚焦环-6寸小平边01-DTE10151-001036AClampring陶瓷块10171014-009Z102302588SLEEVE,INNER,GAS ANNULUS,AI1035697-R2VESSEL,HYDRILIS XT2 CERAMIC1080-001885-012陶瓷手臂110-10057566pecvd003 pin support110-10058801sea plate110-10058946sea plate r322.7110-10064871HEATER EXHAUST GASKET110-10064872RADIATOR PAPER GASKET 03110-39095陶瓷BLOCK
INSULATION BLOCK CERAMIC110-68819side tower robot transfer plate110.1070260.01陶瓷机械手旋转臂110.1070355.01旋转传送臂110.3陶瓷环11044-0106 B气膜外圈11051-0106 REV D气膜外圈1134-05-009SA照射部-迫緊環(圖)1135-03-009SA照射部-緣2441~1(圖)1138-05-009SA电极套11798324ament insulator12344321Spacer Mid filament No312344321Spacer Mid filament STD12344321Spacer Mid filament No212617984-000陶瓷片130-10035994End-effector130000160309高压仓绝缘地脚焊接件144-00006-00陶瓷管144-00007-00陶瓷垫圈15-00558-01SHIELD，HEATER STRAP15-00558-02SHIELD，HEATER STRAP15-00578-00CAP，CERAMIC，FEEDTHRU15-00699-01心轴指型杆15-00866-00 REV BSPRING CERAMIC15-032016-00PIN CERAMIC INSERT VENTED FOR HEATER BLOCK15-032185-00CENTER PIN15-032502-00 REV HPIN WAFER LIFT ALUMINIA15-032503-00RING, NOVELLUS INSULATOR, 200 MM15-032939-0099孔陶瓷环（2.25 MOER-RING）15-034333-00陶瓷管15-050160-20 ATUBE INJECTOR HI-PURITY15-052375-00finger，transfer plate15-052619-00陶瓷叉15-054454陶瓷环(修改前)15-054454陶瓷环（修改后）15-054800-00 BSPRING CER 300WCVD TALL15-055546-04PIN,WAFER LIFT,ALUMINIA,HDP15-055912-00陶瓷垫片15-100263-00手臂15-10324-00BUTTON,PIN WAFER ORIENTER DESDRB CHAMBER15-11031-00陶瓷圈15-11507-00RING15-11606-00-BINSULATOR GAS DIST15-116792-00TUBE,RF BREAK,.25 O.D.15-120150-01TUBE INJECTOR
2.00 HI PUR15-120150-03TUBE INJECTOR 0.50 HI PUR15-120150-04TUBE INJECTOR 1.00 HI PUR15-122178-00陶瓷环15-123086-01INJECTOR TUBE .4375 OD X 7.515-134123-01INJECTOR TUBE CHAM END HDP15-134299-00SH Isolator15-145715-00氧化铝异形件15-145715-00锥形钉15-150002-00guard ring15-158185-00INJECTOR TUBE CLN SPD-S HI-PUR15-169666-00INJECTOR TUBE LONG .32 ID X.438 OD15-169667-00INJ TUBE SHORT .32 ID X .438 OD15-250449-00PADDLE,300MM,WTS TM ROBOT15-250878-00SCRW,MORE ALUMINA 10-32x.200IN15-250878-00MOER ring Screw15-251847-00INJ TUBE CLOSE END .32 ID X .438 OD15-256822-0015-266942-00BLOCK,WHEEL
PEDESTAL,ALIG15-268169-00SCREW,CERAMIC 1/4-28,GUIDE,PHIL15-268171-00SCRW,1/4-28,CERAMIC,PLAIN15-278968-00INJECTOR TUBE STAR INSERT 1.375L15-278968-00INJECTOR TUBE STAR INSERT 25L15-278968-00INJECTOR TUBE STAR INSERT 30L15-278968-00INJECTOR TUBE STAR INSERT 40L15-278968-00INJECTOR TUBE STAR INSERT 45L15-278968-00INJECTOR TUBE STAR INSERT 50L15-278968-00INJECTOR TUBE STAR INSERT 55L15-280354-00RING GUARD EXT CATHODE LTM C3SPD15-281966-00_B_1CLIP RETAINING HOLDER MOER CERAMIC C3 ALTUS15-282056-00FTG SH RF ISOLTR AL2O3 VCTR PRC15-286294-01陶瓷管15-287254-00NUT,INSERT15-287254-00Lnsert nut (Ceramic)15-298024-00PIN,ALUMINA,C3SPD,WAFERLIFT,REDUCED CONTACT15-300579-00NOZZLE,45 DEG,MALE,CERAMIC,.310D.C3SPD15-303364-00SPACER DISK PEDESTAL 300MM15-311164-00Carrier Ring15-325718-00Holder,Wafer,More Ring,C3 ALTUS15-325836-00陶瓷环（金属改）15-335677-00guard disk15-336373-00nozzle，gas del，C3SPD15-355501-00SPRING,CERAM,NARROW,P-TOP,C3 ALTUS15-375892-00PLATE,BOTTOM,CERMIC,FORK,C2SEQ-X15-382250-00/716-238517-001RING15-439132-00INSERT NUT CERAMIC 1/4-28 C3ALT15380-01INSULATOR PLATEN15572S-49011陶瓷盖板（短）155803S-48911陶瓷盖板（长）158741210 WAFER SHIELD COVER158752SHIELD RING COVER 200 CO/PL16-323953C01(60111129)INSULATOR-END-UPPER-LP16-323954C01(60111130)INSULATOR-CERAMIC(LOWER LAMP ASSY)16-323957B01(60142655)INSULATOR-COVER-LP16327S-49011陶瓷压条（短）
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