Ceramic and high-purity alumina parts for process chambers — page 2
Page 2 of 8 in the Lubanix Semiconductor Ceramic & High-Purity Alumina Parts catalog, part numbers 0200-06758 to 1001414-001. Request a quote from Lubanix.
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semiconductor ceramic parts · high-purity alumina · aluminum nitride · ceramic nozzle · insulator
Part numbers
0200-06758陶瓷环0200-06840LIFT PIN(3mm)0200-06840-01陶瓷T型杆0200-06840（改制）LIFT PIN0200-06842-01陶瓷柱0200-06863DEPOSITION RING0200-06867陶瓷环0200-06870RING,DEPOSITION,PVD W V2,CLEANCOAT,A0200-07014LIFT PIN GUIDE TOP NH 5MM ALUMINA0200-07014/0200-03749Lift Pin Guide Top NH 5MM Alumina0200-07277HOUSING,DOUBLE RF CONNECTOR0200-07363陶瓷环0200-07414PIN,WAFER LIFT 300M0200-07415ISOLATOR FEOL SMALL RF 300MM0200-07417陶瓷盘0200-07418 REV02SPACER PIN,EDGE RING,SICONI 300MM0200-07442INSULATOR, 300MM SOURCE ADAPTOR,CERAMIC0200-07443RING COVER 300MM B101(CERAMIC) TiN HEATER IMP0200-07448HOUSING,DOUBLE RF CONN,300MM SIP ENCOR0200-07474LIFT PIN CERAMIC NOTCHED0200-07492AL dep ring0200-07496-03COVER PLATE CHILLER SICONI PRECLEAN 300MM0200-07514氧化铝环0200-07582氧化铝环0200-07782陶瓷块0200-07884 REV04INSULATOR,1.480",300MM SOURCE,SHIELD,RF PVD0200-07974Weight0200-07974pin weight0200-08020PIN0200-08090Top Liner APEX CIP0200-08200陶瓷环0200-08334陶瓷环0200-08334lift hoop for Fix lift pin0200-08347BLADE 300MM PRODUCER GT0200-08585Hub Center Dual Gas Side Feed 300MM DPS 320200-09027陶瓷环0200-09035/PIN,WAFERLIFT 6陶瓷异形件0200-09071(改）LIFTING PIN 200MM0200-09072氧化铝环0200-09072陶瓷环0200-09095cover ring0200-09096capture ring0200-09104Liner Ceramic APF Bottom Middle Left0200-09105Liner Ceramic APF Bottom Middle Right0200-09145bland lid0200-092246寸陶瓷环0200-09384/PIN,WAFER LIFT 150MM,UNIVER陶瓷异形件0200-09641Weight Lift Pin 300mm WC Heater0200-09716PIN,LIFT,HEATER,WXZ0200-09735 REV BCOVER，CLAMPING RING，150MM CERAMIC0200-09757RING，CLAMP，CER，FLAT，FINGER，AL，150MM，95H0200-09759 REV02SHIELD，150MM PEDESTAL，AL，FINGER0200-09933PIN WAFER LIFT HEATER0200-10144ISOLATOR PUMPING PLATE DXZ GECO0200-10157LINER,JUNCTION.SIN,DXZ GECO0200-10160 REV002LINER CERAMIC,SiN DXZ,GECO0200-10164 REV ASHIELD PUMPING INSERT,SiN,DXZ0200-10169PLATE,EDGE COVER,DXZ GECO0200-10193陶瓷压环0200-10195 REV.A陶瓷环0200-10263 REV003WASHER,INSULATING,CERAMIC0200-10284-001PIN LIFT HEATER DxZ0200-10324氧化铝异形件0200-10324DOME,E-DTCU, DPS plus0200-10377-003RING,SINGLE 195MM SEMI NOTCH CERAMIC,DPS CHAMBER0200-10650P2 Cover,ceramic,pumping channel0200-10861 REV 02SINGLE GAS FEED, 300MM, ADPNA01 HD0200-10960Insulator0200-10961Top liner0200-11027CHILLER PLATE 2XP,COOLING PEDESTAL,SI0200-12581-02RING,ISOLATOR SOURCE ADAPTOR，SELF-A0200-14255陶瓷环0200-14283 REV05KEEPER,NOTCHED LIFT PIN, PECVD,300MM0200-14576PIN,LOCKING,SHADOW RING INSERT0200-14770SHIELD,tool,ISOLATOR,SR,PRODUCER G-GT0200-14851ISOLATOR, PPM, AL-OXIDE, LARGE ELECTRODE, PRODUCER G-GT0200-15179ISOLATOR, PPM, AL-OXIDE, LARGE ELECTRODE, SR, PRODUCER G-GT0200-15205陶瓷环0200-15404Dep Ring0200-17144BLADE 300MM PRODUCER0200-17674Lift pin weigh0200-18053陶瓷PIN针0200-18062氧化铝DOME0200-18062DOME, 14 ID HDPCVD,REV 30200-18081氧化铝环0200-18090 Rev。002 301-464-047陶瓷DOME0200-18093ULTIMA HDP Side nozzle0200-18095 REV002COLLAR MIN. CONTACT 200mm SNNT HDP-CVD,ULTIMA0200-18100 REV004LIFT PIN CERAMIC 300MM,HDPCVD0200-18109陶瓷环0200-18109-SCOLLAR 200MM SNNF SML FLT UL TIMA HDPCVD0200-18880Bottom Purgebaffle0200-19648 REV03陶瓷环0200-19783Outer pumping plate CIP kits0200-19793Inner pumping plate CIP kits0200-20169INSULATOR COIL SUPPORT RIGID0200-20170CAP COIL SUPPORT RIGID,IN0200-20175LABYRINTH,RIGID COIL SUPPORT0200-20210-001COVER DOUBLE RF CONNECTOR VECTRA-IMP0200-20215HOUSING,DOUBLE RF CONNECTOR0200-20216PIN COVER RF SCREW VECTRA IMP0200-20217LABYRINTH FEEDTHRU COLL SUPORT VECTRA-IMP0200-20217LABYRINTH0200-20285COVER 8"PEDESTAL,B101 HTR
CERAMIC,VECTRA-IMP0200-20315-01陶瓷环0200-20331COVER RING 8"B101 PROCESSES
10.75" OD0200-20440Rest Button Short 300MM VECTRA IMP0200-20441CERAMIC,SUPPORT CENTER,PEDESTAL,300MM0200-20492氧化铝环0200-20492INSULATOR RECEPTACLE RIGID SUPPORT VECTRA-IMP ICE0200-20494异形件0200-20521盘0200-21232 REV04陶瓷环0200-21960Radiation Shield0200-21986/0200-14280Lift pin side(长）0200-21987/0200-14281Lift pin side(短）0200-22484Weight0200-22733绝缘子0200-24876LIFT PIN0200-25007AMAT Blue Rock Heater Isolator0200-25993 REV02CHILLER PLATE 1XP,COOLING PEDESTAL,SICONI0200-27287lift pin0200-28141PING0200-28165绝缘子0200-29077pin guide0200-33649指顶环0200-35084DOME UP ATM,OM-1000200-35287腔体密封环0200-35290氧化铝异形件0200-35291氧化铝异形件0200-35295陶瓷异形件0200-35296陶瓷异形件0200-35323RING CAPTURE CERAMIC MODIFY0200-35334（原产料号材料为石英）陶瓷圆片0200-35525CERAMIC RESISTOR NEAR NET SHAPED0200-35611SCREW LID LINERT X Z0200-35842Pumping ring,ceramic,C shaped mid p0200-35843Pumping ring,ceramic,top piece0200-35956DOME,CERAMIC 2.75 DIA WINDOW DPS CHAMBER0200-35957ceramic dome window0200-361050环0200-36373氧化铝异形件0200-36399SHIELD TOP CERAMIC TXZ 300MM0200-36415Pumping ring,ceramic,C-SHAPE0200-36416pumping ring0200-36417Pumping ring CERAMIC TOP0200-36418COVER CERAMIC PUMPING CHANNEL0200-36649PLATE FINGER LIFT RING 200MM PRODUCER0200-36666氧化铝异形件0200-39133氧化铝异形件0200-39135陶瓷异形件0200-39137DOME CERAMIC，DPS CHAMBER0200-39140陶瓷focus ring0200-39152-001陶瓷环single ring0200-39274Pumping ring,ceramic,bottom piece0200-39296陶瓷异形件0200-39324INSERT RING CHAMBER CERAMIC DxZ0200-39361ISOLATOR SILANE PUMPING RING PRODUCER 200MM0200-40126 REV P5HDP HP robot blade0200-40156氧化铝棒0200-72942SPACER INSULATOR 2FFT 55KI0200-76050COVER 300MM PEDESTAL B101 HTR IMP0200-76057RING COVER 300MM B101(CERAMIC) TiN HEATER IMP0200－18109collar0200－20495氧化铝管0209-36666RING0246-01192Lift pin03000-0280-001夹持式手指固定端04-387121-00陶瓷板04-718676-01陶瓷环062-00002-00陶瓷加热器支架062-00002-00STANDOFF,HEATER062-00005-00陶瓷衬套0992-60530陶瓷棒1000025723陶瓷盘1000318646shincron SLS 27-b1000363-001F中部绝缘子1000369-001支撑板1000400-001F顶部绝缘子11000400-002F顶部绝缘子21000400-003F顶部绝缘子31000400-004F顶部绝缘子41000400-005F顶部绝缘子51000400-006F顶部绝缘子61000400-007F顶部绝缘子71000400-008F顶部绝缘子81000400-009F顶部绝缘子91000400-010F顶部绝缘子101000400-011F顶部绝缘子111000400-012F顶部绝缘子121000400-013F顶部绝缘子131000400-014F顶部绝缘子141000400-015F顶部绝缘子151000400-016F顶部绝缘子1610010-018348ARobotUpper Fork装配体1001123-001E底块套管1001298-001陶瓷定位块1001298-001F陶瓷定位块1001412-001炉丝引线陶瓷固定块1001414-001底部绝缘子1
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