Ceramic and high-purity alumina parts for process chambers — page 5
Page 5 of 8 in the Lubanix Semiconductor Ceramic & High-Purity Alumina Parts catalog, part numbers 16330S-09011 to 625-01490-000. Request a quote from
Related search terms
semiconductor ceramic parts · high-purity alumina · aluminum nitride · ceramic nozzle · insulator
Part numbers
16330S-09011陶瓷压条（长）170022940INSULATOR STANDOFF170036500SLEEVE RETAINER GAS LINE170159708INSUL ELECTRODE STANDOFF170162592INSUL ELECTRODE STANDOFF170163511绝缘子170164535INSUL PEPELLER LARGER POCKET170172950陶瓷手臂170174315-AEND EFFECTOR ARM ROBOT REDUCED AREA VESPEL INSERT17032830绝缘子1708680绝缘子17121850REPRLLER INSULATOR17121850-COAREPELLER INSULATOR 711617124410SPACER RETAIN.ROD17147310INSULATOR STANDOFF17287870INSULATOR
CATHODE PLT1744570INSULATOR1744690WSHR INSUL17B7767陶瓷柱17B7966绝缘子17J4307A1INSULATE BUSH17J4314INSULATOR (1)17J4315FlLLAMENT INSULATOR17J4318INSULATOR (2)17J6897INSULATOR17J9645INSULATOR,17J9645,SEN17K8846INSULATOR,17K8846,SEN17L3572INSULATOR17L4391INSULATOR CERAMIC17L4469insulator17L4677INSULATE COVER17L5130AINSULATOR17L7613Insulator, PFG17L9140INSULATOR17M3916INSULATOR17M5864INSULATE PLATE17M7000INSULATOR17M9484AINSULATE BLOCK17P1478INSULATOR,17P1478,SEN17P2451AINSULATOR17P9113INSULATOR17P9114INSULATOR17P9238INSULATOR17Q7993INSULATOR1805-220098-11RING SHLELD（石英改陶瓷）1810-328070-12ring.bellows kc-145183-016-0001陶瓷块189386ICP CERAMIC CHAMBER1A10-370762-11PLATE,COVER CERA(21)-SP2-2R..D2-G61A10-370763-11PLATE,COVER CERA(22)-SP2-2R..D2-G61A10-372060-12PLATE,COVER CERA(1-2)-SP2-R..D2-G81A10-372061-12PLATE,COVER CERA(2)-SP2-R..D2-G81A10-372062-12PLATE,COVER CERA(3)-SP2-R..D2-G81A10-372063-12PLATE,COVER CERA(4-1)-SP2-R..D2-G81A10-372064-12PLATE,COVER CERA(5-1)-SP2-R..D2-G81A10-372065-12PLATE,COVER CERA(6)-SP2-R..D2-G81A10-372066-12PLATE,COVER CERA(7)-SP2-R..D2-G81A10-372067-12PLATE,COVER CERA(8)-SP2-R..D2-G81A10-372068-12PLATE,COVER CERA(9)-SP2-R..D2-G81A10-372069-12PLATE,COVER CERA(10)-SP2-R..D2-G81A10-372070-12PLATE,COVER CERA(11)-SP2-R..D2-G81A10-372071-12PLATE,COVER CERA(12)-SP2-R..D2-G81A10-372072-12PLATE,COVER CERA(13)-SP2-R..D2-G81A10-372073-12PLATE,COVER CERA(14)-SP2-R..D2-G81A10-372074-12PLATE,COVER CERA(15-1)-SP2-R..D2-G81A10-372075-12PLATE,COVER CERA(16-1)-SP2-R..D2-G81A10-372076-12PLATE,COVER CERA(17-1)-SP2-R..D2-G81A10-372077-12PLATE,COVER CERA(18-1)-SP2-R..D2-G81A10-372078-12PLATE,COVER CERA(19)-SP2-R..D2-G81A10-372079-12PLATE,COVER CERA(20-1)-SP2-R..D2-G81D10-309946-12聚焦环1D10-404153-11SLEEVE B31D80-001885-12TEL FORK2-A105陶瓷衬管2-F3-83246陶瓷手臂2-J3-33094陶瓷手臂2.8.P1069-043004环形槽陶瓷钵2018-0323-PINCETTE-N陶瓷手臂20230220001pin2023736RING2023736WEP RING 196-2 200.CO2023Y8-001-0702绝缘伞202PA0006A机械手臂2033161WEP RING 198-2 200.C02043002陶瓷环2053885EDGE EXCLUSION RING 144.6-150.CRT G722056622小环2060985PLATEN TOP SHIELD 200 TD-ESC2061727卡扣2063370ASSY. BRACED DSI ASSEMBLED JACKET/JAR2069049PM-WEP RING 197-2 200.CR E2070209大环208008中环21-106322-00陶瓷垫片2180-020731-11手臂2180-020732-11手臂2180-020737-11手臂220105129十字绝缘片220105131左侧绝缘片220105132高压绝缘220105132开口绝缘片2334596-00 REV04SPOOL/DETENT:610NM-DB(TREBOR)2362141-00ROBOT,SANKYO EE F,SPECTRA FOUP23955386arm手臂23MFR-01445GX340-002 CERAMIC CHUCK25-11101-1ATRUCK BASE25-12301-0ATRUCK SEALING PLATE28-0079SUBSTRATES,CERAMIC2910-311984-11手臂2990796陶瓷管2N-FN0055710Finger COMP2N-FN0055710Finger COMP-垫片2N-FN0055810Vacuum Finger2PPRTC63190 339830陶瓷手臂3-A105陶瓷衬管30-600-2P1-001300mm 加热型静电卡盘300-2620-04 REV FWafer Chuck,F170300-2772-02 REV DWafer Chuck,F60-c,Up to 200mm Wafer300-2773-04 REV CEnd Effector,Automated Systems,Up to 200mm Wafer300000290896绝缘垫片300000328442陶瓷销300000328462对中cover ring pin300000332683聚焦电极支撑绝缘块315006陶瓷异形件315022陶瓷异形件315024陶瓷异形件315025陶瓷异形件315026陶瓷异形件315028陶瓷异形件3155-141386-0401吸盘32008133C陶瓷手臂3240202001MAHA SP/CERAMIC INSULATOR3240202701MAHA SP/CERAMIC GAS INSULATOR3241200220INSULATOR RING371000071081-4陶瓷夹片3810-426623-11PIN3M10-254112-21OUTER RING D320T13M10-255286-21RING,STAGE OUTER ADD73M10-307933-21RING STAGE OUTER4002557氧化铝长条4002558氧化铝长条4110089485010DTL:SPOOL 18" ICP SOURCE42S0655R3050-8320 CERAMIC BUSH440000103195倒角机吸盘450-000244-000 P02陶瓷片叉(PEEK触点)for MR124450-000973-000 P01一体式Y型吸附式片叉4585335氧化铝棒4585347氧化铝棒4585358氧化铝块/片4585364氧化铝块/片469431手臂5-3-1晶圆吸盘手指（长）5000024陶瓷柱5000103-997隔热件5000132-COAinsulator ceramic50010231220210611 clamp ring500102314环5002280STANDOFF CERAMIC 1/2IN X 2IN ROUND5080-004781-13FORK(300)523890007氧化铝异形件560-01109220 Robot Arm560-0110（CDSEM9220）Blade569-2657陶瓷手臂57-2-1-71陶瓷管57-2-1-72陶瓷管60158091陶瓷手臂61240729615-00427-022-P01LIFT PIN,1.8MM615-00427-031-P01LIFT PIN 2.0MM FLAT END,CERAMIC620T0072-03手臂625-00001-000 P01RING INSULATION625-00024-226-PA1FOCUS RING,,THK 4MM, JR ESC,ICP200E625-00024-230-P02FOCUS RING,THK 2.7MM, W/WPR625-00024-242-P01COVER RING625-00024-406-P02FOCUS RING625-00024-411-P01FOCUS RING,1.5MM 2.7MM,195CB,TSV200E625-00024-412-P01COVER RING,THK6.7,ID197MM,SLOP 15, TSV200E625-00024-450COVER RING625-00117-008-P01RING,COVER,W/SIDE,TSV200625-00117-401-P02RING, COVER OL WITH FR, TSV625-00253-000-P01DOME,300mm, Phase Ⅱ，HARD625-00359-105-P01INSERT RING L SHARP, THK 8.92625-00423-000-P01INSULATION RING LOW CATHODE,TSV625-00423-000-P02INSULATION RING LOW CATHODE,SSC-L625-00423-002625-00427-010-P01CERAMIC LIFT-PIN625-00427-017-P01CERAMIC LIFT-PIN,1.9MM625-00444-126-P01INSULATION RING TOP,THK6.32,RBP625-00444-368-P01BASE,INSULATION RING, TOP THK6.32, OD390, FOR HEATER625-00488-012Ceramic Window625-00850-001-P01CERAMIC END EFFECTOR MAG8Q, ES TM625-00869-000-P02CLAMP RING,COOLED625-00886-000绝缘结构件625-00887-000绝缘结构件625-00889-000绝缘结构件625-01071-000-P01WAFER SUPPORT FINGER,CERAMIC625-01195-000-P03NOZZLE, LINER, SSC ICP625-01488-000绝缘结构件625-01489-000绝缘结构件625-01490-000绝缘结构件
1,430 parts currently match this page.
Search the full catalogSubmit an inquiry
Brand and model names are used only to describe compatibility and search context. Confirm final specifications against OEM documentation, a physical sample or an approved drawing.