Ceramic and high-purity alumina parts for process chambers — page 7
Page 7 of 8 in the Lubanix Semiconductor Ceramic & High-Purity Alumina Parts catalog, part numbers E17036030 to VC7200-005. Request a quote from Lubanix.
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semiconductor ceramic parts · high-purity alumina · aluminum nitride · ceramic nozzle · insulator
Part numbers
E1703603060KV MIRROR INSUALTORE17042000INSULATOR,FILAMENT,PLASMA FLOOD GUNE17063980SCREW,LAMP,INSULATOR, DUAL VAPE17091851INSULATOR 60KVE17092410INSULATOR，FILAMENT POST BERNAS SOURCEE17094620BUSHING,BURNTHRU SENSORE17125680-revCINSULATORE17211650RETAINER,FILAMENT,EXT HI TEMPE17270580 REV AINSULATOR,FILAMENT,PLASMA FOOD GUNE17270580 REV EINSULATOR,FILAMENT,PLASMA FOOD GUNE17275670Cathode feedthru insulatorE17275900INSULATOR,20KV,D2 ASSYE17276700INSULATOR,LONG 20 Kv,D2 ASSYE17280850INSULATOR,SUPPRESSION ASSYE17286910KEY,RETAINING(陶瓷)E17296000INSULATOR,CATHODE FEEDTHRUE17296280陶瓷座E17296280INSULATOR,DUAL MOUNTE17322160STANDOFF
CERAMIC,GRAPHTEE17329300INSULATOR 40KVE17358690INSULTOR SUPPRESSION/GND MULTI STEPE17406960INSULATOR,VER 2 SUPPERSSION ASSYE17463440ISOLATOR，CUP,HV VPSE17540540VIISTA PFG FILAMENT INSULATORE17540540RevGINSULATOR FILAMENTE17708400SCREW,4-40 X .I ALUMINAE59000002PFG staff insulatorE59000003STANDOFF,CERAMIC,3/8EC20230505-026A基板EC20230505-052B基板EC20230505-065A基板EE-05943-O-CInsulating PipeEE-05944-1-CShield ringEE-18683Connector Spacer LEE050200ACeramic BoltF01-01-50B陶瓷手指F1006陶瓷盘F88012 CG01428陶瓷手臂F9826001RevBCERAMIC INSUL SUPPESSION ELECT ASSYFFY01106000010202泵筒FHEB-910013-1陶瓷真空吸盘FHEB-910013-1
11H525M真空吸盘装配图FHEB-910013-111H525M真空吸盘装配图FINA-IC8CVA-TQC-01-01手指FINA-ICCCB-HD-01-01Y型陶瓷夹持手指A(左)FINA-ICCCB-HD-01-02Y型陶瓷夹持手指B(右)FINA-YC68VA-HD-01吸附式Y型6&8寸兼容陶瓷高温下手指FINA-YC68VA-HD-01-LW吸附式Y型6&8寸兼容陶瓷高温下手指FINA-YC68VA-HU-01吸附式Y型6&8寸兼容陶瓷高温上手指FINA-YC68VA-HU-01-LW吸附式Y型6&8寸兼容陶瓷高温上手指FINA-YC6VB-CU-01-01陶瓷手指FINA-YC8CFA-CC-01-01手指FINA-YCCCA-CC-03-01手指FINA-YCCCA-HD-02-01Y型陶瓷手指--改制2FINA-YCCCA-HU-01-01Y型陶瓷手指--改制2FINA-YCCFB-CC-01-01手指FINA-YCCFB-CC-01-A01手指FINA-YCCFE-CC-01-01摩擦式Y型12寸陶瓷手指FINA-YCTFA-TD-01-01-8寸石墨托盘手指FY-1812-XF-20011TC陶瓷手臂250FY-1912-XF-25011TC4寸陶瓷手臂222FY-2103-XF-19051TC9380-robot ARMG04.01317陶瓷管G04.01318陶瓷管G17646810INSULATOR OVAL,PFGH9L126TubeHG P/N: S0930034, 原厂P/N: 3ME-400272-2陶瓷件HG P/N: S0930075, 原厂P/N: 3ME-400273-3陶瓷件HG5140-04-02-174&5&6&8寸台盘HOB003陶瓷杆HS2490-270-22BInsulation seat(1)HS2490-270-23BInsulation seat(2)HS2490-270-24BHolder Bush(2)HS3694-569-01BSubstrate holder(1) 基板压条（1）HS3694-569-02BSubstrate holder(2) 基板压条（2）HS3694-569-03BSubstrate holder(3) 基板压条（3）HS3694-569-04ASubstrate holder(4) 基板压条（4）HS3694-569-05BSubstrate holder(5) 基板压条（5）HS5138-116-48AUBK01-051-01先端SHIELD(8)HS5138-116-49AUBK01-052-01先端SHIELD(9)HS5138-116-57AUBK01-060-01先端SHIELD(17)HS5138-116-58AUBK01-061-01先端SHIELD(18)HS5138-116-59AUBK01-062-01先端SHIELD(19)HS5138-116-60BUBK01-063-01先端SHIELD(20)HW-LS-1856陶瓷圆形扣ICP2022-B-下电极绝缘环下电极绝缘环ICP2022-B-下电极馈入绝缘件下电极馈入绝缘件ICP2022-B-加热电极陶瓷管加热电极陶瓷管ICP2023-B-下电极支撑下电极陶瓷支撑柱ICS-2469084-033120-001陶瓷环ID10-304010-12陶瓷环IPS1000-02.04上电极护套IPS1000-04.02上电极绝缘板IPS1000-04.04下电极绝缘底座IPS1000-04.05上电极馈入绝缘件IPS1000-04.06下电极绝缘件IPS1000-04.07下电极绝缘护套IPS1000-04.07（改）下电极绝缘护套（改）IPS800-04.07下电极绝缘护套JB16033102陶瓷测量台JH-YCL-93060454接地绝缘块1JH-YCL-93060455接地绝缘块2JH-YCL-JH-SZC21111601-AO陶瓷吸盘JH01-02.04上电极护套JH01-04.02上电极绝缘板JH01-04.04下电极绝缘底座JH01-04.05上电极馈入绝缘件JH01-04.06下电极馈入绝缘件JH01-04.07下电极绝缘护套KLA-74370-1氧化铝圆盘KTL.TC.01陶瓷管KTL.TC.02陶瓷坩埚L.C.01陶瓷板1L.C.02陶瓷推杆L.C.02.001陶瓷板1L.C.02.002陶瓷推杆L.C.02.003闸门板L.C.02.004陶瓷板2L.C.03闸门板1L.C.03.002陶瓷盖板L.C.03.003陶瓷管2L.C.03.003(改）陶瓷管2L.C.03.004陶瓷支撑板1L.C.03.005陶瓷支撑板2L.C.03.006陶瓷杆L.C.04陶瓷板2L.C.04闸门板2L.C.05陶瓷板2L.C.05固定销L.C.06固定销LDP2303-01-03-03-10陶瓷圈1LDP2303-01-03-03-11陶瓷圈2LSSZJC2301-06A夹持手指LSSZXF-38C01A陶瓷手指LT10.TC.02陶瓷杆LT10.TCT.01陶瓷托M00003990SURROUND,ESC,150MM w/47.5mmM00008161CREAMIC LID LINER,CHAMFEREDM00008981SLEEVE,GAS ANNULUS,ICP SOURCM01.1.2.1-14螺钉M01.1.2.1-8观察挡板2M90-160903-00-A陶瓷管MP-156-1INTERPRET DRAMIME CDRDAMDEH ASME4.5M-1994MSP6JR-1-2MSP压盘MSP6JR-1-3aMSP舟MX3024900E1陶瓷手臂NC10-400785-11陶瓷管NID-84060陶瓷腔NIS175A-1-004InsulatorNIS175A-1-005NutNIS175A-1-006BracketNIS175A-1-019InsulatorNIS175A-2-004绝缘衬套NIS175A-2-008InsulatorNIS175A-3-004PipeNIS175A-3-005RodNIS175A-4-005珠形绝缘子NIS175M-2-008InsulatorNIS240S2-1-006BracketNIS240S2-3-004PipeNIS240S2-3-005RodNSZZ-550000236-01Clamp ring-Pre CleanNSZZ-550000246-01(Skysemi)Lift Pin V2,AlN ChamberP/NJS-02陶瓷环QH-3662-1陶瓷半环QT02325.03陶瓷组件R21204561-B01陶瓷托盘R2VAL7023 007 1500A炉管测温管RD-2000-P61V1.0YY轴气浮载台1RD-2000-P61V1.0YY轴气浮底S.M BAF28-02陶瓷环S0930111氧化铝异形件 手臂S09J0009INSULATORS90J1687FEEDTHRU,HIGH VOLTAGESERVICE.502.28583手臂SL-QP2-01-003-04A陶瓷环（0的 376MM)SM00723滚轮导向筒SOK-46679陶瓷柱SOK11-0038绝缘子SOK30-2015绝缘子SOK30-2050NozzleSOK30-2096ELECTRODE SPACER(B) 大SOK30-2097INSULATOR 小SOK30-2124Insulating Ring(sub arc)SOK30-2125Insulating RingSOK30-2132Cover(4)(sub arc)SOK40-2033Gas nozzle 999SOKS03-2045Conductor insulator R2SP00253ARINGSP11000004/6寸陶瓷手指SY01-0609A-JY005陶瓷圈T295N3.0斜槽板295（三槽）T295X陶瓷板TCG-L20X20X67陶瓷杆TCG-L20X20X96陶瓷杆TF-012-M3403-1808-002φ369.52*5.8陶瓷环TLYG-2016038陶瓷环（三角）UJ800.05.09.02.01.01-2-A气浮陶瓷导轨VC7200-004CERAMIC CHIP ELLIPSEVC7200-005CERAMIC CHIP
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