RIM Spare Parts

AMAT 0200-36418

PUMPING CHANNELCOVER

Part details

Part number	0200-36418
Description	PUMPING CHANNELCOVER
OEM / brand	AMAT
Category	RIM Spare Parts

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Nearby part numbers

0200-35702EDGE RING 0200-35785RING CERAMIC WAFER LIFT 0200-35842C-RING 0200-35843TOP CERAMIC LINER 0200-36105CHAMBER INSERT 0200-36373LIFT PIN 149 DIA TRIANGLE 0200-36524LID. LINER 0200-36609LID ISOLATOR 0200-36649PLATE FINGER,LIFT RING 0200-36666ISOLATOR 0200-36686SINGLE RING 0200-39140RING FOCUS 195MM SNNF 1" DPS

Confirm specifications against the OEM datasheet, physical sample or approved drawing. Contact Lubanix with the tool platform, quantity and requested delivery date.