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RIM Spare Parts

AMAT 0200-36609

LID ISOLATOR

Part details

Part number0200-36609
DescriptionLID ISOLATOR
OEM / brandAMAT
CategoryRIM Spare Parts
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Nearby part numbers

0200-35842C-RING0200-35843TOP CERAMIC LINER0200-36105CHAMBER INSERT0200-36373LIFT PIN 149 DIA TRIANGLE0200-36415PUMPING RING C-SHAPE0200-36417PUMPING RING TOP0200-36649PLATE FINGER,LIFT RING0200-36666ISOLATOR0200-36686SINGLE RING0200-39140RING FOCUS 195MM SNNF 1" DPS0200-39141FOCUS RING DPS0200-39143RING FOCUS 145MM JEIDA M/F CERAMIC

Confirm specifications against the OEM datasheet, physical sample or approved drawing. Contact Lubanix with the tool platform, quantity and requested delivery date.