AMAT 0200-39141
FOCUS RING DPS
Part details
| Part number | 0200-39141 |
|---|---|
| Description | FOCUS RING DPS |
| OEM / brand | AMAT |
| Category | RIM Spare Parts |
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Nearby part numbers
0200-36417PUMPING RING TOP0200-36418PUMPING CHANNELCOVER0200-36524LID. LINER0200-36609LID ISOLATOR0200-36649PLATE FINGER,LIFT RING0200-36666ISOLATOR0200-39143RING FOCUS 145MM JEIDA M/F CERAMIC0200-39274BOTTOM LINER0200-39289PUMPING LINER0200-39324CHAMBER INSERT0200-39361ISOLATOR PUMPING RING0200-40156LIFT PIN CERAMIC LONGConfirm specifications against the OEM datasheet, physical sample or approved drawing. Contact Lubanix with the tool platform, quantity and requested delivery date.