Electrostatic chucks (ESC) and related heater assemblies
An ESC is not a commodity clamp. Clamping force, temperature zones, backside-helium sealing and connector interface all have to line up with the tool platform. Wrong fit shows up as helium leak alarms, temperature non-uniformity, or wafer handling faults — so part-number discipline matters.
Lubanix lists electrostatic chucks and closely related heater / ESC assemblies in the catalog, including entries for Applied Materials and Tokyo Electron platforms among others. New OEM and refurbished options appear where the catalog marks them; any domestic alternative is identified only after a fit review.
Typical reasons teams inquire
- Helium leak or backside cooling issues tied to ESC / seal stack wear
- Temperature uniformity drift on multi-zone heaters
- Planned ESC replacement during major PM or chamber requalification
What we need from you
OEM P/N · equipment model · wafer size · connector / lift-pin notes if known · photo or drawing · quantity · planning date.
We will confirm whether the line item is OEM new, refurbished, or a candidate for alternative supply before quotation. No inventory counts or guaranteed lead times are published here.
Related
Contact
Send the ESC P/N to sales@lubanix.com or search the ESC listings below.
Related search terms
electrostatic chuck · semiconductor ESC · wafer chuck · ESC replacement
Featured part numbers
28 parts currently match this page.
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Brand and model names are used only to describe compatibility and search context. Confirm final specifications against OEM documentation, a physical sample or an approved drawing.