Quartz parts for semiconductor process chambers
High-purity quartz tubes, rings, liners and chamber components. Search by part number or send a drawing for etch, deposition and clean-tool replacements.
Related search terms
semiconductor quartz parts · quartz tube · quartz ring · process chamber component
Part numbers
000.89.00.0102寸氮化铝陶瓷分半加热盘000.89.00.0304寸氮化铝陶瓷加热盘000.89.00.0404寸氮化铝陶瓷加热盘0010-63224ceramic heater0015-01297FEEDTHROUGH GII, 30KV0020-46871PLATE,KEYED CONNECTOR-4PIN0020-70473HOLDER LIFT PIN 300MM ULTIMAX0020-87572SHIELD,FEEDTHROUGH-4 PIN0021-25389铁氟龙块0021-32986SCREW, BLOCKER, AL, 8-32 X 7/8L,VENT, SA 300MM PROD0040-21178Belljar0040-21178（维修）Preclean II Bell Jar0040-33701Heater Block,Ultima HDPCVD0040-41964AMAT Top Coil 300mm ultima Plus0040-55456BELLJAR0040-55456-11-662\\2816-0296BELLJAR0041-12083（组合件)finger wafer centering0195-13439组合阀0200-00218石英盘0200-00218（改）Plate 8" Blocked, ECWXZ0200-00834陶瓷手臂0200-00991CERAMIC BLADE 300MM0200-01195WINDOW, IEP 300MM DPS20200-01820（001）INSERT RING0200-01903-06-777石英圆盘带侧孔0200-01942蓝宝石棒0200-02187NOZZLE ALN,2.281X 014DIA 95%0200-02262陶瓷异性件0200-03455Quartz Ring0200-03456-002-777石英圆盘0200-03555INNER RING SI0200-04294Top Nozzle0200-04977陶瓷件0200-05081NOZZLE ALN,1.76LX 014DIA 100%0200-05082NOZZLE ALN,1.76LX 014DIA 99%0200-05083NOZZLE ALN,1.76LX 014DIA 97%0200-05085NOZZLE ALN,1.76LX 014DIA 103%0200-05086-002NOZZLE ALN 1.76 X
020DIA 100%FLOW HDPCVD0200-05112NOZZLE, ALN, 2.28L X .014DIA, 100 % FLOW0200-05113NOZZLE ALN,2.28LX 014DIA 99%0200-05114NOZZLE ALN,2.28LX 014DIA 97%0200-05115NOZZLE ALN,2.28LX 014DIA 101%0200-05116NOZZLE ALN,2.28LX 014DIA 103%0200-05179NOZZLE ALN,1.76LX 014DIA 105%0200-05188NOZZLE ALN,2.28LX 014DIA 105%0200-05537Cooling Baffle Gas Feed Block Top0200-05704-002UPI NOZZLE ALN 1.76 X
014DIA 100%FLOW HDPCVD0200-05811notched sapphire lift pin dpn+0200-059120200-05915NOZZLE0200-05915NOZZLE ALN 2.28LX .014DIA97%FILOW-N.IPM0200-05916NOZZLE, ALN, 1.76L X .014DIA, 103% FLOW0200-06044NOZZLE0200-06044NOZZLE ALN 2.28LX .014DIA95%FILOW-N.IPM0200-06049LIFT PIN,SAPPHIRE,HD 300MM DPN0200-06112BLADE 300MM0200-06355 REV07BLADE CERAMIC OPENPOCKT0200-06592UPI PLUS NOZZLE,ALN,1.76L X0200-06595BAFFLE,ALN PI,IPM,2.47OD*1.14L,
8*0.100CLN,8*0.60INJ0200-06615-07Window0200-06708-01UPI PLUS ALN 1.76 X
014DIA 95%FLOW HDPCVD0200-06937Shadow Ring 0.8/0.8mm EC WC0200-07241AIN, Lock Pin. WC.Heater0200-07449INSULATOR BUSHING RIGID COIL SUPPORT ALUMINUM NITRIDE0200-07767Pillow Block WC Heater0200-07810CERAMIC BLADE, EDGE CONTACT, 300MM PRODUCER SE0200-08346BLADE 300MM0200-08347BLADE 300MM PRODUCER GT0200-09118Shadow Ring 0.6MM EE,.062 DP SLOT, LP WC,OFF0200-09657ENDPOINT QUARTZ RECESS WINDOW0200-09664WINDOW SLIT AL2O30200-09785LIFT PIN COVER0200-09787FOCUS RING0200-09911COVER QUARTZ8"STEPPED0200-17144 REV 02BLADE 300MM PRODUCER0200-19390APF retrofit shadow ring +90C0200-20861UPI ++ NOZZLE, ALN, 1.76L X .014DIA, 99% FLOW, HDPCVD0200-20862UPI ++ NOZZLE, ALN, 1.76L X .014DIA, 98% FLOW, HDPCVD0200-20863UPI ++ NOZZLE, ALN, 1.76L X .014DIA, 97% FLOW, HDPCVD0200-20864UPI++NOZZLE,ALN,1.76L X.014DIA,101%FLOW0200-20865UPI ++ NOZZLE, ALN, 1.76L X .014DIA, 102% FLOW, HDPCVD0200-20866UPI ++ NOZZLE, ALN, 1.76L X .014DIA, 103% FLOW, HDPCVD0200-21163 Rev02edge ring0200-35084DOME UP ATM,OM-1000200-35292WINDOW ,ENDPOINT,DPS MEC0200-35293MANOMETER QZ0200-353340200-35525管形陶瓷无感电阻2MΩ0200-35525管形陶瓷无感电阻900K0200-36034INSULATOR QUARTZ,300MM,SIMPLE CATHODE0200-36629PLATE COVER ALN,DXZ150MM0200-39134WINDOW ENDPOINT OUTER DPS MEC0200-83422O RING0209665-001，0221858-001SP3 End Effector Kit027.30.51.080陶瓷炉盘03-4614-400-1多孔陶瓷真空吸盘035.30.09.0803寸氮化铝炉盘048.30.51.0805寸氮化铝陶瓷炉盘06-2598lift pin07-29-02440石英管07120-0421-001贴膜辊筒0720-91455Connector to AM DRG088767922-000陶瓷管1006677 R01Quartz paddle for for edge pin rot.1010434FOCUS RING, BULKYTTRIA. OD NOTCH1012212 R01Quartzpaddle edge Support 200mm10140-000006石英盖10140-0001169A双区喷嘴-N10140-000416A石英基环_6寸BASE RING10140-000718EQuarts Window10140-001568A石英盘10140-001871A聚焦环10140-200250-001base ring quartz10150-001119APin TC绝缘套2_AN5PM102089739石英环102100680石英环102155746DTL CVR PLT 150mm W/FOC RING 11" GEN410231719215.6in QTZ CVR PT W/Focus1100440INSULATED FEEDTHRU ASSY11817937手臂12001-000104Br机反应腔石英盖-SC132930-P1WINDOW,Zinc Selenide15-032185-00CENTER PIN15-100641-00蓝宝石片15-109921-00COVER,ESC,200MM SEMI,ALN15-110411-00WINDOW15-11263-02蓝宝石片15-127251-01pec15-250453-00蓝宝石圆柱体15-251538-00蓝宝石lift pin15-257351-00PIN,SAPPHIRE,C3VCTR,CAPTURED15-260932-07蓝宝石垫片15-284674-00PIN15-294510-00防腐蚀帽15-315136-00石英棒15-315136-00MCA PIN15-337764-00RING COOLINGANGLED. G1015-354291-00导气杆15-401165-15螺纹金属件15-401165-54螺纹金属件15-401165-55螺纹金属件16-323957B01(60142655)INSULATOR-COVER-LP170154789绝缘子170154790FILAMENT SOURCE170163668绝缘子170163679绝缘子17127830INSULATOR FILAMENT FEEDTHRU17127840INSULATOR1755-1.00(101071718)Grundp latte k17B5813绝缘子17B5815绝缘子17J4303INSULATOR17J4321INSULATOR17J4323ARC CHAMBER INSULATOR17J6643INSULATOR17J6644rear insulator17L0922亚克力板17L9000INSULATOR17L9077COLLAR17L9078COLLAR(2)17M0796INSULATOR17M0797INSULATOR(2)17M3920INSULATOR17M6208ARC CHAMBER INSULATOR17M6209FILAMENT MTGSCREW17M6210INSULATOR17M6497INSULATOR(5)17M6498INSULATOR(6)17P2682CONNECTER17P4540INSULATOR17P4541INSULATOR17P6283ARC CHAMBER INSULATOR17P6551FILAMENT MTG SCREW17P6832INSULATOR17P6833INSULATOR17P8253SIDE INSULATOR(1)17P8254SIDE INSULATOR(2)17Q1829INSULATOR(2)17U1997INSULATOR PLATE17U1998INSULATOR?PLATE17U2001INSULATOR PLATE17U2002INSULATOR PLATE17U2004INSULATOR BUSH17U2014INSULATOR PLATE2003160石英手指20230109001heater底部陶瓷件20230221001Plate20230221002Window20230906OptoSigma吸盘21-100610-00R475.021-114965A95SCREW-HHC-M6 X 30 MM-PRCN CLEAN-A4 SST21-115696A69SCREW-SHC M5 X 16 LG PRCN CLEAN-A4 SST21-115696A94SCREW-SHC-M6 X 25 PRCN CLEAN A4 SST21-115696A97SCREW-SHC-M6 X 50 TITANIUM21-122247A45SCREW-SHC-VENT-M5X16 LG PRCN CLEAN-A422-100613-00石英球22-100613-00PIN BALL22612204006导热片2481180400STDF,FEM,1/2 RND,8-32 X 5/8 L,CERAMIC(setup cup绝缘子)2C7-4513-000石英片
333 parts currently match this page.
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