Quartz parts for semiconductor process chambers — page 2
Page 2 of 2 in the Lubanix Semiconductor Quartz Parts catalog, part numbers 300-2787 to YMTC20230824002. Request a quote from Lubanix.
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semiconductor quartz parts · quartz tube · quartz ring · process chamber component
Part numbers
300-2787Chuck, Wafer, Porous, 150mm300000251476Class viewport300000308001十二寸陶瓷吸盘3300-97236FTG L/THRO ELECT TO AM SPEC3440-01037window sapphire3690-01594HOLDER，PIN，HDP-CVD3690-01693SCR CAP SKT HD 10-32 X 2-3/4L HEX SKT SST,3690-01693,AMAT3690-04657SCR MACH FLT HD 8-32 X 7/8L PHIL VENT 82DEG SST NI37431-551DWG，NAME TCP Window，Quartz Disk;TCP37431-631RING,EDGE,TOP,QTZ,,EBP,300MM37431-632RING,EDGE,BOT,QTZ,200-300MM3810-334619-11底座392171蓝宝石管40-055609-27石英棒45S1050M6X30 SHCS PEEK45S1051M6X40 SHCS PEEK5-29-18-18石英螺旋管5.71.1038732寸多孔陶瓷片5.81.101049多孔陶瓷片5.81.103178常规片chuck底盘5.81.23312多孔陶瓷吸盘25.81.23313多孔陶瓷吸盘15.81.23569多孔介质5.81.23886多孔陶瓷吸盘5007-18.00(101071732)Grundp latte k60038720(0190-45908)瓷球黑60050013(0190-45909)瓷球黄625-00181-000Wafer-AlN625-00624-000 REV P01VR Paddle,12'',Point Support,AB313625-00647-000 P01Dome,Quartz,lid,TALD04625-00648-000 P02Dome diffuser,Quartz,lid,TALD04625-00952-000Pipe , Quartz , Si02 ,RPS ,PRC625-61806-000Side nozzle 100% AIN STI 300mm Phase I Hesper625-61806-093Side nozzle 93% AIN STI 300mm Phase I Hesper625-61806-095Side nozzle 95% AIN STI 300mm Phase I Hesper625-61806-097Side nozzle 97% AIN STI 300mm Phase I Hesper625-61806-099-P01Side nozzle 99% AIN STI 300mm Phase I Hesper625-61806-101Side nozzle 101% AIN STI 300mm Phase I Hesper625-61806-103Side nozzle 103% AIN STI 300mm Phase I Hesper625-61806-105Side nozzle 105% AIN STI 300mm Phase I Hesper625-61806-107Side nozzle 107% AIN STI 300mm Phase I Hesper68002913900 OHM 100W 10% RESISTOR7.61.80706微孔chuck713-037863-001PLUG,ULTEM,FACIL PLT INSLTR716-011009-001Endpoint Quartz716-012639-117716-022495-847Edge ring716-101086-010Lower PEZ Ring (Lam CoronusD)716-101087-004PEZ Ring 296.5716-207828-350TES Lift Pin716-251220-007GDE,LIFT PIN,HI TEMP716-322420 REV04RING716-330355-001Endpoint Quartz Window71A06030000009WINDOW720-090943-010SCREW FLAT734-281860-014O-ring，0.489*0.0776S0024INSULATOR 3X5X5 mg355F76S0026INSULATOR CHBSSM76S0027INSULATOR 10x12x10 MG10121F795-182872-001透镜810-801237-105stepper driver PCB81118177-0陶瓷加热片839-802923-006views port assembly89536CERAMIC LINER SUPPORT 9145AA04-002-074单点吸附PAD固定块(仿友商)AH5.190.01.04.01.02.01.02上治具（国产）AH5.190.03.02.01.02下治具（国产）ALD300B-03-03-01-03晶圆支撑点APSM120000700FEEDTHROUGH RESONATOR RELIABILITYC-1124-053-0101bearing deep grv nc6800c3C-3115-092-0101COLLAR BEARINGC-3115-093-0101COLLAR BEARINGDE-244143BUSH,STOPPER INSULATORDF122010.10.02.07.07Ⅰ条拾取陶瓷台板DGP8761wafer grinding chuckE07011747旋转吸盘主体E07011747-01陶瓷吸盘E07011747-02吸盘底座E17063840DUALVAP LAMP INSULE17134130INSULATOR,SENSOR BURN THRU,FARA SET-UPE17207880source filament insulatorE17208090source repeller insulatorE17208100Nut repeller insulatorE17430650PI薄膜EE-04040-4BInsulation plateEE050190Filament SheathFHEB-910013-1 11H525M真空吸盘FKJS-510001-2DISCO WAFER SPINNER CHUCK TABLE 2 INCHFKJS-510001-2陶瓷盘GFM-A微调上浮盘LC12-A02-001B04吸附盘LC12-A02-011A吸附盘LJST-510055-0陶瓷盘NIE058970FEEDTHROUGHPVT40-25.4OptoSigma吸盘S08J0050CERAMIC STANDOFFS90J1667CERAMIC STAND OFFS90J1679灯丝底环S90J1681FILAMENT INSULATORS90J1682灯丝固定板S90J1740A.C. INSULATORSH099A0228陶瓷帽shaft0311轴SK.2307.21.1.DSYDG短石英杆SK.2307.21.2.CSYG长石英杆SLQKL0400302930灯泡（5263qs3)SOK11-0111绝缘子SOK11-0112绝缘子SOK11-0122绝缘子SOK11-0123绝缘子SOK30-201443 Seal housingSP12000264"托盘支架SP12000276"托盘支架SP12000384"wafer支架SP12000396"wafer支架SP12000408"托盘支架STGWI030080静电消除器(S]-E156L)STGWI200030静电消除器固定零件(OP-87414)STGWI200040电缆 静电消除器缆线(S]-C5U)STGWI200050静电消除器固定零件(OP-87414S)STGWI200060电缆 静电消除器缆线(S]-C5US)STGWI200070静电消除器(SJ-E108L)TMDIA-026树脂修理块UJ800.02.07.01-15_A快门3UJ800.03.09.01.01.07.01.02-1/B线圈骨架W012TK-08-02-03-1112寸ARM吸盘WG12D-09-23ARM2陶瓷吸盘WS7.870.034.V00WS2021002 ZJHCQ绝缘支撑柱XPYT-D-365x40x297研磨陶瓷吸盘XW20221213RTP石英柱Y35201964BURNER LINER 3IN X 6IN(HT)YMTC20230824001陶瓷球YMTC20230824002Insulator
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