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LAM Research Etch Tool Spare Parts

LAM Research Etch Tool Spare Parts

Search LAM Research etch-tool spare parts by OEM part number. Common categories include silicon electrodes, Focus Rings, ceramic insulators, quartz parts and chamber components.

Products and supply scope

The catalog covers silicon electrodes, Focus / Edge / Shield Rings, ceramic and alumina parts, quartz, metal chamber hardware, ESCs, heaters and imported OEM parts. Search 20,171 part numbers by number, description, OEM or equipment.

Typical applications

For preventive maintenance, consumable replacement, discontinued-part lookup and second-source evaluation on LAM etch platforms.

Request a quote or confirm a replacement

Send the OEM part number, equipment brand and model, a part photo or drawing, quantity and requested delivery date. We will review fit, material, interface and availability; any domestic alternative or refurbished condition will be identified before quotation.

Related search terms

LAM Research spare parts · LAM etch parts · LAM Focus Ring · LAM replacement components

Featured part numbers

1805-221439-24电极 · LAM1805-221470-25电极 · LAM1805-221471-24电极 · LAM1805-221471-25电极 · LAM1810-224390-11电极 · LAM1880-026696-11电极 · LAM1880-027152-12电极 · LAM40-055609-26,-27,-28,-30ROD,QUARTZ,4MM · LAM413-330504-082RING FOCUS FLAT 9608 · LAM661-097953-001UV LAMP · LAM713-001585-004GDP CAP SCREW · LAM713-011574-001PLUNGER,WAFER CLAMP · LAM713-011577-001WASHER · LAM713-011585-001COVER,CLAMP BOLT · LAM713-011585-004COVER,CLAMP BOLT · LAM713-011928-001CAP,BOLT,ELECTRODE · LAM713-027299-002SLV,ADPTR,SLIP-ON,SELFCNTR,V PEEK · LAM713-028485-001BOLT,ELECTRODE RING · LAM713-028553-103-REV.COMFINEMENT RING CERAMIC · LAM713-034964-001WSHR,.417IDX1.00ODX.025THK,300MM · LAM713-034964-002WSHR,.417IDX1.00ODX.025THK,301MM · LAM713-034965-001PAD,R,CONF,.010THK.300MM · LAM713-040539-001PED,LNDNG.CONF R,PEEK,F60FLEX,200MM · LAM713-048216-001CLIP,RETAINING.SYM DOOR MNT · LAM

393 parts currently match this page.

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Brand and model names are used only to describe compatibility and search context. Confirm final specifications against OEM documentation, a physical sample or an approved drawing.