LAM Research Etch Tool Spare Parts — page 2
Page 2 of 2 in the Lubanix LAM Research Etch Tool Spare Parts catalog, part numbers 716-081661-867 to T-095510-001 -1. Request a quote from Lubanix.
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LAM Research spare parts · LAM etch parts · LAM Focus Ring · LAM replacement components
Part numbers
716-081661-867FLEX FSE SI HOT EDGE RING · LAM716-081661-885RING,HOT EDGEITER,STRT, 120THK,300MM · LAM716-081665-252B_RING,C-SECTION,TAPER,POLY SI · LAM716-081665-811C-SHROUD RING · LAM716-081665-842RING,C-SECTION,.08 SLOT.POLY SI · LAM716-081665-842RING,C-SECTION,.10 SLOT,POLY SI · LAM716-081665-842C SHROULD · LAM716-081665-846RING,C-SECTION,10SLOT,MAX OPEN · LAM716-081665-861C-SHROUD/ACC · LAM716-081665-861M_C-SECTION,.08 SLOT,POLY SI · LAM716-081665-921RING,C-SECTION,.08 SLOT.POLY SI · LAM716-081665-921C-RING · LAM716-082039-001SI ELECTRODE_CORE_OUTER_ELECTRODE · LAM716-082039-001ELCTD.OUTER.18 STEP.300MM · LAM716-082039-001ELCTD,OUTER,.18 STEP,300MM · LAM716-082039-003ELCTD, OUTER,. 10 STEP, 300MM · LAM716-082039-210ELCTD,OUTER,.13 STER,POLISHED,300MM · LAM716-082039-211ELCT,OUTER,.16 STEP,300MM · LAM716-082039-215FLEX_GX-E OUTER ELECTRODE · LAM716-082039-215ELCTD,OUTER,FLAT,POLISHE · LAM716-082039-215OUTER EDGE Si RING · LAM716-082039-233ELECTD,OUTER,.25 STEP,REC,POL,300MM · LAM716-082039-237ELCTD, OUTER, FLAT, POLISHED, 300MM · LAM716-082039-245FLEX HX OUTER ELECTRODE · LAM716-082039-257外卡环 · LAM716-082039-891ELCTD,OUTER,300MM · LAM716-082039-891ELECTD,OUTER,300MM · LAM716-082039-891OUTER RING · LAM716-082039-892ELECTD,OUTER,300MM · LAM716-082039-892ELCTD,OUTER,300MM. · LAM716-087139-013RING SI COUPLING FLEX-ES ELECTRO · LAM716-087943-801COV,QTZ,INR,5XX,CER,HCK,AG,12.95D · LAM716-087943-8462-PIECE RING_R2_SI · LAM716-087943-8462-PIECE COVER RING_R4 · LAM716-087943-865COV,QTZ,O5X,TES,TALL 14.5D · LAM716-087943-913GX COVER RING · LAM716-087943-913COVER RING-SI · LAM716-087943-913Cover Ring -Poly · LAM716-087945-020COOLED EDGE RING · LAM716-087945-020 REV.BRING,EDGE,5XX,CER,296MM,NP 50D,13.6D · LAM716-087945-04545° COOLED EDGE RING FOR FLEX EX · LAM716-087945-071RING,EDGE,5XX,CER,296MM,NP 45D · LAM716-087945-071 REV.CRING, EDGE 5XX 296MM NP 350 13.6D · LAM716-087945-072COOLED EDGE RING 45˚ · LAM716-087945-077 REV.BSI EDGE RING CER(15D)_FLEX FX · LAM716-087945-254SI EDGE RING 45D_13.3 · LAM716-087945-275 REV.BRING,EDGE,5XX,296MM,NP 350,13.0D · LAM716-087945-475RING,EDGE,SI,CER,2PC · LAM716-087945-849NNYNN 6.86T SI EDGE RING · LAM716-087945-849GXE SI COOL EDGE RING 6.86T · LAM716-087945-853RING,EDGE,5XX,CER,296MM,13.6D · LAM716-087945-863FLEX-GX CER HCR · LAM716-087945-863RING,EDGE,5XX,CER,296MM,13.6D · LAM716-087945-868FLEX GX-CER-HCR (Si) · LAM716-087945-964C_FLEX GX_CER_HCR_SI · LAM716-087945-964RING,EDGE,5XX,CER,296MM,13.6D · LAM716-088516-001RING,CONTROL ,COND,QTZ,NO SLOT ,THIN · LAM716-088516-807Pressure Control Ring for Flex EX+&FX · LAM716-088536-902Outer quartz edge ring · LAM716-089595-020电极 · LAM716-089595-027电极 · LAM716-089595-029CATHODE · LAM716-089596-020CATHODE · LAM716-089596-020-BFLEX EX INNER CEL · LAM716-089596-027Si Upper Electrode 0.16Step · LAM716-089596-027ELCTD,MONO,HP,16 STEP,300MM · LAM716-140068-001RING FOCUS ESC 6" · LAM716-140118-001RING FOCUS ESC 8 · LAM716-140139-001HOT EDGE RING · LAM716-140139-0018" RING · LAM716-140139-008HOT EDGE RING · LAM716-140139-211HOT EDGE RING HIGH WALL · LAM716-140139-2118"HOT EDGE RING · LAM716-140139-213SI FRONT END HOT EDGE · LAM716-140139-3118"HOT EDGE RING · LAM716-140163-001HOT EDGE RING · LAM716-149488-177RING,EDGE,5XX,CER,296MM,NP 45D,13.6D · LAM716-230571-268RING, EDGE, 4-40, 297MM, 15D, 13.76D · LAM716-230577-268FLEX HX NARROW COOL EDGE RING · LAM716-230577-361RING, EDGE, 4-40, 297MM, 14.5D, · LAM716-230577-364H EDGE,Si,RING · LAM716-236357-529MIDDLE EDGE RING · LAM716-250514-001CLAMP SHADOW · LAM716-276851-205RING,EDGE · LAM716-330045-001EDGE RING 9400 · LAM716-330045-004EDGE RING,NOTCHHED · LAM716-330045-281EDGE RING · LAM716-330045-282EDGE RING PTX · LAM716-330045-381R EDGE NON LANDED 8" NOT 96PTX · LAM716-330121-001WINDOW RF SHAPED FIXED GAP · LAM716-330122-002TOP PLATE · LAM716-330131-001TCP CERAMIC DISK · LAM716-330191-082FOCUS RING · LAM716-330504-061FOCUS RING · LAM716-330504-064FOCUS RING · LAM716-330504-082RING FOCUS FLAT 9608 · LAM716-330890-001BOTTOM SHADOW RING · LAM716-330892-005PTX GDP · LAM716-330892-007PTX GDP · LAM716-330892-507PTX GDP · LAM716-330915-001CERAMIC INSERT · LAM716-331051-002BOTTOM SHADOW RING · LAM716-331051-006BOTTOM SHADOW RING · LAM716-440054-108RING FOCUS ADAPTER · LAM716-440241-001RING BOTTOM LWR CHAMBER · LAM716-443086-001RING · LAM716-443086-3018" RING · LAM716-443086-301RING · LAM716-443086-301R,H EDGE,Si,SGL XTAL,H WALL,8" · LAM716-443086-308(U1)SILICON HOT EDGE RING · LAM716-443086-401HPT HOT EDGE RING · LAM716-443086-401R,H EDGE,Si,SGL XTAL,H WALL,8" · LAM716-443086-4018" RING · LAM716-443086-401R,H EDGE,Si,SGL XTAL,H WALL,8 · LAM716-443086-401 REV.BR, H EDGE SI SGL XTAL H WALL 8" · LAM716-443086-405AHPT HOT EDGE RING · LAM716-443086-408HPT EDGE RING(10L) · LAM716-443086-701 REV AHOT EDGE RING · LAM716-443129-001RING FOCUS ESC INNER 8" · LAM716-460216-001FOCUS RING DSQ · LAM716-460785-015电极 · LAM716-460916-001FOCUS RING · LAM716-460916-002FOCUS RING · LAM716-540198-001WINDOW · LAM716-7943-8462-PIECE COVER RING_R4 · LAM716-801306-004WDO,QRTZ,GAS INJ,FIRE POL · LAM716-801568-002WIN, QTZ · LAM718-094523-261ASSY ELCTD ESC 6" M3RFLT · LAM718-094523-281ASSY ELCTD ESC 8" NOTCHED · LAM718-094756-061ELCTD UPR 6" ESC MJR FLT · LAM718-094756-081ELCTD CAP GD RING ESC 8" NCH · LAM720-009531-004SCR,FLH,PCTFE,6-32 · LAM720-009531-006SCR,FLH,PCTFE,6-32 · LAM720-009531-008SCR,FLH,PCTFE,6-32 · LAM720-009531-010SCR,FLH,PCTFE,6-32 · LAM720-009531-012SCR,FLH,PCTFE,6-32 · LAM720-009531-014SCR,FLH,PCTFE,6-32 · LAM720-009531-016SCR,FLH,PCTFE,6-32 · LAM720-009531-018SCR,FLH,PCTFE,6-32 · LAM720-009531-020SCR,FLH,PCTFE,6-32 · LAM720-009531-022SCR,FLH,PCTFE,6-32 · LAM720-009531-024SCR,FLH,PCTFE,6-32 · LAM720-009531-026SCR,FLH,PCTFE,6-32 · LAM754-205331-001CREST-TO CREST WAVE SPRING · LAM754-294795-001GAP TYPE SPIRAWAVE · LAM799-303598-002PROBE,NWPK,ERGONOW,CSF504,V4010,4L,CHM B · LAM8/6-carrierLAM839-011906-001ELECTRODE SILICON 6" · LAM839-011906-0018" ELECTRODE · LAM839-011906-002电极 · LAM839-011907-001ELECTRODE SILICON 8" · LAM839-011907-0018" ELECTRODE · LAM839-011907-100ELECTRODE SILICON 8" · LAM839-011907-1008" ELECTRODE · LAM839-011907-111ELECTRODE SILICON 8" · LAM839-011907-1118" LAM EXELAN ELECTRODE · LAM839-011907-222ELECTRODE SILICON 8" · LAM839-011907-334ELECTRODE SILICON 8" · LAM839-011907-902ELECTRODE SILICON 8" · LAM839-011907-912ELECTRODE SILICON 8" · LAM839-011907-913ELECTRODE SILICON 8" · LAM839-011907-9138" SI ELECTRODE · LAM839-015480-003SI ELECTRODE · LAM839-015480-003SI CATHODE 일체형 · LAM839-019090-620ESC, TUNABLE HB-DFB KIYO FXE-BAND TYPE · LAM839-019090-632ESC · LAM839-020965-005(S)ASSY ELCTD OUTER TC 300MM · LAM839-020965-006FLEX45 LOW GAP
SiC 일체형 OUTER RING（결합도） · LAM839-020965-320 REV.EELECTD, OUTER, .18 STEP, 300MM, CLN · LAM839-021113-002(S)ASSY ELCTD INNER TC 300MM · LAM839-021113-002SI INNER ELECTRODE · LAM839-044157-031FLEX45 INNER ELECTRODE ASS'Y · LAM839-044157-331ELECTD, INR, 8-32 OFFSET, CLN · LAM839-064782-602ASSY, ELCTD INR SI NBSIE A-2 · LAM839-064782-602电极 · LAM839-070842-004ASSY,STUD,SOCKET · LAM839-086924-045ASSY,STUD,SOCKET,OE · LAM839-086924-046ASSY,STUD,SOCKET,C SHROUD · LAM839-086924-050ASSY,STUD,SOCKET,IE · LAM839-102001-136Flex HX ESC · LAM839-443215-1018" ELECTRODE · LAM839-443215-504ELECTRODE-HTP ELECTRODE · LAM839-443215-514ELECTRODE SILICON 8" HPT · LAM839-443215-544ELECTRODE SILICON 8" HPT · LAM839-800327-304ESC · LAM839-800327-315ESC · LAM839-800327-432LAM 432 ESC, FLEX45, DX · LAM839-800327-438LAM 438 ESC, FLEX 45 · LAM849-086924-021ASSY,STUD,SOCKET · LAM857-027108-001KIT,CHOKE RING · LAM857-073710-002KIT,SHIM,CLAMP · LAM893-011906-001电极 · LAMT-095510-001 -18" RING · LAM
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