LAM Research Etch Tool Spare Parts
Search LAM Research etch-tool spare parts by OEM part number. Common categories include silicon electrodes, Focus Rings, ceramic insulators, quartz parts
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LAM Research spare parts · LAM etch parts · LAM Focus Ring · LAM replacement components
Part numbers
1805-221439-24电极 · LAM1805-221470-25电极 · LAM1805-221471-24电极 · LAM1805-221471-25电极 · LAM1810-224390-11电极 · LAM1880-026696-11电极 · LAM1880-027152-12电极 · LAM40-055609-26,-27,-28,-30ROD,QUARTZ,4MM · LAM413-330504-082RING FOCUS FLAT 9608 · LAM661-097953-001UV LAMP · LAM713-001585-004GDP CAP SCREW · LAM713-011574-001PLUNGER,WAFER CLAMP · LAM713-011577-001WASHER · LAM713-011585-001COVER,CLAMP BOLT · LAM713-011585-004COVER,CLAMP BOLT · LAM713-011928-001CAP,BOLT,ELECTRODE · LAM713-027299-002SLV,ADPTR,SLIP-ON,SELFCNTR,V PEEK · LAM713-028485-001BOLT,ELECTRODE RING · LAM713-028553-103-REV.COMFINEMENT RING CERAMIC · LAM713-034964-001WSHR,.417IDX1.00ODX.025THK,300MM · LAM713-034964-002WSHR,.417IDX1.00ODX.025THK,301MM · LAM713-034965-001PAD,R,CONF,.010THK.300MM · LAM713-040539-001PED,LNDNG.CONF R,PEEK,F60FLEX,200MM · LAM713-048216-001CLIP,RETAINING.SYM DOOR MNT · LAM713-069935-003GSKT,GUARD,OUTER ELCTD · LAM713-072792-003GSKT,GUARD,OUTER ELCTD · LAM713-080721-001GSKT,GAS FEED,DUAL ZONE · LAM713-085131-001TUBE,TEFLON,.25 OD,LINER,2300 · LAM713-088966-001GSKT,OUTER,GAS FEED,DUAL ZONE · LAM713-182341-007INSERT,HRVA,IRIS CELL, 11.55,14.5 · LAM713-182341-009INSERT,HRVA,IRIS CELL, 11.60,14.5 · LAM713-196778-001GASKET,SAC MEMBRANE,FUSION · LAM713-198058-002GASKET,DC MEMBRANE,FUSION · LAM713-238718-002NOZZLE.TIP,EBR,HD PEM · LAM715-008220-105DR,PLASMA,BARRIER,BMPR,ROCKER V,PM · LAM715-011531-0116" ELECTRODE · LAM715-011535-001RING,CLAMP-UPPER ELECTRODE · LAM715-011565-001BOLT,CLAMP RETAINING · LAM715-011565-002BOLT,CLAMP RETAINING · LAM715-011565-003BOLT,CLAMP RETAINING · LAM715-011622-101LFTR,WFR,4-PIN · LAM715-011622-201LFTR,WFR,4-PIN,ULTEM · LAM715-011622-221LFTR,WFR,4-PIN,ULTEM · LAM715-011628-001DIVIDER,FLOW · LAM715-011982-001CAP,PLUNGER HOUSING,LOWER · LAM715-038611-001SOCKET,PLASMA SENSOR · LAM715-038611-002SOCKET,PLASMA SENSOR · LAM715-038611-002SKT,PLASMA SNSR · LAM715-075954-003WSHR,HEX,RING,CLAMP,300MM · LAM715-189682-001RING,CUP BOTTOM,APC,1MM · LAM715-194712-003RING,DC,FUSION · LAM715-228142-001PROBE,POT,3N COBALT,FUSION CELL · LAM715-304201-001HOLDER,LIFT PIN · LAM715-304202-001CAP,RETAINER,LIFT PIN HOLDER · LAM715-801916-008Middle chamber · LAM715-801916-808PLT,GAS DIST,300MM,W/GRV HTR · LAM716-003543-001HOT EDGE RING (315ESC) · LAM716-003543-123 REV.FRING, HOT EDGE, SI, DUAL SLOPE 300MM · LAM716-003543-13512" HOT EDGE RING · LAM716-003543-135 REV.ERING, HOT EDGE, SI, DUAL SLOPE 300MM · LAM716-005773-005FOCUS RING · LAM716-006721-001INSULATOR RING · LAM716-008608-001LSR window(WDO,SAPPHIRE,25MM X.087) · LAM716-008718-001NOZ,GAS INJ,8-HOLE QTZ,2300 METAL · LAM716-011057-002RING FILLER UPPER · LAM716-011427-003CERAMIC DISK · LAM716-011540-001UPPER FACE RING · LAM716-011563-063WAFER CLAMP 6INCH · LAM716-011563-151UNIVERSAL CLAMP RING · LAM716-011563-161WAFER CLAMP 6 INCH · LAM716-011565-002BOILT CLAMP RETAINING · LAM716-011570-001ORIFICE(PUMP) · LAM716-011638-006FOCUS RING · LAM716-011651-006WAFER CLAMP EDGE RING · LAM716-011758-016EDGE FOCUS RING · LAM716-011830-006FOCUS RING · LAM716-011923-001ATTACHMENT RING · LAM716-012639-024NOZ,INJ,8X .055-45DEG RDL-1CTR · LAM716-013344-006RING,COVER,OUTER,GND · LAM716-013402-003COV,H/E RING,QTZ · LAM716-013402-053Quartz hot edge ring cover · LAM716-013402-213COV,H/E RING ,QTZ · LAM716-014843-300RING,WAP,QTZ,GENERIC,17.07 ID, 300MM · LAM716-014843-350RING,WAP,QTZGENERIC 171N,OFC · LAM716-014843-353RING,WAP,QTZGENERIC 171N,OFC · LAM716-017112-330RING,WAP,17.07X10THK,300MM · LAM716-017112-522RING,WAP,17.07X,1.4THK,30 · LAM716-017112-526RING,WAP,1 7.07X1 4THK ,300MM · LAM716-017544-001SI HOT EDGE RING · LAM716-018468-196RING,COVER,OUTER,GND,ADJ · LAM716-018614-081FOCUS RING 9600 NOTCH · LAM716-020904-018RING EDGE FOCUS · LAM716-020905-001FILLER RING · LAM716-023013-004HOT EDGE RING · LAM716-023013-004SI HOT EDGE RING · LAM716-023013-005HOT EDGE RING · LAM716-023013-015HOT EDGE RING · LAM716-023013-027SI HOT EDGE RING · LAM716-023013-120HOT EDGE RING · LAM716-026652-902RING,EDGE,BOT,QTZ,200-300MM · LAM716-028028-004RING ELECTRODE · LAM716-028123-002UPPER FILLER RING · LAM716-028454-012盖板 · LAM716-028721-261UNIVERSAL CLAMP RING · LAM716-028721-268CLAMP 6 INCH · LAM716-028721-288CLAMP RING 4528 · LAM716-028725-161UNIVERSAL CLAMP RING · LAM716-030135-001EDGE RING 8 NOTCH · LAM716-030135-001LAM716-030136-001RING EDGE 6" ESC · LAM716-031257-521RING,EDGE,TOP,QTZ,EBP,200MM · LAM716-031257-531RING,EDGE,TOP,QTZ,EBP,300MM · LAM716-031257-533EDGE RING · LAM716-031453-001R FLR LWR CHBR · LAM716-031453-002LOWER FILLER RING · LAM716-037793-213RING,BASE,ESCW/INIG TER · LAM716-037793-304Quartz base ring · LAM716-038612-003PIN,PICK UP,DC BIAS,SI CARB · LAM716-038887-001HOT EDGE RING · LAM716-040737-407Quartz coupling O-ring · LAM716-040737-407RING,CPLG,QTZ,W/BIAS PU,W/FLAT,300M · LAM716-040738-120HOT EDGE RING FLEX45 (L/P) · LAM716-040738-127RING，HE,W/FL,SI,SGL XTAL,17.5,ID,300MM · LAM716-040738-220HOT EDGE RING FLEX45 (L/P) · LAM716-040738-413EDGE RING · LAM716-040738-42RING，HE,WFL,SI,SGL XTAL · LAM716-040738-427EDGE RING 75 · LAM716-040738-427RING，HE,W/FL,SI,SGL XTAL,17.5,ID,300MM · LAM716-040738-42712' LAM HOT EDGE RING · LAM716-040738-432SI_RING_HOT_EDGE_RING_FLEX_ES_ · LAM716-040738-439EDGE RING(5.5T-45) · LAM716-040738-471SI HOT EDGE RING(FOR FLEX DX_L/P) · LAM716-040738-913HOT EDGE RING · LAM716-043436-021-DSI COUPLING RING · LAM716-044668-001HOT EDGE RING · LAM716-044668-001RING · LAM716-044668-435R,HE,4XX ESC,W O FLAT,300MM,SS · LAM716-044668-435FLEX DL HOT EDGE RING · LAM716-044668-571 REV.EHOT EDGE RING · LAM716-044668-930HOT EDGE RING(HOLE TYPE) · LAM716-047038-427SI HOT EDGE RING · LAM716-057993-003INJ DUAL FACESEAL CER · LAM716-064782-103ASSY,ELCTD,INR,SI,NBSIE · LAM716-064782-602LAM FLEX ELECTRODE · LAM716-064782-602ASSY,ELCTD,INR,SI,NBSIE A-2 · LAM716-067739-105RING,QTZ,COVER BKG PL,UPR ELCTD · LAM716-068688-156FLEX GX - ONE PIECE ELECTRODE · LAM716-069668-076ELCTD,INR,SI,POLISHED,300MM · LAM716-069688-005INNER CELL · LAM716-069688-005ELCTD, INR, SI, 300MM · LAM716-069688-005电极 · LAM716-069688-005ELCTD,INR,SI,300MM · LAM716-069688-022SHOWER PLATE · LAM716-069688-022ELCTD,INR,SI,300MM · LAM716-069688-022 REV.FELTD,INR,SI,300MM(TALON INNER) · LAM716-069688-024FLEX HX INNER ELECTRODE · LAM716-069688-041 REV.EELCTD, INR, SI, LG R, 300MM, POL · LAM716-069688-058ELCTD, INR SI 300MM FOR FLEX FSE · LAM716-069688-058 REV.HPearl Talon Inner UEL · LAM716-069688-058 REV.JPearl Talon Inner UEL · LAM716-069688-062ELCTD,INR,SI,POLISHED,300MM · LAM716-069688-062 REV.DFLEX-FX INNER ELECTORDE · LAM716-069688-076FLEX-GX/GX_E INNER ELECTRODE · LAM716-069688-076ELCTD,INR,SI,POLISHED,300MM · LAM716-069688-082ELCTD,INR,SI,POLISHED,300MM · LAM716-069688-082 REV.BELCTD INR, SI, POLISHED, FLEXFX · LAM716-069688-156ELCTD,INR,SI,POLISHED,300MM · LAM716-069688-156ELCTD,HP,SILICON,12IN · LAM716-069688-156电极 · LAM716-069688-169ELCTD,INR,SI,POLISHED,300MM （1/2) · LAM716-069688-178ELCTD,INR,SI,301MM · LAM716-069688-22电极 · LAM716-069688-378ELCTD, INR, SI, POLISHED, 300MM · LAM716-069688-660ELCTD,INR,SI,300MM · LAM716-069688-789ELCTD, INR, SI, 300MM · LAM716-069688-822电极 · LAM716-069688-822ELCTD,INR,SI,300MM · LAM716-072567-418(S)EDGE RING(0 degree) · LAM716-072576-415CER HOT EDGE RING · LAM716-072576-418Ring He,4XX,ESC,W/FLAT · LAM716-072576-428SILICON_RING,HE,4XX,ESC,W/FLAT · LAM716-073392-002PLUG,UPPR ELCTD,CER · LAM716-073979-004SI UPPER ELECTRODE_A_ELCTD,SI,300 · LAM716-073979-004ELCTD,SI,300MM,INN/OUT · LAM716-073979-032SI ELECTRODE · LAM716-073979-032 REV.JELCTD, MONO TALON +, CZ, .18 STE · LAM716-073979-035ELCTD,MONO TALON PLUS,CZ,FLAT · LAM716-073979-036ELCTD,MONO TALON PLUS,CZ,10 STEP · LAM716-073979-074MONO TALON CEL · LAM716-073979-136SILICON(SI)_SILICON ELECTRODE MONO T · LAM716-073979-136ELCTD,CZ,300MM,INN/OUT ,10 STEP · LAM716-073979-152ELCTD, MT PLUS,.CZ,.10 STEP · LAM716-073979-851Upper Electrode GL · LAM716-074512-002PIN LIFTER-LOADLOCK · LAM716-077916-001TALON OUTER · LAM716-077916-001ELCTD,OUTER,18 STEP,300MM · LAM716-08166-885RING,HOT EDGEITER,STRT, 120THK,300MM · LAM716-081661-803FLEX FL HOT EDGE RING · LAM716-081661-803FLEX Fs HER_5.43 · LAM716-081661-803VRing，Hot Edge，TER,557 ESC · LAM
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