Semiconductor Equipment Spare Parts Supplier — page 20
Page 20 of 101 in the Lubanix Semiconductor Equipment Spare Parts Supplier catalog, part numbers 10150-001750A to 1110-01030. Request a quote from Lubanix.
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Part numbers
10150-001750A陶瓷引线盖板上1005400-00210150-001864A下电极聚焦环（5）_198mm10150-001865ALIFT PIN V4(C)_CLC10150-001925AOES观察窗陶瓷筒_M10150-002062 AHTB ESC波纹管绝缘件 ECK10150-002063A陶瓷锥形整流筒-300_HP10150-002087AFocus Ring10150-002219ABase Ring-G10150-003047BBase Ring10150-003051A遮蔽环-PV10150-003055B陶瓷喷嘴10150-003062BDep Ring10150-003388Wafer+Tweezer-200mm10150-003388AWafer Tweezer-200mm10150-003628 A下电极聚焦环(6寸)_陶瓷（全圆159）10150-003628 A下电极聚焦环(6寸)_陶瓷(全圆159）10150-003631A单区喷嘴（110°）-改10150-003874压环_TEE_ZJG Clamp Ring10150-003957 A陶瓷聚焦顶环(2MM)_DEM10150-003958 A陶瓷聚焦顶环(2MM)_1DEM10150-003959 A陶瓷聚焦顶环(8MM)_DEM10150-003962 A陶瓷聚焦顶环定位销1_DEM10150-004011A压环ZT_TEE Clamp Ring10150-200034-001 A销钉-Allqz10150-200037-001陶瓷叉指（窄）_PEA10150-200071-001聚焦环_G+_（335）10150-200074-001陶瓷压环-8c-G+_33510150-200075-001卡盘保护环（335）10150-200080-001 A盘头台阶陶瓷销-Allqz10150-200082-001卡盘内嵌陶瓷环_33510150-200087-001 A线圈隔离件4mm_PV10150-200091-001 A线圈隔离件5mm_PV10150-200092-001 A线圈隔离件6mm_PV10150-200095-001 A上电极进气陶瓷管（6.4）-TTN10150-200096-001 A陶瓷压环4寸_MC10150-200098-001陶瓷压环-8c-G+_335_sy10150-200101-001 A盖板_355_SY_TC10150-200107-001陶瓷压环（154-1）-SC10150-200135-001陶瓷压环（4-圆）-SC-110150-200138-001 A陶瓷聚焦环_94-SC10150-200173-001 A载片头_PEA10150-200181-001 A聚焦环-（1.25）-PV10150-200182-001 A聚焦环-（2.25）-PV10150-200183-001 A陶瓷环（上H1+1.25）-PE10150-200184-001 A陶瓷环（上L1+8）-PE10150-200185-001 A陶瓷环（上H1+2.5）-PE10150-200186-001 A陶瓷环（下）-PE10150-200188-001 A陶瓷环（上L1+16）-PE10150-200189-001 A陶瓷环（块状）-PE10150-200195-001 A载片头镜像_PEA10150-200208-001 A支撑环_2_FO_Insulating Plate10150-200213-001 A升针_2_FO_Pin10150-200214-001 A25mm陶瓷下电极支撑环_DEM Insulating Plate10150-200224-001 A边缘保护环_6寸_ES10150-200234-001 A陶瓷压环（152-全圆）-SC10150-200249-001 A屏蔽环SY5-PV10150-200251-001 A屏蔽环SY3-PV10150-200256-001 A内门陶瓷_2_FO10150-200258-001 A绝缘环_2_FO_Insulating Plate10150-200262-001 A陶瓷聚焦环_ICP_（带定位)10150-200273-001陶瓷螺钉（新）M4*2210150-200274-001下电极聚焦环(6寸平边转全圆)-SC10150-200283-001下电极聚焦环(156)_陶瓷（全圆）10150-200284-001聚焦环（全圆159）10150-200293-0016寸压环（ESC 150mm wafer大平边）-GS10150-200294-001 A4寸压环（ESC 100mm wafer平边）-GS10150-200302-001 A12寸陶瓷压环（带支脚） N110150-200303-001 A聚焦环01（3mm)10150-200303-002聚焦环01（3mm) N210150-200304-001 A陶瓷聚焦环HER DEM10150-200305-001 A边缘保护环_6寸_ES 改210150-200308-001下电极聚焦环(TC 4寸 96MM 去胶壳)-SC10150-200333-001 A边缘保护环_6寸_ESN10150-200413-001 A陶瓷压环-8C GD10150-200431-001 A盘头台阶陶瓷销-AlD10150-200435-001陶瓷聚焦顶环（7mm） DEM10150-200448-001下电极聚焦环(6寸)_陶瓷-GC10150-200514-001线圈隔离件10mm PV10150-200567-001 A内衬垫圈10150-200634-001下电极聚焦环(6寸)_陶瓷-CIP-210150-200964-0016寸小平边Hot edge ring 25 TC-ST10150-200968-001 A陶瓷window-PVS10150-201001-001 A陶瓷支柱(ZC)_PEAP10150-201024-001 A12寸聚焦顶环-2Mcip10150-201091-001陶瓷聚焦环-ICP-4寸高阻（带定位）-GDP10150-201092-001陶瓷聚焦环-6寸高阻大平边（带定位）-GDP10150-201094-001中心进气易拆板（陶瓷）-GDP10150-201105-001陶瓷聚焦环-6寸高阻小平边（带定位）-GDP10150-201712-001遮蔽环_BP+10150-201780-001 A支脚聚焦顶环-BP+10150-201781-00112寸支脚聚焦顶环_BP+10150-201784-001 A下电极陶瓷聚焦环-6寸小平边01-DTE10151-001036AClampring陶瓷块10171014-009Z10184-55409-00010190-21108-10110190-23603-00010190-38423-H0110190-42002-00210190-43104-10110190-53722-00010190-68410-000LN2 PIPE10197-52204-10010197-61136-205102-02-15AP0512010203-21314-000/SM4510203-21314-000/SM45C102089739石英环102100680石英环102155746DTL CVR PLT 150mm W/FOC RING 11" GEN4102302588SLEEVE,INNER,GAS ANNULUS,AI10231719215.6in QTZ CVR PT W/Focus10232-46422-100/STS3STS30310248-41112-00010255-A4256-001102A-0401015-20102A-0401016-3A102A-0402018-10SAMWON ATC102A-0506311-20102A-0610284-00102A-0610462-70102A-0610498-001030-01011APPLIED MATERIALS1030-108UT12T-6-12TFN-11030-108201-37-01 · ENTEGRIS1031-042D8-3C-12F · ENTEGRIS1034-002-01ACS-751701035-011-01ASM1035697-R2VESSEL,HYDRILIS XT2 CERAMIC103F8582-80XB41SANYO DENKI103H5505-70E1SANYO DENKI103H7121-0740SANYO DENKI103H7833-13XS421040-00116060-E693-011040-002111040-01121APPLIED MATERIALS1040-01143APPLIED MATERIALS1040495RENTRON PBN ESC1042100051042256CDB620-0011043902RESONATOR 13.56MHz1046-157-011055-335-01SCB1396Y1 · BARDEN CORP1061220280手臂106338LV-H100 · KEYENCE1064NM90%REFLEXIBI1070-00002RCM475LY-711076-111-01FSP460-60PFG108-060-066-1108-070-109108-140-068A1080-001885-012陶瓷手臂1080-00233G10-404 · SANYO DENKI1080-00310BXM6400-B2 · VEXTA1080-011325GN5SA1080-0113824Y2BEPM-3F1080-01243SGM-01U3B4CL · YASKAWA10800199FWP-25A14Fa109E1224H143SANYO DENKI10B11-286071-00NOVELLUS11-307477-02NOVELLUS11-31-550-00110-0746AS568A-109110-10057566pecvd003 pin support110-10058801sea plate110-10058946sea plate r322.7110-10064871HEATER EXHAUST GASKET110-10064872RADIATOR PAPER GASKET 03110-39095陶瓷BLOCK
INSULATION BLOCK CERAMIC110-68819side tower robot transfer plate110.1070260.01陶瓷机械手旋转臂110.1070355.01旋转传送臂110.3陶瓷环11001222LPS-1200-1.5-750 · LUMINA POWER110017-1703P-U-W6B · PILLAR110025440AXCELIS110033430OMRON110035780110041890XLFV-50F-A93A-5GS · SMC1100440AXCELIS1100440INSULATED FEEDTHRU ASSY110050390AXCELIS110092120AXCELIS1101-041025A110101010347008 · GRANVILLE PHILLIPS110122500AXCELIS110129610170164663 · AXCELIS11023231AXCELIS11039040AXCELIS11039040RPHASE MONITOR BOX · AXCELIS11044-0106 B气膜外圈1105-300561-13TRANSFER FORK 8inch W-F · TEL11051-0106 REV D气膜外圈11054030RAXCELIS110962BROOKS111-080-031111-260-0931110-00059APPLIED MATERIALS1110-00059Fixed Match · AE1110-01030APPLIED MATERIALS
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