Semiconductor Equipment Spare Parts Supplier — page 19
Page 19 of 101 in the Lubanix Semiconductor Equipment Spare Parts Supplier catalog, part numbers 10145-200067-001 to 10150-001493A. Request a quote from
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Part numbers
10145-200067-001四柱硅舟-HOX-001_Release · NAURA10145-200068-001四柱硅舟2-HOX-001_Release · NAURA10145-200069-001Hot edge ringV加_IDE · NAURA10145-200070-001Hot edge ringA-IDE · NAURA10145-200071-001上电极Showerhead（DY）_H6_L_Release · NAURA10145-200073-001Hot edge ring V加2_IDE · NAURA10145-200074-001硅保温片-200mm_Release · NAURA10145-200076-0016寸小平边Hot edge ring 25-ST_Release · NAURA10145-200077-0016寸小平边Hot edge ring 25 1-ST · NAURA10145-200084-001Hot edge ring203_IDE · NAURA10145-200085-001硅电极定位销V3+_IDE · NAURA10145-200095-00112in WAFER托盘_6INCH_1.4MM_TSVR1 · NAURA10145-200096-00112in WAFER托盘_8INCH_1.4MM_TSVR1 · NAURA10145-200099-001Focus Ring.Bottom.L2 · NAURA10145-200101-001Hot edge ring2-V3+_IDE · NAURA10145-200102-001外电极_Z · NAURA10145-200104-001内衬_Z_Release · NAURA10145-200105-001内电极（4孔）_Z · NAURA10145-200106-001硅电极-240_2-V3+_IDE · NAURA10145-200108-001上电极UGR环（硅）2-V3+_IDE · NAURA10145-200109-001Hot edge ring（6寸）2-V3+_IDE · NAURA10145-200110-001Hot edge ring（6寸大）2-V3+_IDE · NAURA10145-200112-001Hot edge ring（6寸小）3-V3+_IDE · NAURA10145-200113-001Hot edge ring（6寸大）3-V3+_IDE · NAURA10145-200114-001Hot edge ring（8寸）3-V3+_IDE · NAURA10145-200117-001Hot edge ring V2-1_IDE · NAURA10145-200118-001Hot edge ring V2-2_IDE · NAURA10145-200119-001Hot edge ring V2-3_IDE · NAURA10145-200122-001Hot edge ring V2-4_IDE · NAURA10145-200123-001Hot edge ring V2-5_IDE · NAURA10145-200124001Hot edge ring V2-6_IDE · NAURA10145-200129-0012in+WAFER托盘_6INCH_2_TSVR1_Release · NAURA10145-200130-001内电极（TC）_Z_Release · NAURA10145-200131-001内衬T_Z · NAURA10145-200132-001Focus Ring.Bottom.V1.L2 · NAURA10145-200137-001聚焦环_Z · NAURA10145-200139-001Hot edge ring（6寸大-小）2-V3+_IDE · NAURA10150-000079聚焦环10150-000277升针10150-000395Dep Ring(Coulombic ESC)10150-000413B下电极聚焦环(6寸)_陶瓷10150-000422B氧化铝环10150-000451 A陶瓷喷嘴筛管10150-000456A陶瓷件10150-000488 A直通陶瓷喷嘴10150-000540B下电极聚焦环_198mm10150-000543A陶瓷螺钉 M4(长退刀槽)10150-000598 Abakeout绝缘保护件1＿ALNPM10150-000599 Abakeout绝缘保护件2＿ALNPM10150-000600 Abakeout绝缘保护件3＿ALNPM10150-000601 Abakeout绝缘保护件4＿ALNPM10150-000602 Abakeout绝缘套管-1＿ALNPM10150-000603 Abakeout绝缘套管-2＿ALNPM10150-000614 B灯管电极陶瓷屏蔽件B-1＿ALNPM10150-000615 B灯管电极陶瓷屏蔽件B-2＿ALNPM10150-000616A灯管电极屏蔽件B-310150-000617 A灯管电极陶瓷屏蔽件B-4＿ALNPM10150-000618 B灯管电极陶瓷屏蔽件B-5＿ALNPM10150-000619 B灯管电极陶瓷屏蔽件B-6＿ALNPM10150-000620B灯管电极屏蔽件B-710150-000621 B真空电极屏蔽件B-1＿ALNPM10150-000622 B真空电极屏蔽件B-2＿ALNPM10150-000623 B真空电极屏蔽件B-3＿ALNPM10150-000624 B真空电极屏蔽件B-4＿ALNPM10150-000625 B真空电极屏蔽件B-5＿ALNPM10150-000626 B真空电极屏蔽件B-6＿ALNPM10150-000630A灯管电极屏蔽件B-810150-000631A灯管电极屏蔽件B-910150-000635B灯管电极屏蔽件B-1010150-000646 A氧化铝棒10150-000647 A绝缘环10150-000647A氧化铝环10150-000648 B支撑环（CR)10150-000648B氧化铝环10150-000649AM6螺钉陶瓷帽10150-000650 A配重保护环10150-000650A氧化铝环10150-000651A氧化铝环10150-000653 A升针(CR)_PBB10150-000704 AInsulator(20mm)_HMPM10150-000772A绝缘环_ZJ10150-000773A配重保护环_ZJ10150-000774B陶瓷压环_ZJ10150-000775 A支撑环(ZJ)10150-000779A灯管电极屏蔽件B-210150-000780A灯管电极屏蔽件B-510150-000781A灯管电极屏蔽件B-610150-000797 A弹性轴_ZJ CC10150-000798A筛管_ZJ CC10150-000799 A升针_ZJ CC10150-000800A聚焦环10150-000944A陶瓷压环_机械卡盘(104)10150-000965B支撑环_PBB10150-000966A升针(CR)_PBB10150-000970A陶瓷支撑件-MPC10150-000972BBLT RF引入绝缘件1_APPRC10150-000973ABLT 陶瓷定位销-300_APPRC10150-000975ABakeout绝缘保护件_COC10150-000976B机械手PAD10150-000978ABakeout绝缘保护件2_COC10150-000979ABakeout绝缘保护件3_COC10150-000980ABakeout绝缘保护件T1_COC10150-000981ABakeout绝缘保护件T2_COC10150-000982ABakeout绝缘保护件T3_COC10150-000983ABakeout绝缘保护件T4_COC10150-000984Abakeout绝缘保护件X4_COC10150-000988A基座陶瓷环-1_COC10150-000989AHESC CeramicDePring10150-000998AHESC Ceramic Dep Ring-3_AlC10150-001002A反射支撑件_ANPM_NOC10150-001003A反射支撑件33_ANPM_NOC10150-001004A200mm RF 陶瓷层(Colling Plate)_DMPC10150-001006APIN 200mm_DMPC(陶瓷)10150-001007A托盘(NR)_ANPM10150-001008A托盘(PT)_ANPM10150-001017A支撑环_TEE10150-001018A绝缘环_TEE10150-001019A聚焦环_TEE10150-001020A压环_TEE10150-001033A筛管_UC10150-001037A下陶瓷筒10150-001038ARing_COC10150-001041ATACeramicring 310150-001042A反射支撑件B_ANPM_NOC10150-001043A反射支撑件A_ANPM_NOC10150-001044BLP陶瓷定位柱-COC10150-001047COVER RING导向块_COC10150-001048A下电极绝缘环10150-001049A下电极支撑环10150-001050A下电极防护环10150-001054A真空电极屏蔽件B-3_AN5PM10150-001055A真空电极屏蔽件B-2_AN5PM10150-001056A真空电极屏蔽件B-1_AN5PM10150-001057A真空电极屏蔽件B-8_AN5PM10150-001058A真空电极屏蔽件B-7_AN5PM10150-001059B真空电极屏蔽件B-6_AN5PM10150-001060A真空电极屏蔽件B-5_AN5PM10150-001061A真空电极屏蔽件B-4_AN5PM10150-001067A屏蔽陶瓷件_AN5PM10150-001069AHESC Ceramic Dep Ring-3_APAlC10150-001070AHESC Dep Ring(9.4)_APAlC10150-001071A上陶瓷盖试验件10150-001075ARINGEDGEPURGE210150-001082AB-Heater shaft insulator_HPM10150-001083AB-Heater Ceramic Plate_HPM10150-001084AMHB ceramic insulator for screw(A)_HPM10150-001085AB-Heater insulator Ring_HPM10150-001089A陶瓷环10150-001092 A下电极支撑环_610150-001093 A加热电极绝缘套筒_6_HC10150-001094A下电极绝缘环_6_HC10150-001095 ARF绝缘套筒_6_HC10150-001097A陶瓷基环_6_HC10150-001098A陶瓷挡片四_TAC10150-001099ATa Ceramic Ring(MF)_TAC10150-001101 A绝缘环(ZJ)-G+10150-001102 A聚焦环_G+10150-001102A聚焦环_G+10150-001104 A配重保护环(370)-G+10150-001105 C陶瓷压环-8c-G+10150-001106 AHT ESC DC电极陶瓷套1_ECK_PVDR110150-001107AClAMP RING 陶瓷柱4_COC10150-001108A大气机械手C10150-001119APin TC绝缘套2_AN5PM10150-001120APin TC绝缘套_AN5PM10150-001121A灯管电极陶瓷屏蔽件2B-2_ANPM10150-001122A灯管电极陶瓷屏蔽件2B-1_ANPM10150-001123A灯管电极陶瓷屏蔽件2B-6_ANPM10150-001124A灯管电极陶瓷屏蔽件2B-5_ANPM10150-001125A灯管电极陶瓷屏蔽件2B-7_ANPM10150-001126ADiffusion Plate_ALPM110150-001127AChamber Top Shield_ALPM110150-001129A下电极绝缘环_DEM10150-001132A陶瓷聚焦底环_DEM10150-001133A陶瓷聚焦顶环_DEM10150-001140A反射支撑件 cera_ANPM_NOC10150-001149ALid gas inlet adapter_SPC10150-001158A下电极支撑环10150-001163AInsulator(20mm)_MPC10150-001164A陶瓷绝缘环_MPC10150-001174ALT ESC Plug10150-001178A下电极聚焦环(6寸小平边)-SE10150-001194A 聚焦环8inch_DEM10150-001197A压环_TEE_110150-001208A射频盖绝缘环（扩大）.SLDPRT10150-001209A整体聚焦环（扩大）.SLDPRT10150-001284A陶瓷引线盖板上1005400-00110150-001286A引线陶瓷安装块1004678-001A10150-001302A同步带轮绝缘内衬10150-001311A支撑环_NUC10150-001335A陶瓷聚焦环10150-001340A陶瓷盖10150-001354ASE ESC DEP RING(MF)_TAC10150-001358A线圈支架-ACL30010150-001360A反射支撑件B_AN3APM_NOC10150-001361A反射支撑件A_AN3APM_NOC10150-001390A聚焦环8inch（陶瓷）_DEM10150-001397A冷泵保护件隔热环10150-001475 A下电极升针_MRP10150-001493A12寸（3mm)陶瓷聚焦顶环-DEM
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