Semiconductor Equipment Spare Parts Supplier — page 13
Page 13 of 101 in the Lubanix Semiconductor Equipment Spare Parts Supplier catalog, part numbers 0200-10144 to 0200-36415. Request a quote from Lubanix.
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Part numbers
0200-10144ISOLATOR · AMAT0200-10144ISOLATOR PUMPING PLATE DXZ GECO0200-10157JUNCTION LINER · AMAT0200-10157LINER,JUNCTION.SIN,DXZ GECO0200-10158SLEEVE JUNCTION · AMAT0200-10160CERAMIC LINER · AMAT0200-10160 REV002LINER CERAMIC,SiN DXZ,GECO0200-10163PUMPING LID ISOLATOR · AMAT0200-10164PUMPING INSERT · AMAT0200-10164 REV ASHIELD PUMPING INSERT,SiN,DXZ0200-10169EDGE RING · AMAT0200-10169PLATE,EDGE COVER,DXZ GECO0200-10191SHIELD · AMAT0200-10193陶瓷压环0200-10194SHIELD TAPERED · AMAT0200-10195 REV.A陶瓷环0200-10208INNER RING · AMAT0200-10209OUTER RING · AMAT0200-10246Uni-Insert Gas Distribution 88 holes Quartz · AMAT0200-10263WASHER INSULATING · AMAT0200-10263 REV003WASHER,INSULATING,CERAMIC0200-10284LIFT PIN · AMAT0200-10284-001PIN LIFT HEATER DxZ0200-103240200-10324氧化铝异形件0200-10324DOME,E-DTCU, DPS plus0200-10377RING SINGLE · AMAT0200-10377-003RING,SINGLE 195MM SEMI NOTCH CERAMIC,DPS CHAMBER0200-104000200-10400(M1)0200-10446Si INSERT RING 200MM NOTCH · AMAT0200-104480200-10526PUMPING RING · AMAT0200-10650CERAMIC PUMPING CHANNEL · AMAT0200-10650P2 Cover,ceramic,pumping channel0200-10861 REV 02SINGLE GAS FEED, 300MM, ADPNA01 HD0200-10960Insulator0200-10961Top liner0200-11027CHILLER PLATE 2XP,COOLING PEDESTAL,SI0200-12080APPLIED MATERIALS0200-12228APPLIED MATERIALS0200-12581-02RING,ISOLATOR SOURCE ADAPTOR，SELF-A0200-12628APPLIED MATERIALS0200-12643WONIK QnC0200-12817 REV004INSERT RING, EMAX 3.4T · AMAT0200-14174APPLIED MATERIALS0200-14210INSERT RING_SINGLE CRYSTAL SI 1.5MM · AMAT0200-14255陶瓷环0200-14283 REV05KEEPER,NOTCHED LIFT PIN, PECVD,300MM0200-14576PIN,LOCKING,SHADOW RING INSERT0200-14765APPLIED MATERIALS0200-14770SHIELD,tool,ISOLATOR,SR,PRODUCER G-GT0200-14851ISOLATOR, PPM, AL-OXIDE, LARGE ELECTRODE, PRODUCER G-GT0200-15179ISOLATOR, PPM, AL-OXIDE, LARGE ELECTRODE, SR, PRODUCER G-GT0200-15205陶瓷环0200-15404Dep Ring0200-17137-003SiC INSERT,SMOD,2.8 STEP · AMAT0200-17144BLADE 300MM PRODUCER0200-17144 REV 02BLADE 300MM PRODUCER0200-17674Lift pin weigh0200-17989LID WIDE,23.5DIA,C3 · AMAT0200-18053LIFT GUIDE PIN LIFT · AMAT0200-18053陶瓷PIN针0200-18062氧化铝DOME0200-18062DOME, 14 ID HDPCVD,REV 30200-18073APPLIED MATERIALS0200-18074APPLIED MATERIALS0200-18077APPLIED MATERIALS0200-18077COVER · AMAT0200-18078ESC CERAMIC COLAR SHORT · AMAT0200-18081COVER ULTIMA · AMAT0200-18081氧化铝环0200-18090 Rev。002 301-464-047陶瓷DOME0200-18091COLLAR · AMAT0200-18093APPLIED MATERIALS0200-18093ULTIMA HDP Side nozzle0200-18095APPLIED MATERIALS0200-18095COLLAR · AMAT0200-18095 REV002COLLAR MIN. CONTACT 200mm SNNT HDP-CVD,ULTIMA0200-18100 REV004LIFT PIN CERAMIC 300MM,HDPCVD0200-18108COLLAR MIN CONTACT 200mm · AMAT0200-18109APPLIED MATERIALS0200-18109COLLAR · AMAT0200-18109陶瓷环0200-18109-SCOLLAR 200MM SNNF SML FLT UL TIMA HDPCVD0200-18880Bottom Purgebaffle0200-19390APF retrofit shadow ring +90C0200-19648 REV03陶瓷环0200-19783Outer pumping plate CIP kits0200-19793Inner pumping plate CIP kits0200-19893COLLAR 300MM 5.4MM PRODUCER ETCH · AMAT0200-20114ISOLATOR DC BIOS · AMAT0200-20169RIGID COIL SUPPORT · AMAT0200-20169INSULATOR COIL SUPPORT RIGID0200-20170CAP, RIGID COIL SUPPORT · AMAT0200-20170CAP COIL SUPPORT RIGID,IN0200-20175COIL SUPPORT · AMAT0200-20175LABYRINTH,RIGID COIL SUPPORT0200-20208LABYRINTH FEEDTHRU COIL SUPPORT · AMAT0200-20210COVER DOUBLE RF CONNECTOR · AMAT0200-20210-001COVER DOUBLE RF CONNECTOR VECTRA-IMP0200-20215HOUSING DOUBLE RF CONNECTOR · AMAT0200-20215HOUSING,DOUBLE RF CONNECTOR0200-20216PIN COVER RF SCREW · AMAT0200-20216PIN COVER RF SCREW VECTRA IMP0200-20217FEEDTHRU COIL SUPPORT · AMAT0200-20217LABYRINTH FEEDTHRU COLL SUPORT VECTRA-IMP0200-20217LABYRINTH0200-20285PEDESTAL COVER 8INCH · AMAT0200-20285COVER 8"PEDESTAL,B101 HTR
CERAMIC,VECTRA-IMP0200-20315REST BUTTON,VECTRA · AMAT0200-20315-01陶瓷环0200-20331LOWER COVER RING · AMAT0200-20331COVER RING 8"B101 PROCESSES
10.75" OD0200-20437DEPOSITION RING · AMAT0200-20440Rest Button Short 300MM VECTRA IMP0200-20441CERAMIC,SUPPORT CENTER,PEDESTAL,300MM0200-20492APPLIED MATERIALS0200-20492氧化铝环0200-20492INSULATOR RECEPTACLE RIGID SUPPORT VECTRA-IMP ICE0200-20494异形件0200-20521盘0200-20861UPI ++ NOZZLE, ALN, 1.76L X .014DIA, 99% FLOW, HDPCVD0200-20862UPI ++ NOZZLE, ALN, 1.76L X .014DIA, 98% FLOW, HDPCVD0200-20863UPI ++ NOZZLE, ALN, 1.76L X .014DIA, 97% FLOW, HDPCVD0200-20864UPI++NOZZLE,ALN,1.76L X.014DIA,101%FLOW0200-20865UPI ++ NOZZLE, ALN, 1.76L X .014DIA, 102% FLOW, HDPCVD0200-20866UPI ++ NOZZLE, ALN, 1.76L X .014DIA, 103% FLOW, HDPCVD0200-21110 Rev.005SIC SUPPORT RING,GAP 30MIL,VAR GEOM · AMAT0200-21111-004SIC INSERT RING,GAP 30MIL,90MIL THK,VAR GEOM · AMAT0200-21163 Rev02edge ring0200-21232 REV04陶瓷环0200-21960Radiation Shield0200-21986/0200-14280Lift pin side(长）0200-21987/0200-14281Lift pin side(短）0200-22484Weight0200-22733绝缘子0200-233540200-24876LIFT PIN0200-25007AMAT Blue Rock Heater Isolator0200-25993 REV02CHILLER PLATE 1XP,COOLING PEDESTAL,SICONI0200-27287lift pin0200-28141PING0200-28165绝缘子0200-29077pin guide0200-30287ADAPTER RING · AMAT0200-33649指顶环0200-35017APPLIED MATERIALS0200-35019APPLIED MATERIALS0200-35020APPLIED MATERIALS0200-35084DOME UP ATM,OM-1000200-35084DOME UP ATM,OM-1000200-35287APPLIED MATERIALS0200-35287腔体密封环0200-35290GAS NOZZLE OUTER · AMAT0200-35290氧化铝异形件0200-35291GAS NOZZLE INNER · AMAT0200-35291氧化铝异形件0200-35292WINDOW ,ENDPOINT,DPS MEC0200-35293MANOMETER QZ0200-35295GAS NOZZLE OUTER · AMAT0200-35295陶瓷异形件0200-35296GAS NOZZLE INNER · AMAT0200-35296陶瓷异形件0200-35320FOCUS RING · AMAT0200-35323RING CAPTURE CERAMIC MODIFY0200-35323-CCAPTURE RING · AMAT0200-35324SINGLE RING · AMAT0200-35326FOCUS RING DPS · AMAT0200-353340200-35334（原产料号材料为石英）陶瓷圆片0200-35335CAPTURE RING DPS · AMAT0200-35389SINGLE RING · AMAT0200-35427APPLIED MATERIALS0200-35430RING SINGLE CER 145MM JEIDA MAJOR FLAT DPS · AMAT0200-35525CERAMIC RESISTOR NEAR NET SHAPED0200-35525管形陶瓷无感电阻2MΩ0200-35525管形陶瓷无感电阻900K0200-35576PUMPING LID ISOLATOR · AMAT0200-35579CHAMBER INSERT · AMAT0200-35580BUSING PIN · AMAT0200-35595OBS LINER LID · AMAT0200-35611LID.LINER SCERW · AMAT0200-35611SCREW LID LINERT X Z0200-35623INSERT RING SILICON MXP · AMAT0200-356697SI TOP RING · AMAT0200-35702EDGE RING · AMAT0200-35785RING CERAMIC WAFER LIFT · AMAT0200-35842C-RING · AMAT0200-35842Pumping ring,ceramic,C shaped mid p0200-35843TOP CERAMIC LINER · AMAT0200-35843Pumping ring,ceramic,top piece0200-35956DOME,CERAMIC 2.75 DIA WINDOW DPS CHAMBER0200-35957ceramic dome window0200-36034INSULATOR QUARTZ,300MM,SIMPLE CATHODE0200-36105CHAMBER INSERT · AMAT0200-361050环0200-36373LIFT PIN 149 DIA TRIANGLE · AMAT0200-36373氧化铝异形件0200-36399SHIELD TOP CERAMIC TXZ 300MM0200-36415PUMPING RING C-SHAPE · AMAT
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