Tokyo Electron (TEL) Spare Parts
Search Tokyo Electron (TEL) equipment parts by part number or equipment family. The catalog covers chamber consumables, ceramic and quartz components
Related search terms
Tokyo Electron spare parts · TEL parts · TEL etch components · TEL replacement parts
Part numbers
0000-000590-113M86-061364-12 · TEL012-007325-1LYX-0757 · TEL012-008719-1MN3S010-T30-13-FL295 · TEL012-009309-1XLA-63A-M9 · TEL012-011145-1TEL017-002566-1TEL017-002651-19055PFA-HG · TEL018-004476-1TEL020-000194-1TEL020-000414-1TEL020-000821-1TEL020-006316-1DS020-006316-1 · TEL020-009453-1TEL023-000596-1300-3GT-6 · TEL023-001777-1TEL023-001873-1TEL023-002019-1TS BR940206 8INCH FORK · TEL023-002022-1UNITY-2 ROBOT FORK · TEL024-011756-1P-700-1U · TEL024-022239-1N-400 PTFE 1/2INCH VCR L · TEL024-023345-1TTR91S · TEL024-025135-1TEL026-002087-1TEL026-003184-1TEL026-008467-1TEL026-008704-1TEL026-009821-1TEL026-009822-1TEL027-000232-1TEL027-000429-1AS568-245 · TEL027-002555-1EZ7309-A01X0 · TEL027-002555-1RO 88 102. 8 12 · TEL027-006766-1O-RING · TEL027-100674-1TEL028-006883-1TEL028-012243-1TEL028-015043-1MCK-2040-OU · TEL028-017474-1TEL030-010730-1TEL030-011403-1500654-0809 · TEL030-012801-1TEL031-004427-1NF100-HRV · TEL031-007970-1BZ6N10D · TEL032-000011-1TEL041-007412-1TEL043-001927-1DS043-001927-1 · TEL044-002406-1YWP-EF · TEL045-001149-1LM40 · TEL048-001050-1TEL049-001441-1CS1W-SCB21-V1 · TEL070-100096-1Cleaning Swabs Sticks · TEL071-002427-1Z140175 · TEL1105-300561-13TRANSFER FORK 8inch W-F · TEL1110-333183-11TRANSFER FORK 99.7% · TEL1110-335408-11TEL1110-335409-11TEL1110-337492-11TRANSFER FORK 99.9% · TEL1110-437863-11DS1110-437863-11 · TEL1110-440079-11DS1110-440079-11 · TEL1110-440972-11DS1110-440972-11 · TEL1805-220098-118" shield ring · TEL1805-220098-11RING,SHIELD,T7L5:(85IEM-220)(FIRE 340) · TEL1805-220124-118" ring · TEL1805-220124-11RING,OUTER FOCUS RING(8) · TEL1805-220159-13(U)SHIELD RING · TEL1805-220177-22TEL1805-220203-11shield ring · TEL1805-420042-118" ring · TEL1810-121499-12SHIELTER RING · TEL1810-121499-22RING, SHELTER 8inch · TEL1810-121758-11SHELTER RING · TEL1810-121923-11CEL SILICON 10T CATHODE 8" · TEL1810-121923-11CE+G72:J73L (0808-4999-0070) SILICON (CEL 320-T5) · TEL1810-121926-12INSULATOR UPPER-lldx · TEL1810-121926-12ELECTRODE UPPER(LLDX) - POLISHING · TEL1810-121988-11ELECTRODE UPPER(LLDX) · TEL1810-121988-11ELECTRODE,UPPER (LD-777) 0808-4069-0030, SILICON · TEL1810-121988-11ELECTRODE UPPER (LD-777),ES · TEL1810-150015-11SI UPPER 320mm OD 681 HOLE(INFINION) · TEL1810-220977-12CLAMP RING · TEL1810-221043-15BOTTOM INSULATOR · TEL1810-221439-24TEL SI 8" CATHODE · TEL1810-221439-24ELECTRODE SI · TEL1810-221439-24该版图纸分低阻、中阻 · TEL1810-221439-25SI UPPER ELECTRODE(357 HOLE) · TEL1810-221470-24CRYSTAL CATHODE (8") · TEL1810-221470-25SI ELECTRODE · TEL1810-221470-25ELECTRODE:CRYSTAL(8K-200) · TEL1810-221470-25ELECRODE..CRYSTAL,(8K-180) ,ES · TEL1810-221470-25CRYSTAL CATHODE (8") · TEL1810-221471-24CRYSTAL CATHODE (8") · TEL1810-221471-24TEL1810-221471-24(R2)CRYSTAL CATHODE(F7) · TEL1810-221471-25UPPER ELECTRODE 8" · TEL1810-221471-25ELECRODE:CRYSTAL(8K-180) · TEL1810-222226-11DEPO SHIELD 2(IPP) H : 255.8 · TEL1810-222235-12BOTTOM RING · TEL1810-223063-99Holder upper E（Type 3） · TEL1810-224740-31Top grand ring · TEL1810-224784-14HOLDER F/R(CE-222) · TEL1810-224789-11SI ELECTRODE · TEL1810-224789-11上电极 · TEL1810-224789-11(S)ELECTRODE, UPPER(MM-75) · TEL1810-224852-12SI ELECTRODE 10T · TEL1810-224852-12ELECTRODE, UPPER PLATE MM · TEL1810-323880-13SI INNER FOCUS RING(im) · TEL1810-323880-13INNER FOCUS RING(OLD) 8" · TEL1810-323880-13MSI INNER FOCUS RING · TEL1810-323880-14SI FOCUS RING · TEL1810-323880-14KNINNER FOCUS RING 8" · TEL1810-323881-14SI FOCUS RING · TEL1810-323881-14RING:FOCUS INNER 8"NOTCH · TEL1810-323881-14RING:FOCUS INNER 8"NOTCH C · TEL1810-325485-13F.R COVER-C · TEL1810-328070-11BELLOWS RING · TEL1810-328070-11(U)BELLOWS RING · TEL1810-328661-12KNINNER FOCUS RING · TEL1810-328661-12KNINNER FOCUS RING · TEL1810-328662-12INNER FOCUS RING · TEL1810-328662-12INNER FOCUS RING · TEL1810-329044-11INNER FOCUS RING(7.1T-59) · TEL1810-329044-11(U4)RING FOCUS INNER (0.2) · TEL1810-32915-11KNRING,. FOCUS INNER O.F COOLING(D243) · TEL1810-329156-11RING, FOCUS INNER COOL 235MM SCCM · TEL1810-329156-11INNER FOCUS RING 8" · TEL1810-329157-11SIDE SUPPORT PLATE · TEL1810-329157-11INNER FOCUS RING(6.23T->8T) · TEL1810-329157-11(S)INNER FOCUS RING · TEL1810-329157-11(U9)SI INNER FOCUS RING(RUBBER BONDING) · TEL1810-329157-11KNRING..FOCUS INNER O.F COOLING(D243) · TEL1810-329157-11KNFOCUS RING,UP(TYPE L-205) · TEL1810-329523-11LLD INNER FOCUS RING 250MM LLD SCCM · TEL1810-329535-11M21]SI FOCUS RING(LLDX) · TEL1810-350062-11FOCUS RING, UP(TYPE L-205) · TEL1810-350062-=11FOCUS RING UP FOR INFINION · TEL1880-026696-11ELECTRODE · TEL1880-027152-126" SI ELECTRODE(FOR TE-5000) · TEL1885-322830-4HANDLING ARM (TE8500) · TEL1B05-101002-11TEL1B10-125326-11TEL1B10-453770-11TEL1B14-000038-12AIH-124QS-T5 · TEL1B81-010264-13TEL1B81-010266-12TEL1B81-010278-12TEL1B81-010299-11TEL1B86-070026-12TEL1B86-072389-11TEL1D05-300053-14TEL1D05-300180-11TEL1D05-304010-12TEL1D10-204338-13TEL1D10-302209-14FOCUS RING 8" · TEL1D10-302209-15SI-FOCUS RING(NOTCH) · TEL1D10-302209-15FOCUS RING 8" · TEL1D10-302209-20SI FOCUS RING · TEL1D10-304010-11RING SHIELD B3(DRM2) · TEL1D10-305530-146J-SI-240-3.4(DRM2) · TEL1D10-307164-11RING INSULATOR A7-3 · TEL1D10-307164-11(U4)RING INSULATOR (O-RING)_NLM · TEL1D10-309946-12SI FOCUS RING · TEL1D10-309946-12FOCUS RING
RING,F-8SO-SI-260-3.4A(DRM2),ES · TEL1D10-310020-11SI FOCUS RING 8" · TEL1D10-310020-11(S)DRM FOCUS RING · TEL1D10-310020-11(U)TEL FOCUS RING SI · TEL1D10-310020-11(U5)TEL FOCUS RING(3.1T) · TEL1D10-311372-12RING, INSULATOR A7 LA4-6(CE)(DRM2) · TEL1D10-311373-12RING, INSULATOR A7 (CE)(DRM2) · TEL1D10-311970-11RING · TEL1D10-313199-11SI FOCUS RING · TEL1D10-313897-12RING F-8SO-SI-220 2.5(DRM2) · TEL1D10-409458-12RING-F-SI-260-1.4(DRM2) · TEL1D80-001885-12CERAMIC ARM · TEL1N10-301991-156”FOCUS RING · TEL2105-322841-52TEL2110-131155-16P110-131155-16 · TEL2110-354325-11DS2110-354325-11 · TEL2110-453459-11TEL2110-454534-11DS2110-454534-11 · TEL2110-462163-11TEL2127-000003-11O-RING DU353TEP10 · TEL2180-021254-11TEL2185-035983-11TEL2187-330873-11PM-K44FC21 · TEL2187-340298-12TEL2187-353302-11PM-Y44 · TEL2187-387960-12DS2187-387960-12 · TEL2910-206117-11TEL2910-290041-128INCH TWEEZER · TEL2910-351064-11TEL2910-351065-11TEL2910-3A0944-112910-3A0944-10 · TEL2910-414120-11TEL2910-437924-11TEL2910-490457-12CERAMIC PIN · TEL2980-193239-11TEL2980-193243-11TEL2980-193268-11TEL2980-193308-11CT2980-193308-11 · TEL2981-600374-11TEL
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Brand and model names are used only to describe compatibility and search context. Confirm final specifications against OEM documentation, a physical sample or an approved drawing.