Tokyo Electron (TEL) Spare Parts — page 3
Page 3 of 4 in the Lubanix Tokyo Electron (TEL) Spare Parts catalog, part numbers 3D10-250317-11 to 931044-001. Request a quote from Lubanix.
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Tokyo Electron spare parts · TEL parts · TEL etch components · TEL replacement parts
Part numbers
3D10-250317-11FOCUS RING · TEL3D10-250317-11(SI SHIN)CEL OUTER SH-OX RP470-0.2 · TEL3D10-250317-21OUTER CELL(SHIN/SINGLE) · TEL3D10-250318-11RING FOCUS 8/MIN/CL(SHIN 3.4T) · TEL3D10-25037-11(SI SHIN)CEL OUTER SH-OX RP470-0.2 · TEL3D10-250381-11FOCUS RING, 380-T4.0(CP)T · TEL3D10-250442-31FOCUS RING, 380-T4.0 · TEL3D10-250576-21RING FOCUS 8/MIN/CL · TEL3D10-250639-21SUPER DRM FOUS RING SINGLE · TEL3D10-250755-21_56.5SHIN FOCUS RING 4.8T_56.5 · TEL3D10-250755-21MSHIN COOLING FOCUS RING 360_4.5T(307) · TEL3D10-251097-11ELECTRODE, OX T10-73-C912 NP · TEL3D10-251406-11RING, FOCUS 380-T7.0 · TEL3D10-290318-11RING FOCUS 8/MIN/CL(SHIN 3.25T) · TEL3D10-302020-11CATHODE 12" CEL, OTX, 10-15 · TEL3D10-302020-11SHOWERHEAD SIL SCCM 300MM · TEL3D10-302020-11CEL BODY ASSY, SCCM-OX · TEL3D10-303663-12TEL3D10-350067-11RING, PROTECTION (TE-RP470) · TEL3D10-350401-11SI FOCUS RING(JIN) · TEL3D10-350401-11FOCUS RING 302-303TP T8.6 LV · TEL3D10-351315-12INNER CELL · TEL3D10-401231-11TEL3D80-002403-11TEL3D81-000046-11TYB61L-1/ELIF · TEL3D86-000851-12TEL3D87-002982-13ES3D87-002982-13 · TEL3D87-002984-12TEL3D87-052882-12SILICON RING,PROTECTION (TE GND FLAT) · TEL3M10-100900-144704690-001 · TEL3M10-203455-11TEL3M10-253256-11TEL3M10-254562-11TEL3M10-350982-11TEL3M10-359925-11TEL3M10-409091-12GUIDE LONG PIN WRAP · TEL3M10-409092-11NUT PIN GUIDE · TEL3M10-451143-11PIN TAPER WRAP · TEL3M10-451144-12GUIDE TAPER PIN WRAP · TEL3M39-000020-13PWM010-TPB3 · TEL3M80-000916-11TEL3M80-001285-14TEL3M80-004301-1TEL3M86-024978-H2TEL3M86-029288-13CN7-WT · TEL3M86-029425-13TEL3M86-057736-12TEL3M86-057738-11TEL3M87-025860-11TEL3M87-025865-13TEL3M87-025879-11TEL3M87-028309-1ATEL3M87-030343-13TEL3M87-042765-16TEL3M87-054548-11RS-3000FA · TEL3M87-063307-12TEL3M87-066793-11TEL3M87-067401-11TEL3M87-069369-12TEL3S05-300024-12KEY BAFFLE LINER R(3N) · TEL3S05-300038-11TEL3S10-301211-13TEL3S10-400159-12SCREW CAP M5-L7 VACUUM · TEL3S10-400839-12TEL3S10-453442-11PIN 2M5 LIFTER UP13 · TEL3S27-000008-11TEL3S80-000764-11PLATE,GV XRZ BONDED · TEL3U10-000963-11UJR-9.52RE-RG-0-0.04 · TEL3U80-000273-11TEL3U80-000784-11TEL3U80-000786-11CENTMOD-FA · TEL3U80-000989-11SBX92304454 · TEL3U81-000006-11TEL3U81-002000-11TEL3U86-000562-11TEL3U86-000563-11TEL3U86-000564-11TEL3U86-000565-11TEL3U86-000566-11TEL3U86-000567-11J4A103-5178 · TEL3U86-000799-31TEL3U86-002310-11279201-11-011 · TEL3U86-002311-11TEL42818-001TF442818-001 · TEL434928-001TEL434928-001 REV BTEL43M80-001256-163M80-001256-16 · TEL440458-106TEL444983-005TEL5002-500173-11TEL5003-500110-11TEL5004-400201-11TEL5010-201863-12TEL5010-204485-11TEL5010-316289-11TEL5010-323475-12TEL5010-405555-11CT5010-405555-11 · TEL5010-408040-11TEL5010-409142-11TEL5010-412028-11TEL5010-414517-11TEL5010-417773-11TEL5010-417774-11TEL5010-420123-11TEL5010-501029-12TEL5010-502338-12TEL5010-510452-12TEL5010-516233-11TEL5010-516534-11TEL5010-517760-11TEL5010-522664TEL5010-522677-13TEL5010-523800-11GP450-NLD-12 · TEL5010-552679-11TEL5010-561400-11TEL5010-561440-13TEL5010-623784-11TEL5012-000043-11EVFC10-BL1/2-TR-02 · TEL5014-000749-11TEL5024-001131-14TEL5024-001397-12SFC-SB4 · TEL5040-000050-11HF-KP053 · TEL5041-000066-11TEL5041-000146-11TEL5041-000462-11TEL5041-000952-12TEL5041-000974-12TEL5041-003837-11TEL5043-000015-11LT12-LHP-NDK · TEL5044-000203-11UF-EXX22-TE1 · TEL5044-000425-120YDK-562 · TEL5080-004745-12LITHIUS CONTROLLER · TEL5080-104830-11TEL5080-105091-11CT5080-105091-11 · TEL5080-105464-11GD414116 · TEL5080-105703-11TEL5080-106038-11BXW-02-10L · TEL5080-192359-11TEL5080-192360-11TEL5080-192893-11109L0924H4D01 · TEL5080-194231-11TEL5080-194552-11TEL5080-194553-11TEL5080-194615-11XY-HS0026-8 · TEL5084-000372-11CT5084-000372-11 · TEL5084-300044-11TEL5084-300098-11TEL5085-404360-11TEL5085-404901-11TEL5085-413053-13TEL5085-420555-14TEL5085-420555-14P-8 · TEL5085-426268-13TEL5085-428448-61TEL5085-428992-13TEL5085-429236-13TEL5085-429633-14TEL5085-431396-13TEL5085-432827-13GAP(CUP) ASSY, JIG · TEL5085-436692-11TEL5085-438288-13TEL5085-440719-12TEL5085-447214-18CT5085-447214-18 · TEL5085-452293-11TEL5085-452406-12TEL5085-453313-14TEL5085-454979-11FTRA-X · TEL5085-470749-12TEL5086-400156-11TEL5086-400661-11CT5086-400661-11 · TEL5086-401731-11TEL5086-401747-11103F5508-70XE42 · TEL5086-401857-11TEL5086-403977-61TEL5086-405157-11TEL5086-405319-12AMX5 · TEL5086-408023-11TEL5086-415028-12TEL5086-420989-11TEL5087-406974-61TEL5087-408573-13TEL5087-408573-13HJ-75306EWED · TEL50Z7-684666-11TEL5110-304112-11TEL5110-404182-11TEL5180-000289-11MH-8080A · TEL5182-002129-11XS14FN_R · TEL5U80-000195-11TEL5U80-000196-11L15U80-000196-11 · TEL5U80-000197-11UTKE1356SRSNP-171 · TEL5U80-000198-11UTKE1356SRSNP-172 · TEL5U80-000199-11L15U80-000199-11 · TEL5U80-000200-11UTKE1356SRSNP-174 · TEL5U80-000201-11UTKE1356SRSNP-175 · TEL5U80-000202-11UTKE1356SRSNP-176 · TEL810-321555-4INSULATOR PIPE · TEL920156-004TF920156-004 · TEL922137-002S2847 W1328-2 · TEL929007-002TEL931044-001TEL
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Brand and model names are used only to describe compatibility and search context. Confirm final specifications against OEM documentation, a physical sample or an approved drawing.