Tokyo Electron (TEL) Spare Parts — page 2
Page 2 of 4 in the Lubanix Tokyo Electron (TEL) Spare Parts catalog, part numbers 2981-600408-12 to 3D10-250317-11. Request a quote from Lubanix.
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Tokyo Electron spare parts · TEL parts · TEL etch components · TEL replacement parts
Part numbers
2981-600408-12TEL2981-600409-11TEL2985-409052-13TEL2985-437840-11TEL2985-479723-12CT2985-479723-12 · TEL2985-498341-12TEL2986-400890-13TEL2986-400930-13TEL2986-437282-13TEL2D10-258483-21RING,MONO-SI FLAT TOP-GND 450.5 · TEL2L05-250034-11RING,SHIELD TOP-H(PH-TU) V2 · TEL2L05-250035-11TEL2L05-250058-11RING,INSULATOR IR FLAT Q V2E · TEL2L05-250059-11RING,INSULATOR OR FLAT Q V2E · TEL2L05-250211-11TEL2L05-250630-2164024WK-63021 · TEL2L05-250636-215Y010WK-63621 · TEL2L05-250829-21TEL2L05-350037-11COVER RING,360.9 Q V2 · TEL2L05-350038-11RING,QZ GND 5.0-T16.5 Q V2 · TEL2L05-350184-11TEL2L05-350347-11TEL2L05-350351-11RING, INSULATOR COVNVEX FRTC · TEL2L05-450106-11BLOCK GND-S1 GAP PLUG 2.5 · TEL2L10-150079-13TEL RK2 ESC · TEL2L10-151982-11TEL RK4 ESC · TEL2L10-152588-11TEL NV3 ESC · TEL2L10-152773-11TEL MK3 ESC · TEL2L10-160988-11TEL RK5 ESC · TEL2L10-250317-11RING · TEL2L10-250509-11TEL2L10-250520-11SI_VIGUS PX INNER CEL · TEL2L10-250520-11CEL,CL380-364-0.5(PH) V2 · TEL2L10-250520-11(364)CEL,CL380-364-0.5(PH)V2 · TEL2L10-250701-11RING(L), SI GND STEP V2 · TEL2L10-250820-11CEL,INNER(PH-MG) V2 · TEL2L10-25106-21FOCUS RING(LAB),360-R&D,4.6T · TEL2L10-251061-21FOCUS RING,AD360_T4.5(320)_VIGUS · TEL2L10-251061-21FOCUS RING(LAB), 360-R&D, 4.6T · TEL2L10-251061-21MSI_FOCUS RING, AD360_T4.5(320) · TEL2L10-251162-11VIGUS GROUND RING · TEL2L10-251162-11RING(L), SI GND STEP V2E · TEL2L10-251182-11VIGUS FOCUS RING · TEL2L10-251342-11CEL,INNER ST(NEST)V2 · TEL2L10-251342-11CEL INNER ST(NEST) V2 · TEL2L10-251343-21CEL, OUTER ST (NEST) V2 · TEL2L10-25136411TEL2L10-251444-11SI MASK SPACER RING · TEL2L10-251482-11SJ-6215-SB · TEL2L10-251497-11TEL2L10-251514-11FOCUS RING LAB 360-T4.5-306 · TEL2L10-251685-11RING(L),SI GND STEP BSP V2 · TEL2L10-251685-21RING, (L) SI GND STEP BSP V2 · TEL2L10-251853-11RING, F-SI-D380 D297.0-T2.8 S-MF · TEL2L10-251978-11RING,FOCUS AD360-297.1 ATCC V2 · TEL2L10-252017-11RING, FOCUS 360-T12.1 ATCC · TEL2L10-252404-11RING FOCUS T5G50 · TEL2L10-252542-21(S)ELECTRODE ( VIGUS 0.5-0.8 HOLE ) · TEL2L10-252706-11SI; FOCUS RING;0823-0400-001 · TEL2L10-252779-11RING FOCUS 310-4.8G50L CONCAVE · TEL2L10-252838-11RING, FOCUS LAB 320-T5 WIDE AN · TEL2L10-252838-11RING, FOCUS LAB 320-T5 WIDE AN · TEL2L10-252987-21INNER CEL_VIGUS MK4 · TEL2L10-252987-21ELECTRODE, INNER 0.5-0.8PH V2 · TEL2L10-253065-21(S)FOCUS RING ( VIGUS-5.5T ) · TEL2L10-253072-11RING, F-SI-D380 D297-T2.6 D4.8 · TEL2L10-253630-11ELECTRODE (0.5~0.8 HOLE) · TEL2L10-253630-11ELECTRODE, SS 0.5-08 H606 V2 · TEL2L10-253631-11ELECTRODE, FLAT 0.5~0.8H606 V2 · TEL2L10-253631-11ELECTRODE, FLAT 0.5-0.8 H606 V2 · TEL2L10-253631-21TEL2L10-253683-21TEL2L10-253833-11RING(L), SI GND VIX-54 · TEL2L10-254167-11RING(SI.6), FOCUS360-T3.4 MP · TEL2L10-254186-21FOCUS RING (111,4.3T) · TEL2L10-254212-21RING, MONO-SI FLAT TOP-GND · TEL2L10-254262-11RING, MONO-SI FLAT TOP-GND · TEL2L10-254262-21SI GROUND RING · TEL2L10-254262-21RING, MONO-SI FLAT TOP-GND · TEL2L10-254267-21RING FOCUS 330-302.6-T3.2 · TEL2L10-254267-21VIGUS FOCUS RING · TEL2L10-254327-21RING FOCUS ATC-BSP 7.5-55-302 · TEL2L10-254608-11ELECTRODE, FLAT T14 H932 · TEL2L10-254608-11ELECTRODE, FLAT T14 H932 · TEL2L10-254608-21ELECTRODE, FLAT T14 H932 · TEL2L10-254608-21(M)RK4 INNER CEL MOD(T=19) · TEL2L10-254649-11RING,FOCUS 310-T4 WIDE AN · TEL2L10-254685-11RING · TEL2L10-254951-21RING FOCUS 320-T5 NO HOLE · TEL2L10-255149-11RING, FOCUS T3.35 NOMF FRTC · TEL2L10-255149-21FOCUS RING_3.35T RK4 FOCUS RING · TEL2L10-255160-21TEL2L10-255185-21TEL2L10-255186-21RING FOCUS 325-315-T3.6 · TEL2L10-255346-11RING, F-SI-T3.4-2.9 · TEL2L10-255379-11ELECTRODE, INNER DC2 · TEL2L10-255379-11电极 · TEL2L10-255413-11RING,FOCUS 360-T3.4 MP-AN · TEL2L10-255440-21TEL2L10-255441-21VIGUS RK4 3.2T FOCUS RING · TEL2L10-255875-21RING. FOCUS T4 NOMF FRTC · TEL2L10-255879-11ELECTRODE, INNER DC2 · TEL2L10-255879-11EL+G21:I21ECTRODE, INNER DC2 · TEL2L10-255879-21ELECTRODE, INNER DC2 · TEL2L10-255880-21ELECTRODE, OUTER DC2 · TEL2L10-255880-21(U1)RK4 CEL OUTER(Damper) · TEL2L10-255881-11SI-GND SI MULTI · TEL2L10-255881-21RING, SI DC2 · TEL2L10-255931-11ELECTRODE, OUTER ST11.7 DC2 · TEL2L10-255931-11ELECTRODE, OUTER ST11.7 DC2 · TEL2L10-256131-213.25 F/R · TEL2L10-256263-11ELECTRODE, INNER DC2-15 · TEL2L10-256266-11ELECTRODE, OUTER DC2-15 · TEL2L10-256569-11RING,FOCUS T3.1 NOMF FRTC · TEL2L10-256905-11RING, FOCUS T3.2 TO0 · TEL2L10-256905-11RING, FOCUS T3.2 TOO · TEL2L10-257234-21TEL2L10-257258-22RING, FOCUS T2.25 NOMF FR28 · TEL2L10-257632-11RING, FOCUS T2.35-2.2 NOMF FR28 · TEL2L10-257644-213.80T FOCUS RING VIGUS MK4 · TEL2L10-258303-11RING, FOCUS T3.4 TO0 · TEL2L10-258483-21RING, MONO-SI FLAT TOP-GND 450.5 · TEL2L10-258514-21RK4 FOCUS RING 3.5T(0.02) · TEL2L10-258516-21RING, FOCUS T.24 NS FR28 SM · TEL2L10-258650-21FOCUS RING_SI(3.65T)RK4 · TEL2L10-258735-21RING · TEL2L10-258746-21RING, FOCUS T2.45 SMF FR28 · TEL2L10-258753-21RING, FOCUS T2.3 SMF FR28 · TEL2L10-258753-21RING, FOCUS T2.2 SMF FR28 · TEL2L10-259614-11RING, MONO-SI T-GND450.5 T11.6 · TEL2L10-259677-213.15T LARGE DIAMETER FOCUS RING · TEL2L10-259886-11RING, FOCUS T3.3 TO0 · TEL2L10-350932-13VIGUS SAPPHIRE LIFT PIN · TEL2L10-359931-11RING, FOCUS 380-DM · TEL2L10-450605-11RK4 SAPPHIRE WINDOW · TEL2L10-459873-11TEL2L10-502879-21RING, FOCUS T2.45 SMF FR28 S · TEL2L20-254608-21CEL T14 FLAT_RK4 · TEL2L43-000045-11RCB-43-1E · TEL2L80-002192-11FCA-100R / FCV-202A03/R · TEL2L81-050010-13TAB22B-1/SYS2 · TEL2L81-050031-72TAB341-7/AC-LF · TEL2L81-050055-1182M0J091A · TEL2L81-050068-12TYB61B-1/GAS1-LF · TEL2L82-054665-11TEL2L86-000292-11TEL2L86-055655-12TEL2L87-077140-1XTEL2L87-077142-11FA1536 · TEL2L87-083604-12TEL2S10-201432-11TEL2S10-405101-11TEL2S24-000031-11TEL2S86-003592-11TEL2S86-008578-11C3439150-001 · TEL301996-001TF301996-001 · TEL3802-420084-11SVW686ZZSTP · TEL3810-324452-11TEL3810-427511-11TEL3880-200030-21TTLM-11 ELVIF-F · TEL3880-20013-12TEL3887-213789-12TEL3887-214685-12HPX-T1 · TEL3887-215582-11AZM 170-02ZRK · TEL3887-230860-11TEL3B44-000072-11TEL3B86-004966-11SR3B86-004966-11 · TEL3D05-250025-11RING,SHIELD UPPER,STRAIGHT · TEL3D05-300142-13INSULATOR,ESC ENCLOSURE(COC).. · TEL3D10-100845-11ES3D10-100845-11 · TEL3D10-200330-12FOCUS RING 300MM(301TYPE) · TEL3D10-200997-11FOCUS RING PM · TEL3D10-201448-11SI FOCUS RING(TE 3.4T) · TEL3D10-201448-11SCCM FOCUS RING · TEL3D10-201448-13FOCUS RING 360-302-C · TEL3D10-201448-13FOCUS RING,360-302-C · TEL3D10-201448-21FOCUS RING · TEL3D10-201448-21RING · TEL3D10-201448-21OCUS RING 360-302-C · TEL3D10-202364-12CEL,INNER(TE-T10-P-LABY) · TEL3D10-202372-11TE 용 PROTECTION RING · TEL3D10-202375-12SILICON CEL,OUTER[TE349-LABY/SINGLE] · TEL3D10-202375-22CEL, OUTER(TE-349-LABY-GNDFLAT) · TEL3D10-202375-22TE 용 OUTER CELL · TEL3D10-202489-11FOUCS RING 380-T4.0 · TEL3D10-250012-11CEL,INNER (TE-LABY304) · TEL3D10-250012-11TE 용 INNER CEL · TEL3D10-250045-11FOCUS RING, 380-T4.0 301-3PIN · TEL3D10-250158-11FOCUS RING(303TYPE) · TEL3D10-250182-11SI GROUND RING · TEL3D10-250195-11FOCUS RING, 360-305-LT-8.6 · TEL3D10-250195-11TE 용 FOCUS RING · TEL3D10-250197-11FOCUS RING_TAPER L TYPE · TEL3D10-250266-11(S-2)ELECTRODE ( TE ) · TEL3D10-250281-11JIB 용 FOCUS RING · TEL3D10-250281-11(S)FOCUS RING, J302-303-8.3-298.2 · TEL3D10-250306-11SI FOCUS RING (TE,7.3T) · TEL3D10-250316-11(SI-SHIN)CEL INNER(SH-OX1.75) · TEL3D10-250316-11(SI-SHIN)CEL INNER(SH-OX1.75) · TEL3D10-250317-11FOCUS RING · TEL
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