Semiconductor Etch Chamber Spare Parts — page 3
Page 3 of 3 in the Lubanix Semiconductor Etch Chamber Spare Parts catalog, part numbers 713-085131-001 to 849-086924-021. Request a quote from Lubanix.
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semiconductor etch chamber parts · RIM parts · chamber insulator · Shield Ring · etch replacement parts
Part numbers
713-085131-001TUBE,TEFLON,.25 OD,LINER,2300 · LAM713-182341-007INSERT,HRVA,IRIS CELL, 11.55,14.5 · LAM713-182341-009INSERT,HRVA,IRIS CELL, 11.60,14.5 · LAM713-196778-001GASKET,SAC MEMBRANE,FUSION · LAM713-198058-002GASKET,DC MEMBRANE,FUSION · LAM713-238718-002NOZZLE.TIP,EBR,HD PEM · LAM715-008220-105DR,PLASMA,BARRIER,BMPR,ROCKER V,PM · LAM715-011535-001RING,CLAMP-UPPER ELECTRODE · LAM715-011565-001BOLT,CLAMP RETAINING · LAM715-011565-002BOLT,CLAMP RETAINING · LAM715-011565-003BOLT,CLAMP RETAINING · LAM715-011622-101LFTR,WFR,4-PIN · LAM715-011622-201LFTR,WFR,4-PIN,ULTEM · LAM715-011622-221LFTR,WFR,4-PIN,ULTEM · LAM715-011628-001DIVIDER,FLOW · LAM715-011982-001CAP,PLUNGER HOUSING,LOWER · LAM715-038611-001SOCKET,PLASMA SENSOR · LAM715-038611-002SOCKET,PLASMA SENSOR · LAM715-189682-001RING,CUP BOTTOM,APC,1MM · LAM715-194712-003RING,DC,FUSION · LAM715-228142-001PROBE,POT,3N COBALT,FUSION CELL · LAM715-304201-001HOLDER,LIFT PIN · LAM715-304202-001CAP,RETAINER,LIFT PIN HOLDER · LAM716-003543-001HOT EDGE RING (315ESC) · LAM716-003543-123 REV.FRING, HOT EDGE, SI, DUAL SLOPE 300MM · LAM716-003543-135 REV.ERING, HOT EDGE, SI, DUAL SLOPE 300MM · LAM716-005773-005FOCUS RING · LAM716-006721-001INSULATOR RING · LAM716-011057-002RING FILLER UPPER · LAM716-011427-003CERAMIC DISK · LAM716-011540-001UPPER FACE RING · LAM716-011563-063WAFER CLAMP 6INCH · LAM716-011563-151UNIVERSAL CLAMP RING · LAM716-011563-161WAFER CLAMP 6 INCH · LAM716-011565-002BOILT CLAMP RETAINING · LAM716-011570-001ORIFICE(PUMP) · LAM716-011638-006FOCUS RING · LAM716-011651-006WAFER CLAMP EDGE RING · LAM716-011758-016EDGE FOCUS RING · LAM716-011830-006FOCUS RING · LAM716-011923-001ATTACHMENT RING · LAM716-017544-001SI HOT EDGE RING · LAM716-018614-081FOCUS RING 9600 NOTCH · LAM716-020904-018RING EDGE FOCUS · LAM716-020905-001FILLER RING · LAM716-023013-004HOT EDGE RING · LAM716-023013-005HOT EDGE RING · LAM716-023013-015HOT EDGE RING · LAM716-023013-027SI HOT EDGE RING · LAM716-023013-120HOT EDGE RING · LAM716-028028-004RING ELECTRODE · LAM716-028123-002UPPER FILLER RING · LAM716-028721-261UNIVERSAL CLAMP RING · LAM716-028721-268CLAMP 6 INCH · LAM716-028721-288CLAMP RING 4528 · LAM716-028725-161UNIVERSAL CLAMP RING · LAM716-030135-001EDGE RING 8 NOTCH · LAM716-030136-001RING EDGE 6" ESC · LAM716-031257-533EDGE RING · LAM716-031453-001R FLR LWR CHBR · LAM716-031453-002LOWER FILLER RING · LAM716-040738-120HOT EDGE RING FLEX45 (L/P) · LAM716-040738-220HOT EDGE RING FLEX45 (L/P) · LAM716-040738-413EDGE RING · LAM716-040738-427EDGE RING 75 · LAM716-040738-432SI_RING_HOT_EDGE_RING_FLEX_ES_ · LAM716-040738-439EDGE RING(5.5T-45) · LAM716-040738-471SI HOT EDGE RING(FOR FLEX DX_L/P) · LAM716-043436-021-DSI COUPLING RING · LAM716-044668-001HOT EDGE RING · LAM716-044668-571 REV.EHOT EDGE RING · LAM716-044668-930HOT EDGE RING(HOLE TYPE) · LAM716-047038-427SI HOT EDGE RING · LAM716-057993-003INJ DUAL FACESEAL CER · LAM716-064782-602LAM FLEX ELECTRODE · LAM716-069688-005INNER CELL · LAM716-069688-022SHOWER PLATE · LAM716-069688-022 REV.FELTD,INR,SI,300MM(TALON INNER) · LAM716-069688-041 REV.EELCTD, INR, SI, LG R, 300MM, POL · LAM716-069688-058ELCTD, INR SI 300MM FOR FLEX FSE · LAM716-069688-058 REV.HPearl Talon Inner UEL · LAM716-069688-058 REV.JPearl Talon Inner UEL · LAM716-069688-062 REV.DFLEX-FX INNER ELECTORDE · LAM716-069688-076FLEX-GX/GX_E INNER ELECTRODE · LAM716-069688-082 REV.BELCTD INR, SI, POLISHED, FLEXFX · LAM716-072567-418(S)EDGE RING(0 degree) · LAM716-072576-415CER HOT EDGE RING · LAM716-072576-428SILICON_RING,HE,4XX,ESC,W/FLAT · LAM716-073979-004SI UPPER ELECTRODE_A_ELCTD,SI,300 · LAM716-073979-032 REV.JELCTD, MONO TALON +, CZ, .18 STE · LAM716-073979-074MONO TALON CEL · LAM716-073979-136SILICON(SI)_SILICON ELECTRODE MONO T · LAM716-073979-152ELCTD, MT PLUS,.CZ,.10 STEP · LAM716-073979-851Upper Electrode GL · LAM716-074512-002PIN LIFTER-LOADLOCK · LAM716-077916-001TALON OUTER · LAM716-081661-803FLEX FL HOT EDGE RING · LAM716-082039-001SI ELECTRODE_CORE_OUTER_ELECTRODE · LAM716-087139-013RING SI COUPLING FLEX-ES ELECTRO · LAM716-087943-913GX COVER RING · LAM716-087945-020COOLED EDGE RING · LAM716-087945-020 REV.BRING,EDGE,5XX,CER,296MM,NP 50D,13.6D · LAM716-087945-04545° COOLED EDGE RING FOR FLEX EX · LAM716-087945-071 REV.CRING, EDGE 5XX 296MM NP 350 13.6D · LAM716-087945-072COOLED EDGE RING 45˚ · LAM716-087945-077 REV.BSI EDGE RING CER(15D)_FLEX FX · LAM716-087945-254SI EDGE RING 45D_13.3 · LAM716-087945-275 REV.BRING,EDGE,5XX,296MM,NP 350,13.0D · LAM716-087945-849NNYNN 6.86T SI EDGE RING · LAM716-087945-863FLEX-GX CER HCR · LAM716-087945-868FLEX GX-CER-HCR (Si) · LAM716-087945-964C_FLEX GX_CER_HCR_SI · LAM716-089596-020-BFLEX EX INNER CEL · LAM716-089596-027Si Upper Electrode 0.16Step · LAM716-140068-001RING FOCUS ESC 6" · LAM716-140118-001RING FOCUS ESC 8 · LAM716-140139-001HOT EDGE RING · LAM716-140139-008HOT EDGE RING · LAM716-140139-211HOT EDGE RING HIGH WALL · LAM716-140139-213SI FRONT END HOT EDGE · LAM716-140139-3118"HOT EDGE RING · LAM716-140163-001HOT EDGE RING · LAM716-230577-268FLEX HX NARROW COOL EDGE RING · LAM716-250514-001CLAMP SHADOW · LAM716-330045-001EDGE RING 9400 · LAM716-330045-004EDGE RING,NOTCHHED · LAM716-330045-281EDGE RING · LAM716-330045-282EDGE RING PTX · LAM716-330045-381R EDGE NON LANDED 8" NOT 96PTX · LAM716-330121-001WINDOW RF SHAPED FIXED GAP · LAM716-330122-002TOP PLATE · LAM716-330131-001TCP CERAMIC DISK · LAM716-330191-082FOCUS RING · LAM716-330504-061FOCUS RING · LAM716-330504-064FOCUS RING · LAM716-330504-082RING FOCUS FLAT 9608 · LAM716-330890-001BOTTOM SHADOW RING · LAM716-330892-005PTX GDP · LAM716-330892-007PTX GDP · LAM716-330892-507PTX GDP · LAM716-330915-001CERAMIC INSERT · LAM716-331051-002BOTTOM SHADOW RING · LAM716-331051-006BOTTOM SHADOW RING · LAM716-440054-108RING FOCUS ADAPTER · LAM716-440241-001RING BOTTOM LWR CHAMBER · LAM716-443086-308(U1)SILICON HOT EDGE RING · LAM716-443086-401HPT HOT EDGE RING · LAM716-443086-401 REV.BR, H EDGE SI SGL XTAL H WALL 8" · LAM716-443086-405AHPT HOT EDGE RING · LAM716-443086-408HPT EDGE RING(10L) · LAM716-443086-701 REV AHOT EDGE RING · LAM716-443129-001RING FOCUS ESC INNER 8" · LAM716-460216-001FOCUS RING DSQ · LAM716-540198-001WINDOW · LAM718-094523-261ASSY ELCTD ESC 6" M3RFLT · LAM718-094523-281ASSY ELCTD ESC 8" NOTCHED · LAM718-094756-061ELCTD UPR 6" ESC MJR FLT · LAM718-094756-081ELCTD CAP GD RING ESC 8" NCH · LAM720-009531-004SCR,FLH,PCTFE,6-32 · LAM720-009531-006SCR,FLH,PCTFE,6-32 · LAM720-009531-008SCR,FLH,PCTFE,6-32 · LAM720-009531-010SCR,FLH,PCTFE,6-32 · LAM720-009531-012SCR,FLH,PCTFE,6-32 · LAM720-009531-014SCR,FLH,PCTFE,6-32 · LAM720-009531-016SCR,FLH,PCTFE,6-32 · LAM720-009531-018SCR,FLH,PCTFE,6-32 · LAM720-009531-020SCR,FLH,PCTFE,6-32 · LAM720-009531-022SCR,FLH,PCTFE,6-32 · LAM720-009531-024SCR,FLH,PCTFE,6-32 · LAM720-009531-026SCR,FLH,PCTFE,6-32 · LAM754-205331-001CREST-TO CREST WAVE SPRING · LAM754-294795-001GAP TYPE SPIRAWAVE · LAM799-303598-002PROBE,NWPK,ERGONOW,CSF504,V4010,4L,CHM B · LAM810-321555-4INSULATOR PIPE · TEL839-011906-001ELECTRODE SILICON 6" · LAM839-011907-001ELECTRODE SILICON 8" · LAM839-011907-100ELECTRODE SILICON 8" · LAM839-011907-111ELECTRODE SILICON 8" · LAM839-011907-222ELECTRODE SILICON 8" · LAM839-011907-334ELECTRODE SILICON 8" · LAM839-011907-902ELECTRODE SILICON 8" · LAM839-011907-912ELECTRODE SILICON 8" · LAM839-011907-913ELECTRODE SILICON 8" · LAM839-011907-9138" SI ELECTRODE · LAM839-015480-003SI ELECTRODE · LAM839-020965-005(S)ASSY ELCTD OUTER TC 300MM · LAM839-020965-320 REV.EELECTD, OUTER, .18 STEP, 300MM, CLN · LAM839-021113-002(S)ASSY ELCTD INNER TC 300MM · LAM839-044157-031FLEX45 INNER ELECTRODE ASS'Y · LAM839-044157-331ELECTD, INR, 8-32 OFFSET, CLN · LAM839-086924-045ASSY,STUD,SOCKET,OE · LAM839-086924-046ASSY,STUD,SOCKET,C SHROUD · LAM839-086924-050ASSY,STUD,SOCKET,IE · LAM839-443215-514ELECTRODE SILICON 8" HPT · LAM839-443215-544ELECTRODE SILICON 8" HPT · LAM849-086924-021ASSY,STUD,SOCKET · LAM
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