Semiconductor Etch Chamber Spare Parts
Lubanix supplies etch-chamber insulators, isolation components, Focus Rings, Shields, plates, gas-distribution parts and related RIM components. These
Related search terms
semiconductor etch chamber parts · RIM parts · chamber insulator · Shield Ring · etch replacement parts
Part numbers
0020-20114ISOLATOR DC BIOS · AMAT0020-20126STAND OFF CERAMIC DC BIOS · AMAT0020-20215HOUSING DOUBLE RF COIL · AMAT0020-21664INSULATOR SOURCE 13" · AMAT0020-22975INSULATOR 8 WAFER · AMAT0020-25854BLADE BUFFER · AMAT0020-25917ISOLATOR DC BIAS MODIFIED · AMAT0020-28907ISOLATOR DC BIAS MODIFIED · AMAT0020-30287ADAPTER RING · AMAT0020-31918PLUG DC ESC · AMAT0040-39990ESC ASSY 200mm DUAL ZONE SUPER E · AMAT0040-40978ESC ASSY 200mm DUAL ZONE E-MAX · AMAT020-103780RING SINGLE · AMAT0200-00137FOCUS RING DPS · AMAT0200-00177SI COLLAR(SUPER-E) · AMAT0200-00230DEP RING 8" SNNF CERAMIC · AMAT0200-00234ISOLATOR BKM1 ENHANCED TXZ 200MM · AMAT0200-00247CAPTURE RING DPS · AMAT0200-00250RING CAPTURE C-ESC · AMAT0200-00255COVER · AMAT0200-00261CHAMBER INSERT · AMAT0200-00264RING FOCUS 145MM JMF · AMAT0200-00276PIN WAFER GUIDE · AMAT0200-00277PLATE GUIDE · AMAT0200-00296SLEEVE JUNCTION · AMAT0200-00307RING CAPTURE C-ESC · AMAT0200-00316LINER MIDDLE · AMAT0200-00317LINER BOTTOM · AMAT0200-00321DPS FOCUS RING · AMAT0200-00353PIN SPACER · AMAT0200-00354RING PURGE · AMAT0200-00402ISOLATOR TOP · AMAT0200-00403ISOLATOR MIDDLE · AMAT0200-00404ISOLATOR BOTTOM · AMAT0200-00410Uni-Insert Gas Distribution 88 holes Quartz · AMAT0200-00417RING INSERT SILICON FLAT 150MM · AMAT0200-00454BUSING LIFT PIN · AMAT0200-00481BOTTOM LID · AMAT0200-00576PIN WEIGHT · AMAT0200-00621SHADOW RING CERAMIC · AMAT0200-00622OUTER RING · AMAT0200-00624PURGE RING · AMAT0200-00639SI INSERT RING 200MM NOTCH · AMAT0200-00639 REV002INSERT RING SILICON 200MM NOTCH · AMAT0200-00681WXZ+ HEATER CERAMIC PURGE RING · AMAT0200-00689LID. LINER · AMAT0200-00796139MILS LIFT PIN · AMAT0200-00852SHADOW RING · AMAT0200-00933COVER SCREW CATHODE LINNER · AMAT0200-00945CAPTURE RING DPS · AMAT0200-00947SILICON COLLOR · AMAT0200-00968ISOLATOR · AMAT0200-00969POMPING LINER FSG-TEOS · AMAT0200-00980SINGLE RING CERAMIC 300MM NOTCH · AMAT0200-00991CERAMIC BLADE,HIGH SHOE · AMAT0200-01009TOP NOZZLE · AMAT0200-01239Si Insert Ring(Modified ID) · AMAT0200-01326INSULATOR SOURE ADAPTOR · AMAT0200-01336FOCUS RING · AMAT0200-01427ISOLATOR · AMAT0200-01509SI INSERT RING · AMAT0200-01511TOP RING,NM,200MM,OXIDE · AMAT0200-01766MANIFOLD · AMAT0200-01797SI INSERT RING · AMAT0200-01797 REV003INSERT RING, NM, 300MM eMAX · AMAT0200-01808FOCUS RING · AMAT0200-01820SI INSERT RING · AMAT0200-01863COVER MINIMUM CONTACT · AMAT0200-01991RING FINGER LIFT · AMAT0200-02043OUTER INSULATOR · AMAT0200-02160WINDOW · AMAT0200-02384SILICON L-SHAPE INSERT RING · AMAT0200-02385AMAT INSERT RING · AMAT0200-02396LINER CERAMIC MIDDLE · AMAT0200-02469MANIFOLD · AMAT0200-02575139MILS LIFT PIN · AMAT0200-02576BASE RING · AMAT0200-02577PLATE FINGER,LIFT RING · AMAT0200-02597INSULATOR INTERNAL 300MM · AMAT0200-02747LID · AMAT0200-02916DEPOSITION RING · AMAT0200-02972LINER CERAMIC TOP · AMAT0200-03233INSERT RING(15L) · AMAT0200-03296 REV003INSERT RING, NM L-SHAPE, FLAT, 200MM E-M · AMAT0200-03297 REV002TOP RING, SILICON, INTLK 200MM, E-MAX · AMAT0200-03312HOOP LIFT 140 FXD FLOAT 300MM · AMAT0200-03313BASE RING · AMAT0200-03314LIFT PIN 170 FIXED FLOATING 300MM · AMAT0200-03414LINER CERAMIC BOTTOM · AMAT0200-03472INSERT RING SI · AMAT0200-03555SI INSERT RING(E-MAX/3.5T) · AMAT0200-03559SI TOP RING(E-MAX/4.3T) · AMAT0200-03736KSI INSERT RING(PRO) · AMAT0200-04017RING DEPOSITION NARROW OD E/T 300MM · AMAT0200-04186RING(TOP COLLER,SI,300MM) · AMAT0200-04235ISOLATOR CERAMIC 300MM PRODUCER · AMAT0200-04619SINGLE RING · AMAT0200-04635LIFT PIN · AMAT0200-04862SINGLE RING · AMAT0200-04969HUB CENTER DUAL SIDE FEED · AMAT0200-04995GAS INJECTOR · AMAT0200-05032SI INSERT RING · AMAT0200-05032 REV002INSERT RING, NMS, L-SHAPE, 300MM EMAX · AMAT0200-05216CERAMIC ESC COVER · AMAT0200-05262DEPOSITION RING AL W/ECC DUAL AUTI LIFT 300MM PVD · AMAT0200-05263COVER RING CERMAIC AL CHAMBER C2 300MM PVD · AMAT0200-05335RING SINGLE 195MM SEMI NOTCH CERAMIC · AMAT0200-06073RING DEPOSITION Cu COIL EXTENDED TRENCH 300MM · AMAT0200-06616NOZZLE INSERT TGN Y2O3 · AMAT0200-08670RL-COLLAR, SINGLE CRYSTAL SI · AMAT0200-09035LIFT PIN · AMAT0200-09071PIN WAFER LIFT · AMAT0200-09072SHIELD 200mm · AMAT0200-09075ADAPTOR PUMPING PLATE · AMAT0200-09182ADAPTER RING · AMAT0200-09185LIFT PIN · AMAT0200-09282RING INNER SHADOW · AMAT0200-09384PIN WAFER LIFT 6 UNIVERSAL · AMAT0200-09559COVER 200mm, 6 HOLE · AMAT0200-09567SHIELD 200mm IMO · AMAT0200-09572SI COLLAR RING · AMAT0200-09612CAP 1/4 TURN RETAINER · AMAT0200-09614PIN LIFT · AMAT0200-09636PLUG DC · AMAT0200-09670CLAMP RING 6 INCH · AMAT0200-09696FINGER · AMAT0200-09716PIN LIFT HEATER · AMAT0200-09723SCREW GUIDE PIN HEATER · AMAT0200-09735COVER CLAMP RING · AMAT0200-09746CERAMIC RING · AMAT0200-09750PLUG DC · AMAT0200-09757CLAMP RING 6 INCH · AMAT0200-09759SHIELD · AMAT0200-09822CLAMP 5INCH · AMAT0200-09824SHIELD 5" · AMAT0200-09827RING PEDESTAL · AMAT0200-09828RING FOCUS · AMAT0200-09933PIN LIFT · AMAT0200-09974PUMPING RING · AMAT0200-09997OUTER SHADOW RING · AMAT0200-10027SSGD INNER · AMAT0200-10036RING MIDDLE · AMAT0200-10040RING OUTER · AMAT0200-10074LIFT FINGER · AMAT0200-10087SSGD OUTER · AMAT0200-10111LIFT PIN · AMAT0200-10143CHAMBER INSERT · AMAT0200-10144ISOLATOR · AMAT0200-10157JUNCTION LINER · AMAT0200-10158SLEEVE JUNCTION · AMAT0200-10160CERAMIC LINER · AMAT0200-10163PUMPING LID ISOLATOR · AMAT0200-10164PUMPING INSERT · AMAT0200-10169EDGE RING · AMAT0200-10191SHIELD · AMAT0200-10194SHIELD TAPERED · AMAT0200-10208INNER RING · AMAT0200-10209OUTER RING · AMAT0200-10246Uni-Insert Gas Distribution 88 holes Quartz · AMAT0200-10263WASHER INSULATING · AMAT0200-10284LIFT PIN · AMAT0200-10377RING SINGLE · AMAT0200-10446Si INSERT RING 200MM NOTCH · AMAT0200-10526PUMPING RING · AMAT0200-10650CERAMIC PUMPING CHANNEL · AMAT0200-12817 REV004INSERT RING, EMAX 3.4T · AMAT0200-14210INSERT RING_SINGLE CRYSTAL SI 1.5MM · AMAT0200-17989LID WIDE,23.5DIA,C3 · AMAT0200-18053LIFT GUIDE PIN LIFT · AMAT0200-18077COVER · AMAT0200-18078ESC CERAMIC COLAR SHORT · AMAT0200-18081COVER ULTIMA · AMAT0200-18091COLLAR · AMAT0200-18095COLLAR · AMAT0200-18108COLLAR MIN CONTACT 200mm · AMAT0200-18109COLLAR · AMAT0200-20114ISOLATOR DC BIOS · AMAT0200-20169RIGID COIL SUPPORT · AMAT0200-20170CAP, RIGID COIL SUPPORT · AMAT0200-20175COIL SUPPORT · AMAT0200-20208LABYRINTH FEEDTHRU COIL SUPPORT · AMAT0200-20210COVER DOUBLE RF CONNECTOR · AMAT0200-20215HOUSING DOUBLE RF CONNECTOR · AMAT0200-20216PIN COVER RF SCREW · AMAT0200-20217FEEDTHRU COIL SUPPORT · AMAT0200-20285PEDESTAL COVER 8INCH · AMAT0200-20315REST BUTTON,VECTRA · AMAT0200-20331LOWER COVER RING · AMAT0200-20437DEPOSITION RING · AMAT0200-30287ADAPTER RING · AMAT0200-35290GAS NOZZLE OUTER · AMAT0200-35291GAS NOZZLE INNER · AMAT0200-35295GAS NOZZLE OUTER · AMAT0200-35296GAS NOZZLE INNER · AMAT0200-35320FOCUS RING · AMAT0200-35323-CCAPTURE RING · AMAT0200-35324SINGLE RING · AMAT0200-35326FOCUS RING DPS · AMAT0200-35335CAPTURE RING DPS · AMAT0200-35389SINGLE RING · AMAT
596 parts currently match this page.
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Brand and model names are used only to describe compatibility and search context. Confirm final specifications against OEM documentation, a physical sample or an approved drawing.