Semiconductor Etch Chamber Spare Parts — page 2
Page 2 of 3 in the Lubanix Semiconductor Etch Chamber Spare Parts catalog, part numbers 0200-35430 to 713-048216-001. Request a quote from Lubanix.
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semiconductor etch chamber parts · RIM parts · chamber insulator · Shield Ring · etch replacement parts
Part numbers
0200-35430RING SINGLE CER 145MM JEIDA MAJOR FLAT DPS · AMAT0200-35576PUMPING LID ISOLATOR · AMAT0200-35579CHAMBER INSERT · AMAT0200-35580BUSING PIN · AMAT0200-35595OBS LINER LID · AMAT0200-35611LID.LINER SCERW · AMAT0200-35623INSERT RING SILICON MXP · AMAT0200-356697SI TOP RING · AMAT0200-35702EDGE RING · AMAT0200-35785RING CERAMIC WAFER LIFT · AMAT0200-35842C-RING · AMAT0200-35843TOP CERAMIC LINER · AMAT0200-36105CHAMBER INSERT · AMAT0200-36373LIFT PIN 149 DIA TRIANGLE · AMAT0200-36415PUMPING RING C-SHAPE · AMAT0200-36417PUMPING RING TOP · AMAT0200-36418PUMPING CHANNELCOVER · AMAT0200-36524LID. LINER · AMAT0200-36609LID ISOLATOR · AMAT0200-36649PLATE FINGER,LIFT RING · AMAT0200-36666ISOLATOR · AMAT0200-36686SINGLE RING · AMAT0200-39140RING FOCUS 195MM SNNF 1" DPS · AMAT0200-39141FOCUS RING DPS · AMAT0200-39143RING FOCUS 145MM JEIDA M/F CERAMIC · AMAT0200-39274BOTTOM LINER · AMAT0200-39289PUMPING LINER · AMAT0200-39324CHAMBER INSERT · AMAT0200-39361ISOLATOR PUMPING RING · AMAT0200-40156LIFT PIN CERAMIC LONG · AMAT0200-50090FOCUS RING · AMAT0200-50107SINGLE RING · AMAT0200-50111CLAMP RING · AMAT0200-50112COVER 7 · AMAT0200-50113A NUT COVER LID · AMAT0200-50114CERAMIC OUTER · AMAT023-002019-1TS BR940206 8INCH FORK · TEL023-002022-1UNITY-2 ROBOT FORK · TEL1105-300561-13TRANSFER FORK 8inch W-F · TEL1110-333183-11TRANSFER FORK 99.7% · TEL1110-337492-11TRANSFER FORK 99.9% · TEL1805-220159-13(U)SHIELD RING · TEL1810-121499-12SHIELTER RING · TEL1810-121499-22RING, SHELTER 8inch · TEL1810-121758-11SHELTER RING · TEL1810-121923-11CEL SILICON 10T CATHODE 8" · TEL1810-121926-12INSULATOR UPPER-lldx · TEL1810-121926-12ELECTRODE UPPER(LLDX) - POLISHING · TEL1810-121988-11ELECTRODE UPPER(LLDX) · TEL1810-150015-11SI UPPER 320mm OD 681 HOLE(INFINION) · TEL1810-220977-12CLAMP RING · TEL1810-221043-15BOTTOM INSULATOR · TEL1810-221439-24TEL SI 8" CATHODE · TEL1810-221439-25SI UPPER ELECTRODE(357 HOLE) · TEL1810-221470-25SI ELECTRODE · TEL1810-221471-24(R2)CRYSTAL CATHODE(F7) · TEL1810-221471-25UPPER ELECTRODE 8" · TEL1810-222226-11DEPO SHIELD 2(IPP) H : 255.8 · TEL1810-222235-12BOTTOM RING · TEL1810-224784-14HOLDER F/R(CE-222) · TEL1810-224789-11SI ELECTRODE · TEL1810-224852-12SI ELECTRODE 10T · TEL1810-323880-13SI INNER FOCUS RING(im) · TEL1810-323880-13MSI INNER FOCUS RING · TEL1810-323880-14SI FOCUS RING · TEL1810-323881-14SI FOCUS RING · TEL1810-325485-13F.R COVER-C · TEL1810-328070-11BELLOWS RING · TEL1810-328070-11(U)BELLOWS RING · TEL1810-328661-12KNINNER FOCUS RING · TEL1810-328662-12INNER FOCUS RING · TEL1810-329044-11INNER FOCUS RING(7.1T-59) · TEL1810-329044-11(U4)RING FOCUS INNER (0.2) · TEL1810-329156-11RING, FOCUS INNER COOL 235MM SCCM · TEL1810-329157-11SIDE SUPPORT PLATE · TEL1810-329157-11INNER FOCUS RING(6.23T->8T) · TEL1810-329157-11(S)INNER FOCUS RING · TEL1810-329157-11(U9)SI INNER FOCUS RING(RUBBER BONDING) · TEL1810-329523-11LLD INNER FOCUS RING 250MM LLD SCCM · TEL1810-329535-11M21]SI FOCUS RING(LLDX) · TEL1810-350062-=11FOCUS RING UP FOR INFINION · TEL1880-027152-126" SI ELECTRODE(FOR TE-5000) · TEL1885-322830-4HANDLING ARM (TE8500) · TEL1D10-302209-15SI-FOCUS RING(NOTCH) · TEL1D10-302209-20SI FOCUS RING · TEL1D10-304010-11RING SHIELD B3(DRM2) · TEL1D10-305530-146J-SI-240-3.4(DRM2) · TEL1D10-307164-11RING INSULATOR A7-3 · TEL1D10-307164-11(U4)RING INSULATOR (O-RING)_NLM · TEL1D10-309946-12SI FOCUS RING · TEL1D10-310020-11(S)DRM FOCUS RING · TEL1D10-310020-11(U)TEL FOCUS RING SI · TEL1D10-310020-11(U5)TEL FOCUS RING(3.1T) · TEL1D10-311372-12RING, INSULATOR A7 LA4-6(CE)(DRM2) · TEL1D10-311373-12RING, INSULATOR A7 (CE)(DRM2) · TEL1D10-313199-11SI FOCUS RING · TEL1D10-313897-12RING F-8SO-SI-220 2.5(DRM2) · TEL1D10-409458-12RING-F-SI-260-1.4(DRM2) · TEL1D80-001885-12CERAMIC ARM · TEL2910-290041-128INCH TWEEZER · TEL2910-490457-12CERAMIC PIN · TEL2L05-450106-11BLOCK GND-S1 GAP PLUG 2.5 · TEL2L10-250520-11SI_VIGUS PX INNER CEL · TEL2L10-250820-11CEL,INNER(PH-MG) V2 · TEL2L10-251061-21FOCUS RING,AD360_T4.5(320)_VIGUS · TEL2L10-251061-21MSI_FOCUS RING, AD360_T4.5(320) · TEL2L10-251162-11VIGUS GROUND RING · TEL2L10-251182-11VIGUS FOCUS RING · TEL2L10-251342-11CEL,INNER ST(NEST)V2 · TEL2L10-251343-21CEL, OUTER ST (NEST) V2 · TEL2L10-251444-11SI MASK SPACER RING · TEL2L10-251482-11SJ-6215-SB · TEL2L10-251514-11FOCUS RING LAB 360-T4.5-306 · TEL2L10-251685-11RING(L),SI GND STEP BSP V2 · TEL2L10-251853-11RING, F-SI-D380 D297.0-T2.8 S-MF · TEL2L10-252404-11RING FOCUS T5G50 · TEL2L10-252542-21(S)ELECTRODE ( VIGUS 0.5-0.8 HOLE ) · TEL2L10-252706-11SI; FOCUS RING;0823-0400-001 · TEL2L10-252779-11RING FOCUS 310-4.8G50L CONCAVE · TEL2L10-252838-11RING, FOCUS LAB 320-T5 WIDE AN · TEL2L10-252987-21INNER CEL_VIGUS MK4 · TEL2L10-253065-21(S)FOCUS RING ( VIGUS-5.5T ) · TEL2L10-253072-11RING, F-SI-D380 D297-T2.6 D4.8 · TEL2L10-253630-11ELECTRODE (0.5~0.8 HOLE) · TEL2L10-253631-11ELECTRODE, FLAT 0.5~0.8H606 V2 · TEL2L10-254186-21FOCUS RING (111,4.3T) · TEL2L10-254262-21SI GROUND RING · TEL2L10-254267-21VIGUS FOCUS RING · TEL2L10-254327-21RING FOCUS ATC-BSP 7.5-55-302 · TEL2L10-254608-11ELECTRODE, FLAT T14 H932 · TEL2L10-254608-21(M)RK4 INNER CEL MOD(T=19) · TEL2L10-254649-11RING,FOCUS 310-T4 WIDE AN · TEL2L10-254951-21RING FOCUS 320-T5 NO HOLE · TEL2L10-255149-21FOCUS RING_3.35T RK4 FOCUS RING · TEL2L10-255186-21RING FOCUS 325-315-T3.6 · TEL2L10-255441-21VIGUS RK4 3.2T FOCUS RING · TEL2L10-255875-21RING. FOCUS T4 NOMF FRTC · TEL2L10-255879-11ELECTRODE, INNER DC2 · TEL2L10-255880-21(U1)RK4 CEL OUTER(Damper) · TEL2L10-255931-11ELECTRODE, OUTER ST11.7 DC2 · TEL2L10-256131-213.25 F/R · TEL2L10-256263-11ELECTRODE, INNER DC2-15 · TEL2L10-256266-11ELECTRODE, OUTER DC2-15 · TEL2L10-256905-11RING, FOCUS T3.2 TO0 · TEL2L10-257632-11RING, FOCUS T2.35-2.2 NOMF FR28 · TEL2L10-257644-213.80T FOCUS RING VIGUS MK4 · TEL2L10-258303-11RING, FOCUS T3.4 TO0 · TEL2L10-258514-21RK4 FOCUS RING 3.5T(0.02) · TEL2L10-258650-21FOCUS RING_SI(3.65T)RK4 · TEL2L10-259614-11RING, MONO-SI T-GND450.5 T11.6 · TEL2L10-259677-213.15T LARGE DIAMETER FOCUS RING · TEL2L10-259886-11RING, FOCUS T3.3 TO0 · TEL2L10-350932-13VIGUS SAPPHIRE LIFT PIN · TEL2L10-359931-11RING, FOCUS 380-DM · TEL2L10-450605-11RK4 SAPPHIRE WINDOW · TEL2L20-254608-21CEL T14 FLAT_RK4 · TEL3D10-201448-11SI FOCUS RING(TE 3.4T) · TEL3D10-201448-13FOCUS RING 360-302-C · TEL3D10-201448-21FOCUS RING · TEL3D10-202364-12CEL,INNER(TE-T10-P-LABY) · TEL3D10-202375-12SILICON CEL,OUTER[TE349-LABY/SINGLE] · TEL3D10-202375-22CEL, OUTER(TE-349-LABY-GNDFLAT) · TEL3D10-202489-11FOUCS RING 380-T4.0 · TEL3D10-250012-11CEL,INNER (TE-LABY304) · TEL3D10-250045-11FOCUS RING, 380-T4.0 301-3PIN · TEL3D10-250195-11FOCUS RING, 360-305-LT-8.6 · TEL3D10-250266-11(S-2)ELECTRODE ( TE ) · TEL3D10-250281-11(S)FOCUS RING, J302-303-8.3-298.2 · TEL3D10-250306-11SI FOCUS RING (TE,7.3T) · TEL3D10-250316-11(SI-SHIN)CEL INNER(SH-OX1.75) · TEL3D10-250317-11FOCUS RING · TEL3D10-250317-21OUTER CELL(SHIN/SINGLE) · TEL3D10-250318-11RING FOCUS 8/MIN/CL(SHIN 3.4T) · TEL3D10-250381-11FOCUS RING, 380-T4.0(CP)T · TEL3D10-250442-31FOCUS RING, 380-T4.0 · TEL3D10-250755-21_56.5SHIN FOCUS RING 4.8T_56.5 · TEL3D10-250755-21MSHIN COOLING FOCUS RING 360_4.5T(307) · TEL3D10-251097-11ELECTRODE, OX T10-73-C912 NP · TEL3D10-251406-11RING, FOCUS 380-T7.0 · TEL3D10-290318-11RING FOCUS 8/MIN/CL(SHIN 3.25T) · TEL3D10-302020-11CATHODE 12" CEL, OTX, 10-15 · TEL3D10-350401-11SI FOCUS RING(JIN) · TEL3D10-351315-12INNER CELL · TEL3D87-052882-12SILICON RING,PROTECTION (TE GND FLAT) · TEL3M10-409091-12GUIDE LONG PIN WRAP · TEL3M10-409092-11NUT PIN GUIDE · TEL3M10-451143-11PIN TAPER WRAP · TEL3M10-451144-12GUIDE TAPER PIN WRAP · TEL40-055609-26,-27,-28,-30ROD,QUARTZ,4MM · LAM413-330504-082RING FOCUS FLAT 9608 · LAM661-097953-001UV LAMP · LAM713-001585-004GDP CAP SCREW · LAM713-011574-001PLUNGER,WAFER CLAMP · LAM713-011577-001WASHER · LAM713-011585-001COVER,CLAMP BOLT · LAM713-011585-004COVER,CLAMP BOLT · LAM713-011928-001CAP,BOLT,ELECTRODE · LAM713-028485-001BOLT,ELECTRODE RING · LAM713-028553-103-REV.COMFINEMENT RING CERAMIC · LAM713-048216-001CLIP,RETAINING.SYM DOOR MNT · LAM
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